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    • 82. 发明授权
    • Method of forming smooth polycrystalline silicon electrodes for molecular electronic devices
    • 形成用于分子电子器件的光滑多晶硅电极的方法
    • US07190075B2
    • 2007-03-13
    • US11127917
    • 2005-05-11
    • Theodore I. Kamins
    • Theodore I. Kamins
    • H01L23/48
    • H01L21/02667B82Y10/00H01L21/02532H01L21/2022H01L21/76838
    • A method is provided for forming smooth polycrystalline silicon electrodes for molecular electronic devices. The method comprises: depositing a silicon layer in an amorphous form; forming a native oxide on a surface of the amorphous silicon layer at a temperature between room temperature to 500° C.; and converting the amorphous silicon to polycrystalline silicon by heat-treating at a temperature in a range of 600° to 800° C. for a period of time in a range of 1 minute to 24 hrs, with higher temperatures associated with shorter times, in an inert atmosphere. The method converts the amorphous form of silicon to the higher conductivity polycrystalline form, while retaining the smoothness associated with the amorphous form.
    • 提供了一种形成用于分子电子器件的平滑多晶硅电极的方法。 该方法包括:沉积非晶形式的硅层; 在室温至500℃的温度下在非晶硅层的表面上形成天然氧化物; 在600〜800℃的温度范围内,在1分钟〜24小时的范围内进行热处理,将该非晶硅转化为多晶硅,在较短的时间内与较高的温度相比,在 惰性气氛。 该方法将无定形形式的硅转化为较高电导率的多晶形式,同时保持与无定形形式相关的平滑度。
    • 83. 发明授权
    • Nanowire, circuit incorporating nanowire, and methods of selecting conductance of the nanowire and configuring the circuit
    • 纳米线,并入纳米线的电路,以及选择纳米线的电导和配置电路的方法
    • US07087920B1
    • 2006-08-08
    • US11038644
    • 2005-01-21
    • Theodore I. Kamins
    • Theodore I. Kamins
    • H01L29/02
    • G11C13/025B82Y10/00G11C13/02G11C2213/16G11C2213/17H01L29/0665H01L29/0673H01L29/0676H01L29/685H01L29/78696H01L45/08H01L45/085H01L45/1226H01L45/1233H01L45/148H01L45/1616H01L45/165Y10S977/762Y10S977/938Y10S977/943
    • A nanowire includes a single crystalline semiconductor material having an exterior surface and an interior region and at least one dopant atom. At least a portion of the nanowire thermally switches between two conductance states; a high conductance state, where a high fraction of the dopant atoms is in the interior region, and a low conductance state, where a lower fraction of the dopant atoms is at the interior region and a higher fraction of the atoms is at the exterior surface. A method to select the conductance of the nanowire increases a temperature of the nanowire at least in a local region to a programming temperature to thermally activate diffusion of a dopant atom into a bulk region of the single crystalline semiconductor material and decreases the temperature of the nanowire at least in the local region to a second temperature to immobilize dopant atoms in the bulk region, the second temperature being below the programming temperature, wherein immobilized dopant atoms in the bulk region produce a desired high or low conductance state in the nanowire. The method can be used to initially configure and to reconfigure a circuit incorporating the nanowire.
    • 纳米线包括具有外表面和内部区域以及至少一个掺杂剂原子的单晶半导体材料。 纳米线的至少一部分在两个电导状态之间热切换; 高电导状态,其中高分子量的掺杂剂原子在内部区域,并且低电导状态,其中掺杂剂原子的较低部分在内部区域,较高部分的原子位于外部表面 。 选择纳米线的电导的方法至少在局部区域将纳米线的温度增加到编程温度,以热激活掺杂剂原子扩散到单晶半导体材料的主体区域并降低纳米线的温度 至少在局部区域到第二温度以固定化区域中的掺杂剂原子,第二温度低于编程温度,其中本体区域中固定的掺杂剂原子在纳米线中产生期望的高或低导电状态。 该方法可用于初始配置和重新配置纳入纳米线的电路。
    • 85. 发明授权
    • Field effect transistor with channel extending through layers on a substrate
    • 场效应晶体管,其通道延伸穿过衬底上的层
    • US06815750B1
    • 2004-11-09
    • US10155416
    • 2002-05-22
    • Theodore I. Kamins
    • Theodore I. Kamins
    • H01L31119
    • H01L29/78696H01L29/0673H01L29/0676H01L29/66742H01L29/6675H01L29/78642
    • A field effect transistor (FET) has a channel formed in a pore extending up from a conductive portion of a substrate through a stack of planar layers including a first insulating layer, a gate layer, and a second insulating layer. The pore can be upright or inclined relative to the layers. A nanoparticle used for a mask of a directional etching process ultimately defines the size of the pore and therefore the channel width. The substrate or a doped region of the substrate formed immediately beneath the channel can be a source/drain of the FET with the other drain/source being a doped region adjacent the top of the channel. The gate layer can form the gate or can contact a separate gate inside the pore.
    • 场效应晶体管(FET)具有形成在从衬底的导电部分向上延伸通过包括第一绝缘层,栅极层和第二绝缘层的平面层的堆叠的孔的沟道。 孔可相对于层直立或倾斜。 用于定向蚀刻工艺的掩模的纳米颗粒最终限定了孔的尺寸并因此限定了通道宽度。 在沟道正下方形成的衬底或衬底的掺杂区域可以是FET的源极/漏极,而另一个漏极/源极是与沟道顶部相邻的掺杂区域。 栅极层可以形成栅极或者可以接触孔内的单独栅极。
    • 87. 发明授权
    • Ultra-high density storage device
    • 超高密度存储设备
    • US5557596A
    • 1996-09-17
    • US501432
    • 1995-07-12
    • Gary GibsonTheodore I. KaminsMarvin S. KeshnerSteven L. NeberhuisCraig M. PerlovChung C. Yang
    • Gary GibsonTheodore I. KaminsMarvin S. KeshnerSteven L. NeberhuisCraig M. PerlovChung C. Yang
    • G11B9/10G11B9/14H01J19/32H01J21/10H01L27/10G11B7/00G11C11/42
    • G11B9/10Y10S977/849Y10S977/861Y10S977/863Y10S977/869Y10S977/881Y10S977/943
    • A storage device including many field emitters in close proximity to a storage medium, and a micromover, all in a partial vacuum. Each field emitter can generate an electron beam current. The storage medium has many storage areas on it, with each field emitter responsible for a number of storage areas. Also, each storage area can be in a number of different states to represent the information stored in that area. In storing information to the storage device, the power density of an electron beam current is increased to change the state of the storage area bombarded by the electron beam current. In reading information from the device, the power density of the electron beam current is reduced to generate a signal current from the storage area bombarded by the electron beam current. During reading, the power density is selected to be low enough so that no writing occurs. The magnitude of the signal current depends on the states of the storage area. The information stored in the storage area is read by measuring the magnitudes of the signal current. Finally, the micromover can scan the storage medium with respect to the field emitters so that each field emitter can access many storage areas.
    • 一种存储装置,包括紧邻存储介质的许多场发射器和全部处于部分真空中的微型扫描器。 每个场发射器可以产生电子束电流。 存储介质上有许多存储区域,每个场发射器负责多个存储区域。 此外,每个存储区域可以是多个不同的状态,以表示存储在该区域中的信息。 在将信息存储到存储装置中时,电子束电流的功率密度增加以改变由电子束电流轰击的存储区域的状态。 在从器件读取信息时,电子束电流的功率密度降低,以产生由电子束电流轰击的存储区域的信号电流。 在读取期间,功率密度被选择为足够低,使得不会发生写入。 信号电流的大小取决于存储区域的状态。 通过测量信号电流的大小来读取存储在存储区域中的信息。 最后,微型扫描器可以相对于场发射器扫描存储介质,使得每个场发射器可以访问许多存储区域。