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    • 83. 发明授权
    • Voltage measuring apparatus having an electro-optic member
    • 具有电光元件的电压测量装置
    • US5444365A
    • 1995-08-22
    • US113239
    • 1993-08-30
    • Hironori TakahashiTsuneyuki UrakamiShinichiro AoshimaIsuke Hirano
    • Hironori TakahashiTsuneyuki UrakamiShinichiro AoshimaIsuke Hirano
    • G01R15/24G01R1/07G01R19/00G01R31/302G01R31/319G01R1/04
    • G01R1/071Y10S435/808
    • A change in voltage can be sensitively detected at a local part of a measured object. A set of laser medium and E-O probe are disposed between a pair of mirrors, a first one and a second one, forming a laser resonator. A linearly polarized light is emitted from the laser medium. The polarized light enters the E-O probe, and returns after being reflected by the second mirror. When a voltage is given to the E-O probe from the measured object, depending on the voltage, a refractive index of the E-O probe is changed, the light emitted from the E-O probe is ovally polarized, and a resonance status of the laser resonator then varies. Therefore, the light intensity emitted through the partially penetrating first mirror to the outside of the laser resonator corresponds to the voltage at the measured object in the proximity of the E-O probe. Consequently, a voltage distribution on the measured object such as IC with fine structures can be two-dimensionally detected.
    • 可以在测量对象的局部部分敏感地检测电压变化。 一组激光介质和E-O探头设置在一对反射镜之间,第一和第二反射镜形成激光谐振器。 从激光介质发射线偏振光。 偏振光进入E-O探头,并在被第二个反射镜反射之后返回。 当从测量对象向EO探针施加电压时,根据电压,EO探针的折射率改变,从EO探针发射的光被卵巢极化,然后激光谐振器的共振状态变化 。 因此,通过部分穿透的第一反射镜发射到激光谐振器的外部的光强度对应于E-O探头附近的测量对象处的电压。 因此,可以二维地检测诸如具有精细结构的IC的测量对象上的电压分布。