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81. 发明专利

JPH08155591A CONTINUOUS CASTING APPARATUS BY INDUCTION HEATING HAVING MAGNETIC FLUX SHIELDING DEVICE AND MELTING FURNACE 失效
公开(公告)号：JPH08155591A
公开(公告)日：1996-06-18
申请号：JP31771794
申请日：1994-11-29
申请人： SHINKO ELECTRIC CO LTD , KOBE STEEL LTD
发明人： KONO HITOSHI , TSUDA MASANORI , AYADA KENZO
IPC分类号： H05B6/30 , B22D11/04 , B22D11/041 , F27B17/00 , F27D11/06
摘要： PURPOSE: To restrain the leakage of magnetic flux to the outside, to prevent the heating of an outside structural member and to improve the electric power efficiency by arranging a magnetic material-made magnetic shielding member so as to surround the upper and the lower both sides and the outer peripheral side or the induction heating coil of an induction heating device. CONSTITUTION: The magnetic material of laminated electrical steel sheet, ferrite, etc., is used and U-shaped or straight cylindrical, polygonal magnetic shielding member 1 of the cross section in the axial direction is manufactured and the induction heating coil 12 arranged in temp. holding and stirring part 19 of a continuous casting apparatus in the inner surface is arranged. Further, the upper and the lower end surfaces 1a, 1b of the magnetic shielding material 1 are put with a copper or a copper alloy-made round plate or polygonal plate 2, 3 and combined and fixed to a copper-made frame 4 having the fixed gas with this magnetic shielding material 1, with bolts 5 and nuts 6. Then, the magnetic shielding member 1 has the structure arranged at a prescribed equal interval in the circular direction of the outside of the heating coil 12.

82. 发明专利

JPH073349A DEVICE FOR TURNING OVER AND MELTING SOLIDIFIED BODY FOR MELTING ALLOY WITH COLD WALL CRUCIBLE FURNACE 失效
公开(公告)号：JPH073349A
公开(公告)日：1995-01-06
申请号：JP5124393
申请日：1993-02-18
申请人： SHINKO ELECTRIC CO LTD
发明人： KONO HITOSHI , TSUDA MASANORI
IPC分类号： C22B9/16 , F27B14/06
摘要： PURPOSE:To provide a solidified body turning-over and melting device, in which the take-out, turn-over, recharge and remelt of the solidified body can efficiently be performed in the condition of keeping vacuum. CONSTITUTION:Above the opening part of a cold wall induction melting crucible furnace 10, a dropping prevention bar 57 is arranged. By turning over at almost 180 deg. angle, the solidified body 9 is taken out and lifted to the opening part of the melting crucible furnace 10 returned back to the normal melting position with solidified body holding and turning-over mechanism 24 and turned over and reversely stood. A process executing the remelting by charging the reversely stood solidified body making skull upward from the opening part of the crucible furnace 10 is operated from the outer part of a vacuum vessel in the condition of keeping the vacuum vessel 21 to the vacuum. By thus method, alloy is melted with the cold wall crucible furnace.

83. 发明专利

JPH073346A MAGNETIC FLOATING-UP INDUCTION MELTING DEVICE 失效
公开(公告)号：JPH073346A
公开(公告)日：1995-01-06
申请号：JP11766593
申请日：1993-04-22
申请人： SHINKO ELECTRIC CO LTD
发明人： KONO HITOSHI , TSUDA MASANORI
IPC分类号： C22B9/00 , C22B9/16 , F27B14/06
摘要： PURPOSE:To obtain a magnetic floating-up induction melting device, in which the material to be melted can stably be floated up in a crucible even in the case of being a large quantity of the material to be melted. CONSTITUTION:A first coil 2a is fixed at a specific position around the lower part of the crucible and a second coil is arranged at the upper part of the first coil. Current is supplied at each coil, and by the first coil, mainly heating and floating-up forces are given to the material to be melted, and by the second coil, mainly horizontal force is given to the material to be melted. The crucible 1 is desirable to be constituted with segments 14 forming longitudinal directional slits completed at the lower part. Alternating magnetic fluxes formed with an AC current conducted to two coils are formed in the reverse directions. A third coil short-circuited at the intermediate position between the first coil and the second coil can be arranged.

84. 发明专利

JPH05201506A STORAGE FOR CLEAN ROOM 失效
公开(公告)号：JPH05201506A
公开(公告)日：1993-08-10
申请号：JP1231192
申请日：1992-01-27
申请人： SHINKO ELECTRIC CO LTD
发明人： KONO HITOSHI , OKUNO ATSUSHI , TSUDA MASANORI , HAYASHI MICHIHIRO , YAMASHITA TEPPEI , MURATA MASANAO , TANAKA MIKI , MORITA NICHIYA , NAKAMURA AKIO
IPC分类号： A47B81/00 , B08B3/02 , B65G1/00 , B65G1/02 , B65G1/04 , F24F7/06 , F26B9/00 , H01L21/304
摘要： PURPOSE:To provide a storage for a clean room for preventing a wafer or the like from being contaminated by particles or the like by providing a device for automatically putting in and out articles for a container which is capable of airtightly storing articles apt to be easily damaged by particle contamination and chemical contamination and has a lid locking mechanism and disposing an automatic container cleaning unit. CONSTITUTION:A container 40 required to be cleaned is transfer-loaded from a storage section S onto a container placing table 61 of a container cleaning preparatory station 60 by a stacker crane 20. When the container 40 required to be cleaned is transfer-loaded onto the container placing table 61, an automatic stored article in and out unit 300A is operated to perform the release operation for the container 40 and the lowering operation for a lid elevating table 31, and a wafer cassette W in the container 40 is taken out to a cassette temporary storage area S2. Subsequently, an automatic door 81 of a cleaning room 80 is opened, the emptied container 40 is transfer-loaded onto a container placing table of the cleaning room 80 by a stacker crane 20, and the automatic door 81 is closed.

85. 发明专利

JPH05109865A PORTABLE AIRTIGHT CONTAINER 失效
公开(公告)号：JPH05109865A
公开(公告)日：1993-04-30
申请号：JP26978091
申请日：1991-10-17
申请人： SHINKO ELECTRIC CO LTD
发明人： KONO HITOSHI , OKUNO ATSUSHI , TSUDA MASANORI , HAYASHI MICHIHIRO , YAMASHITA TEPPEI , MURATA MASANAO , TANAKA MIKI , MORITA AKIYA
IPC分类号： B65D81/20 , H01L21/02 , H01L21/677 , H01L21/68
摘要： PURPOSE:To provide a high-reliability airtight container which can always ensure sufficient airtightness irrespective of a sealing material. CONSTITUTION:A portable airtight container is composed of the following: a pod 10 which is provided with a housing space; and a pod door which airtightly seals an opening 11 at the pod. In the portable airtight container, a seal coupling part 110 which is coupled with a sealing material 13 for the pod door is constituted of inside and outside edge-shaped protruding stripes 111A, 111B which surround the opening 11 by forming a groove space 112.

86. 发明专利

JPH0582623A MECHANICAL INTERFACE DEVICE 失效
公开(公告)号：JPH0582623A
公开(公告)日：1993-04-02
申请号：JP24086091
申请日：1991-09-20
申请人： SHINKO ELECTRIC CO LTD
发明人： KONO HITOSHI , OKUNO ATSUSHI , TSUDA MASANORI , HAYASHI MICHIHIRO , YAMASHITA TEPPEI , MURATA MASANAO , TANAKA MIKI , MORITA AKIYA
IPC分类号： H01L21/677 , H01L21/68
摘要： PURPOSE:To increase the shielding between a pod and a main body of the device by a simple structure without installing a lock mechanism, etc., around a port of a main body case by using an electromagnetic attracting force as a means to biase a flange of the pod towards a port plate. CONSTITUTION:After a pod POD 10 is moved onto a port plate 3 of a main body case 1 from outside the device, all the electromagnets 53 are magnetized. Then, an electromagnetic attracting force works on a magnetic member 54 and a flange 12 of the pod POD 10 displaces to the port plate 3 against the elasticity of shielding material 51 and presses the shielding materials 51a, 51b with the port plate 3. By changing an ampere-turn of the electromagnets 53, an electromagnetic attracting force of any magnitude can be obtained. Therefore, shielding material 13, not to mention the shielding material 15, can also be pressed by the whole surface strongly and accurately and then a good shielding property can be secured. In addition, there is no necessity of installing a member around the port of the main body case and so the device can be simply structured.

87. 发明专利

JPH0582621A MECHANICAL INTERFACE DEVICE 失效
公开(公告)号：JPH0582621A
公开(公告)日：1993-04-02
申请号：JP24084991
申请日：1991-09-20
申请人： SHINKO ELECTRIC CO LTD
发明人： YAMASHITA TEPPEI , MURATA MASANAO , TANAKA MIKI , MORITA AKIYA , KONO HITOSHI , OKUNO ATSUSHI , TSUDA MASANORI , HAYASHI MICHIHIRO
IPC分类号： H01L21/677 , H01L21/68
摘要： PURPOSE:To provide a mechanical connector wherein gas replacement is conducted easily for a pod only by adding a simple member. CONSTITUTION:This mechanical connector is constituted of a pod with an opening flange 10 which is mounted on a port plate 3 forming a port 4 for transferring a material to be processed in and from a main body case 1 and which covers the port 4, a pod door 21 which can close this opening, and a port door 31 which is so supported in the case 1 that it can go up and down and which fits in with the port plate 3 and closes the port when it rises uppermost. This device has such a mechanism that the port door carries the pod door 21 from in the pod to the main body case or vice versa. This equipment also has an energizing device which marks off a cylinder-shaped space wherein the port door 31 can go up and down within the specified height and which, being located on an upwardly movable port skirt 33 airtightly fit in on the lower face of the port plate, the port door or a member which goes up and down together with the port door, moves the port skirt towards the port plate and a bellows 50 which airtightly covers a lower opening of the skirt. The port plate has an exhaust port 3B which is made on the inner face and an air inlet 3A to be connected to an N2 gas source.

88. 发明专利

JPH04122848A DETECTING APPARATUS OF TIME POINT OF COMPLETE MELTING OF METAL IN INDUCTION MELTING FURNACE 失效
公开(公告)号：JPH04122848A
公开(公告)日：1992-04-23
申请号：JP24266590
申请日：1990-09-14
申请人： SHINKO ELECTRIC CO LTD
发明人： KONO HITOSHI , TSUDA MASANORI
IPC分类号： G01N25/04 , F27B3/08
摘要： PURPOSE:To conduct detection quickly and accurately by determining the time point of complete melting of a metal to be melted by detecting an operating frequency of an induction melting furnace. CONSTITUTION:Numeral 8 denotes a feed power energy monitoring device, which has a function of outputting a melting power reach signal when an estimated power energy required for melting on the conditions of the material and the melting amount of a metal to be melted is reached. Therefore the feed power energy monitoring device 8 comprises a watt-hour meter with a pulse output and a preset counter in combination, and it is so designed that a supply power is integrated by the watt-hour meter with pulse output, that an integrated value thus obtained is compared with a reference preset power energy in the preset counter and that the melting power reach signal is delivered when a comparison value reaches the estimated power energy for melting. The value of a reference preset power of this preset counter is set in such a manner that several times of trial melting is executed beforehand for the metal to be melted and that the power with which the metal is melted and the temperature of the molten metal does not rise any more is calculated as the reference preset power.

89. 发明专利

JPH03277728A FURNACE BODY STRUCTURE OF COLD WALL TYPE CRUCIBLE 失效
公开(公告)号：JPH03277728A
公开(公告)日：1991-12-09
申请号：JP7552490
申请日：1990-03-27
申请人： SHINKO ELECTRIC CO LTD
发明人： KONO HITOSHI , IKEGUCHI HIDEO , TSUDA MASANORI , OZAKI KAZUO
IPC分类号： C22B9/16 , F27B14/06 , F27D1/12
摘要： PURPOSE:To melt an activated metal, etc., with high power efficiency without being contaminated by the material of crucible by constituting the crucible for melting activated metal, etc., of plural water cooling type outer peripheral segments which are connected with water cooling type bottom segments and elected with small slit between each segment, and providing an induction heating coil around outer periphery. CONSTITUTION:A cold wall type crucible 10 for melting metal is constituted of the bottom segments 15 made of copper of good heat conductivity and of plural outer peripheral segments 12 which is made of copper and elected at right angles to the connected bottom segments, and each segment 12 is provided on the bottom segments 15 in a circular shape with thin slit between each other, and a water cooling type coil 8 for induction current is wound around the outer wall surface 12a. A metal melting chamber upper part of which is opened is formed by the inner wall surfaces 12b of a group of outer segments 12 and the upper surfaces 15' of the bottom segments 15, and cooling water passages 13, 15a are provided respectively in the outer peripheral segments 12 and the bottom segments 15 to carry out forced cooling. The metal to be molten is molten without being brought into contact with the inner surface of the crucible 10 by the induction heating of the coil 8, and the molten metal of extremely high purity is obtained.

90. 发明专利

JPH0356021A OVERCURRENT PROTECTIVE GEAR FOR HIGH TENSION CIRCUIT 失效
公开(公告)号：JPH0356021A
公开(公告)日：1991-03-11
申请号：JP19056789
申请日：1989-07-25
申请人： SHINKO ELECTRIC CO LTD
发明人： KONO HITOSHI , TSUDA MASANORI
IPC分类号： G01R31/302 , G01R19/165 , G01R31/00 , H01J37/06 , H01J37/248 , H02H3/00 , H02H3/08 , H02H3/33 , H02H7/00
摘要： PURPOSE:To protect overcurrents by installing a first element such as a filament and a second element such as a cathode and mounting a current transformer, through which two high-tension cables are penetrated, and an overcurrent detector supplied with the output currents of the current transformer. CONSTITUTION:Filament currents If are made to flow through a filament 2 through high-tension cables 26P, 26N, and currents Is made to flow between the filament 2 and a cathode 3 are made to flow through the high-tension cables 26P, 26N. Since magnitude is equalized and the direction of flow is opposed in filament currents If made to flow through the high-tension cable 26P and filament currents If made to flow through the high-tension cable 26N, a current transformer detects only currents Is at all times. The currents Is are at a low level on normalcy, but they are brought to large short-circuit currents when a discharge phenomenon is generated between the filament 2 and the cathode 3, and an overcurrent detector detects the short-circuit currents.

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