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    • 86. 发明授权
    • Salt suitable for an acid generator and a chemically amplified resist composition containing the same
    • 适用于酸产生剂的盐和含有它的化学放大抗蚀剂组合物
    • US08124803B2
    • 2012-02-28
    • US11390319
    • 2006-03-28
    • Isao YoshidaYukako HaradaSatoshi YamaguchiNobuo Ando
    • Isao YoshidaYukako HaradaSatoshi YamaguchiNobuo Ando
    • C07C309/19
    • C07C309/17C07C2603/74
    • The present invention provides a salt of the formula (L)A salt of the formula (L): wherein Q represents —CO— group or —C(OH)— group; ring X represents monocyclic or polycyclic hydrocarbon group having 3 to 30 carbon atoms in which a hydrogen atom is substituted with a hydroxyl group at Q position when Q is —C(OH)— group or in which two hydrogen atoms are substituted with ═O group at Q position when Q is —CO— group, and at least one hydrogen atom in the monocylic or polycyclic hydrocarbon group may optionally be substituted with alkyl group having 1 to 6 carbon atom, alkoxy group having 1 to 6 carbon atom, perfluoroalkyl group having 1 to 4 carbon atoms, hydroxyalkyl group having 1 to 6 carbon atoms, hydroxyl group or cyano group; R10 and R20 each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; and A+ represents organic counter ion. The present invention also provides a chemically amplified resist composition comprising the salt of the formula (L).
    • 本发明提供式(L)的盐式(L)的盐:其中Q表示-CO-基或-C(OH) - 基; 环X表示具有3〜30个碳原子的单环或多环烃基,其中当Q为-C(OH) - 基时,其中氢原子被Q位上的羟基取代,或其中两个氢原子被取代为= 在Q为-CO-基的Q位置,单环或多环烃基中的至少一个氢原子可以任选被具有1至6个碳原子的烷基,具有1至6个碳原子的烷氧基,具有1至6个碳原子的烷氧基, 1至4个碳原子,具有1至6个碳原子的羟基烷基,羟基或氰基; R 10和R 20各自独立地表示氟原子或具有1〜6个碳原子的全氟烷基; 而A +代表有机抗衡离子。 本发明还提供了包含式(L)的盐的化学放大抗蚀剂组合物。