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    • 84. 发明申请
    • Acceleration sensor element and acceleration sensor
    • 加速度传感器元件和加速度传感器
    • US20070151339A1
    • 2007-07-05
    • US11636583
    • 2006-12-11
    • Jun Watanabe
    • Jun Watanabe
    • G01P15/09G01P1/04
    • G01P15/097G01P15/09G01P2015/0831
    • An objective is to provide an acceleration sensor element that has a high detection sensitivity and that realizes an accurate measurement of acceleration; and an acceleration sensor including this acceleration sensor element to realize a smaller size and a thinner thickness. An acceleration sensor element 10 comprises a quartz, has a thickness in a Z axis direction, and is formed in a quartz substrate 20 developed in an orthogonal XY plane. A thin-walled section of a bottom section of a concave section 28 of the quartz substrate 20 has a double-ended vibrating reed 30 in which a pair of vibration arms 31 and 35 extend in a Y axis direction. When acceleration in a Z axis direction is applied while this double-ended vibrating reed 30 having bending vibration, the acceleration is detected based on a change in a resonance frequency caused when the double-ended vibrating reed 30 deflects in the Z direction.
    • 目的是提供具有高检测灵敏度并且实现加速度的准确测量的加速度传感器元件; 以及包括该加速度传感器元件的加速度传感器,以实现较小的尺寸和较薄的厚度。 加速度传感器元件10包括石英,其具有Z轴方向的厚度,并且形成在以正交XY平面显影的石英基板20中。 石英基板20的凹部28的底部的薄壁部具有双端振动片30,一对振动臂31,35在Y轴方向上延伸。 当具有弯曲振动的双端振动片30施加在Z轴方向上的加速时,基于双端振动片30在Z方向上偏转时引起的共振频率的变化来检测加速度。
    • 86. 发明授权
    • Polishing machine
    • 抛光机
    • US07108582B2
    • 2006-09-19
    • US11303207
    • 2005-12-15
    • Satoru SatoJun TamuraJun Watanabe
    • Satoru SatoJun TamuraJun Watanabe
    • B24B49/00
    • B24B21/002B24B9/065
    • A polishing machine uses a polishing head having a movable pad to press a polishing tape for polishing beveled and edge parts of a disk-shaped object. A rotary shaft is connected to the polishing head in a direction of contact surface between the polishing tape and the object. A rotary-and-reciprocating motion device rotates the polishing head around the axial line of the rotary shaft and moves it reciprocatingly along its axial line. A moving device undergoes a reciprocating motion perpendicularly to the object surface while supporting the object. When in use, the polishing head is rotated while the pad causes the polishing tape to protrude from it while the object is rotated.
    • 抛光机使用具有可移动垫的抛光头来按压用于抛光圆盘形物体的斜面和边缘部分的抛光带。 旋转轴在抛光带和物体之间的接触表面的方向上连接到抛光头。 旋转往复运动装置使抛光头围绕旋转轴的轴线旋转,并沿其轴线往复运动。 移动装置在支撑物体的同时进行垂直于物体表面的往复运动。 当使用时,当物体旋转时,抛光头旋转,同时衬垫使得抛光带从其上突出。
    • 87. 发明申请
    • Quartz type pressure sensor, and production method therefor
    • 石英型压力传感器及其制造方法
    • US20060162435A1
    • 2006-07-27
    • US10563235
    • 2004-07-02
    • Jun Watanabe
    • Jun Watanabe
    • G01M17/02
    • G01L9/0075
    • In a touch-mode capacitance type pressure sensor, a quartz pressure sensor that can solve difficulty in thickness control on a diaphragm due to a low etching precision which is a drawback in a pressure sensor using a detecting piece made from silicon, and deterioration in a detecting accuracy and poor repetitive reproducibility in elastic deformation due to the difficulty, respectively, is provided by utilizing quartz as a detecting piece for the pressure sensor. The quartz pressure sensor including a bottom plate made from an insulating material, a lower electrode film and a dielectric film sequentially laminated on a face of the bottom plate, a detecting piece provided at a position thereof opposed to said dielectric film with a thin portion and fixed on the face of the bottom plate, and an upper electrode film formed in at least one portion of the thin portion having a positional relationship thereof opposed to the lower electrode film, in which a fine gap airtight space is provided between a lower face of the detecting piece and the dielectric film is characterized in that the detecting piece is made from a quartz material.
    • 在触摸模式电容型压力传感器中,由于采用硅制的检测片的压力传感器的缺点,由于蚀刻精度低,能够解决膜片厚度控制困难的石英压力传感器, 通过利用石英作为压力传感器的检测件,分别提供了由于难度而导致的弹性变形中的检测精度和差的重复再现性。 石英压力传感器包括由绝缘材料制成的底板,下电极膜和依次层压在底板的表面上的电介质膜,设置在其与薄膜部分的所述电介质膜相对的位置处的检测片, 固定在底板的表面上的上电极膜,以及形成在薄膜部分的至少一部分中的与下电极膜相对的位置关系的上电极膜,其中在下电极膜的下表面之间设置有细间隙气密空间 检测片和电介质膜的特征在于,检测片由石英材料制成。
    • 90. 发明授权
    • Semiconductor-device design method, semiconductor-device design program and semiconductor-device design apparatus
    • 半导体器件设计方法,半导体器件设计程序和半导体器件设计设备
    • US06971078B2
    • 2005-11-29
    • US10459435
    • 2003-06-12
    • Hisayoshi OhbaJun Watanabe
    • Hisayoshi OhbaJun Watanabe
    • G06F17/50H01L21/3205H01L21/82H01L21/822H01L23/52H01L27/04G06F9/45
    • G06F17/5081G06F17/5036
    • A semiconductor-device design method considering change in capacitance between wiring patterns due to an inserted dummy pattern. An information reception part receives dummy rule information about rules for dummy patterns and process information about wiring structure of wiring patterns. A capacitance calculation part calculates a capacitance value for each of wiring distances between the wiring patterns defined by the process information, under the condition that a dummy pattern defined by the dummy rule information is inserted between the wiring patterns. A wiring-pattern capacitance calculation part calculates capacitance values between wiring patterns of an intended semiconductor device defined by layout data stored in a layout database, referring to the capacitance values calculated by the capacitance calculation part. Thus, a semiconductor device considering change in capacitance between wiring patterns due to an inserted dummy pattern is designed.
    • 考虑由插入的虚拟图案引起的布线图案之间的电容变化的半导体器件设计方法。 信息接收部分接收关于伪图案的规则的伪规则信息和关于布线图案的布线结构的处理信息。 在由布线图案之间插入由虚拟规则信息定义的虚拟图案的条件下,电容计算部分计算由处理信息定义的布线图案之间的每个布线距离的电容值。 布线图案电容计算部,参照由电容计算部算出的电容值,计算由布局数据库中存储的布局数据所定义的期望的半导体装置的布线图案之间的电容值。 因此,设计考虑由于插入的虚拟图案引起的布线图案之间的电容变化的半导体器件。