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81. 发明授权

US07022463B2 Near-field exposure photoresist and fine pattern forming method using the same 失效
标题翻译：近场曝光光刻胶和使用其的精细图案形成方法
公开(公告)号：US07022463B2
公开(公告)日：2006-04-04
申请号：US10921184
申请日：2004-08-19
申请人： Takako Yamaguchi , Ryo Kuroda
发明人： Takako Yamaguchi , Ryo Kuroda
IPC分类号： G03F7/30 , G03F7/023
CPC分类号： G03F7/0226 , G03F7/0236 , G03F7/0752 , G03F7/168 , G03F7/2014
摘要： A near-field photoresist for formation of a fine pattern with by near-field exposure includes an alkali-soluble novalac resin, a diazyde-type photosensitizer which is photoreactive by near-field exposure, a photoacid generator which generates acid by the near-field exposure, and a solvent.
摘要翻译：用于通过近场曝光形成精细图案的近场光致抗蚀剂包括碱溶性诺瓦克树脂，通过近场曝光光反应的二叠氮型光敏剂，通过近场产生酸的光酸产生剂暴露和溶剂。

82. 发明申请

US20060007440A1 Method and apparatus for detecting relative positional deviation between two objects 失效
标题翻译：用于检测两个物体之间的相对位置偏差的方法和装置
公开(公告)号：US20060007440A1
公开(公告)日：2006-01-12
申请号：US11166106
申请日：2005-06-27
申请人： Ryo Kuroda , Yasuhisa Inao
发明人： Ryo Kuroda , Yasuhisa Inao
IPC分类号： G01B11/00
CPC分类号： G03F9/7076 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/7038 , G03F9/7042
摘要： Disclosed is a method and apparatus for detecting a relative positional deviation between first and second objects. In one preferred form of the invention, the detecting method includes the steps of (i) providing the first and second objects with diffraction gratings, respectively, each having a grating pitch larger than a wavelength of a light source used, (ii) placing the first and second objects so that a dielectric material layer having a thickness smaller than the wavelength of the light source used is interposed between the first and second objects, and so that the diffraction gratings of the first and second objects are opposed to each other, (iii) projecting light from the light source onto the diffraction gratings of the first and second objects, and (iv) detecting the relative positional deviation between the first and second objects on the basis of diffraction light projected from the diffraction gratings to a space.
摘要翻译：公开了一种用于检测第一和第二物体之间的相对位置偏差的方法和装置。在本发明的一个优选形式中，检测方法包括以下步骤：（i）分别为第一和第二物体提供衍射光栅，每个衍射光栅具有大于所使用的光源的波长的光栅间距，（ii）第一和第二物体，使得具有小于所使用的光源的波长的厚度的介电材料层插入在第一和第二物体之间，并且使得第一和第二物体的衍射光栅彼此相对（（ iii）将来自光源的光投射到第一和第二物体的衍射光栅上，以及（iv）基于从衍射光栅投影到衍射光栅的衍射光来检测第一和第二物体之间的相对位置偏差。

83. 发明申请

US20050247117A1 PROBE WITH HOLLOW WAVEGUIDE AND METHOD FOR PRODUCING THE SAME 失效
标题翻译：具有中空波长的探针及其制造方法
公开(公告)号：US20050247117A1
公开(公告)日：2005-11-10
申请号：US11102662
申请日：2005-04-11
申请人： Yasuhiro Shimada , Ryo Kuroda
发明人： Yasuhiro Shimada , Ryo Kuroda
IPC分类号： G01B11/30 , B81B1/00 , B81C1/00 , G01Q60/06 , G01Q60/18 , G01Q60/22 , G01Q60/38 , G01Q70/12 , G01Q80/00 , G02B6/10 , G02B6/122 , G02B6/24 , G11B7/135 , G11B7/22 , G01B5/28
CPC分类号： G01Q60/22 , G02B6/10 , G02B6/122 , G02B6/241
摘要： A probe for detecting light or irradiating light comprises a cantilever supported at an end thereof by a substrate, a hollow tip formed at a free end of the cantilever, a microaperture formed at the end of the tip, and a hollow waveguide formed inside the cantilever. A method for producing a probe for light detection or light irradiation which comprises the steps of working a substrate to form a groove therein, forming a flat plate-shaped cover portion on the groove to form a hollow waveguide having an opening in a part thereof, forming a hollow tip having a microaperture on the opening, and removing a part of the substrate by etching, to form a cantilever.
摘要翻译：用于检测光或照射光的探针包括在其一端由基底支撑的悬臂，形成在悬臂的自由端的中空尖端，在尖端的端部形成的微孔，以及形成在悬臂内的中空波导。一种用于光检测或光照射的探针的制造方法，包括以下步骤：在基板上加工形成槽，在所述槽上形成平板状的盖部，形成在其一部分具有开口部的中空波导管，在开口上形成具有微孔的中空尖端，并通过蚀刻去除衬底的一部分，以形成悬臂。

84. 发明授权

US06891151B2 Probe with hollow waveguide and method for producing the same 失效
标题翻译：中空波导探头及其制造方法
公开(公告)号：US06891151B2
公开(公告)日：2005-05-10
申请号：US09879905
申请日：2001-06-14
申请人： Yasuhiro Shimada , Ryo Kuroda
发明人： Yasuhiro Shimada , Ryo Kuroda
IPC分类号： G01B11/30 , B81B1/00 , B81C1/00 , G01Q60/06 , G01Q60/18 , G01Q60/22 , G01Q60/38 , G01Q70/12 , G01Q80/00 , G02B6/10 , G02B6/122 , G02B6/24 , G11B7/135 , G11B7/22 , H01J5/16
CPC分类号： G01Q60/22 , G02B6/10 , G02B6/122 , G02B6/241
摘要： A probe for detecting light or irradiating light comprises a cantilever supported at an end thereof by a substrate, a hollow tip formed at a free end of the cantilever, a microaperture formed at the end of the tip, and a hollow waveguide formed inside the cantilever.A method for producing a probe for light detection or light irradiation which comprises the steps of working a substrate to form a groove therein, forming a flat plate-shaped cover portion on the groove to form a hollow waveguide having an opening in a part thereof, forming a hollow tip having a microaperture on the opening, and removing a part of the substrate by etching, to form a cantilever.
摘要翻译：用于检测光或照射光的探针包括在其一端由基底支撑的悬臂，形成在悬臂的自由端的中空尖端，在尖端的端部形成的微孔，以及形成在悬臂内的中空波导。一种用于光检测或光照射的探针的制造方法，包括以下步骤：在基板上加工形成槽，在所述槽上形成平板状的盖部，形成在其一部分具有开口部的中空波导管，在开口上形成具有微孔的中空尖端，并通过蚀刻去除衬底的一部分，以形成悬臂。

85. 发明申请

US20050056351A1 Surface treatment method, process for producing near-field exposure mask using the method, and nanoimprint lithography mask 审中-公开
标题翻译：表面处理方法，使用该方法制造近场曝光掩模的方法和纳米压印光刻掩模
公开(公告)号：US20050056351A1
公开(公告)日：2005-03-17
申请号：US10912123
申请日：2004-08-06
申请人： Tomohiro Yamada , Ryo Kuroda
发明人： Tomohiro Yamada , Ryo Kuroda
IPC分类号： B32B15/04 , G03F1/48 , G03F7/00 , G03F9/00 , H01L21/027
CPC分类号： C23C26/00 , B82Y10/00 , B82Y40/00 , G03F1/50 , G03F7/0002
摘要： A surface treatment method includes a step of forming a metal layer on at least a part of a surface of a structural member, and a step of exposing the metal layer to a plasma based on SF6 to effect surface treatment.
摘要翻译：表面处理方法包括在结构构件的表面的至少一部分上形成金属层的步骤，以及基于SF 6将金属层暴露于等离子体以进行表面处理的步骤。

86. 发明授权

US06559926B2 Pattern forming apparatus and pattern forming method 失效
标题翻译：图案形成装置和图案形成方法
公开(公告)号：US06559926B2
公开(公告)日：2003-05-06
申请号：US09971663
申请日：2001-10-09
申请人： Takako Yamaguchi , Ryo Kuroda
发明人： Takako Yamaguchi , Ryo Kuroda
IPC分类号： G03B2742
CPC分类号： G03F7/70458 , G03B27/42
摘要： A pattern forming apparatus for forming a pattern on a substrate includes a first exposure section capable of conducting pattern exposure for a predetermined line width, a second exposure section for conducting pattern exposure for a line width greater than the predetermined linewidth of the first exposure section, and a device for detecting the relative positional relationship between the first exposure section and the second exposure section. Pattern exposure is conducted by using the first exposure section and the second exposure section on the basis of the detected positional relationship.
摘要翻译：用于在基板上形成图案的图案形成装置包括能够对预定线宽进行图案曝光的第一曝光部，对于第一曝光部的预定线宽大的线宽进行图案曝光的第二曝光部，以及用于检测第一曝光部分和第二曝光部分之间的相对位置关系的装置。基于检测到的位置关系，通过使用第一曝光部和第二曝光部进行图案曝光。

87. 发明授权

US06335522B1 Optical probe having a refractive index micro-lens and method of manufacturing the same 有权
$Optical probe having a refractive index micro-lens and method of manufacturing the same$
标题翻译：具有折射率微透镜的光学探针及其制造方法
公开(公告)号：US06335522B1
公开(公告)日：2002-01-01
申请号：US09426946
申请日：1999-10-26
申请人： Yasuhiro Shimada , Takayuki Yagi , Takayuki Teshima , Ryo Kuroda
发明人： Yasuhiro Shimada , Takayuki Yagi , Takayuki Teshima , Ryo Kuroda
IPC分类号： G02B704
CPC分类号： G01Q60/22 , Y10S977/862
摘要： An optical probe which comprises a substrate, an elastic body supported by the substrate and having a free end, a projection having a micro-aperture and arranged at the free end of the elastic body, and a refractive index micro-lens also arranged at the free end of the elastic body and adapted to focus light to the micro-aperture.
摘要翻译：一种光学探针，其包括基板，由基板支撑并具有自由端的弹性体，具有微孔并且布置在弹性体自由端的突起，以及折射率微透镜，其还布置在弹性体的自由端并适于将光聚焦到微孔。

88. 发明授权

US06171730B2 Exposure method and exposure apparatus 有权
标题翻译：曝光方法和曝光装置
公开(公告)号：US06171730B2
公开(公告)日：2001-01-09
申请号：US09184655
申请日：1998-11-03
申请人： Ryo Kuroda , Tsutomu Ikeda , Yasuhiro Shimada
发明人： Ryo Kuroda , Tsutomu Ikeda , Yasuhiro Shimada
IPC分类号： G03F900
CPC分类号： G03F7/7035 , B82Y10/00 , G03F1/50 , G03F7/2014 , G03F7/70325
摘要： An exposure apparatus and method for transferring a pattern to an object to be exposed by exposure to evanescent light using a mask having an aperture pattern having a width of 100 nm or less. The mask is arranged opposite to the object to be exposed, and pressure is applied to the mask arranged opposite to the object from the side of the mask opposite to the surface facing the object to generate evanescent light under the pressure applied, to transfer the pattern of the mask to the object to be exposed by exposure to the evanescent light.
摘要翻译：一种曝光装置和方法，用于使用具有宽度为100nm以下的孔径图案的掩模，通过曝光于ev逝光将图案转印到待曝光的对象物上。掩模被布置成与要暴露的物体相对，并且将压力施加到与面对物体的表面相反侧的与物体相对的掩模上，以在施加的压力下产生ev逝光，以转移图案通过暴露于ev逝的光，将面具暴露于被曝光的物体上。

89. 发明授权

US5751684A Recording/reproducing apparatus and method for recording/reproducing information using probe 失效
标题翻译：用于使用探针记录/再现信息的记录/再现装置和方法
公开(公告)号：US5751684A
公开(公告)日：1998-05-12
申请号：US676684
申请日：1996-07-10
申请人： Toshihiko Takeda , Ryo Kuroda , Susumu Yasuda
发明人： Toshihiko Takeda , Ryo Kuroda , Susumu Yasuda
IPC分类号： G02B21/00 , G01Q30/04 , G01Q60/10 , G01Q60/18 , G01Q60/24 , G01Q60/46 , G01Q60/50 , G01Q70/06 , G01Q80/00 , G01Q90/00 , G11B5/00 , G11B9/00 , G11B9/14 , G11B19/04 , G11B20/18 , G11B7/00
CPC分类号： G11B5/00 , G11B20/18 , G11B9/14 , G11B9/1418 , B82Y10/00 , B82Y35/00 , G01Q80/00 , G11B19/04 , Y10S977/849 , Y10S977/932 , Y10S977/947
摘要： In recording/reproduction of information, a probe is used to scan the surface of a recording medium in which a recording bit is formed and the recording bit is detected by comparing a signal detected via the probe with a predetermined threshold value. A signal detected within the recording surface is normalized on the basis an amplitude value of a signal detected on a portion where no recording bit is present by the probe.
摘要翻译：在信息的记录/再现中，使用探针来扫描其中形成记录位的记录介质的表面，并且通过将通过探针检测的信号与预定阈值进行比较来检测记录位。在记录表面内检测到的信号基于在探针没有记录位的部分上检测到的信号的振幅值被归一化。

90. 发明授权

US5343460A Information processing device and information processing method 失效
标题翻译：信息处理装置及信息处理方法
公开(公告)号：US5343460A
公开(公告)日：1994-08-30
申请号：US738427
申请日：1991-07-31
申请人： Toshihiko Miyazaki , Kunihiro Sakai , Hiroyasu Nose , Etsuro Kishi , Ryo Kuroda
发明人： Toshihiko Miyazaki , Kunihiro Sakai , Hiroyasu Nose , Etsuro Kishi , Ryo Kuroda
IPC分类号： G01Q10/00 , G01Q60/10 , G01Q60/18 , G01Q60/22 , G01Q70/14 , G01Q80/00 , G11B7/00 , G11B7/004 , G11B7/0045 , G11B7/005 , G11B7/12 , G11B7/135 , G11B9/00 , G11B9/14 , G11B11/00 , G11B11/08
CPC分类号： G11B7/005 , G11B11/00 , G11B7/00455 , G11B7/0052 , G11B7/12 , G11B7/1384 , G11B9/14 , B82Y10/00 , B82Y20/00 , G01Q80/00
摘要： Information is recorded by providing a recording medium having a recording layer on an electroconductive substrate transmitting an electromagnetic wave and an electroconductive optical probe arranged proximate to the recording medium, and applying a voltage between the substrate and the optical probe. The recorded information is read by irradiating an electromagnetic wave, preferably with a plurality of wavelengths, on the recording layer from the substrate side, and detecting with the optical probe an electromagnetic wave oozed out on the surface of the recording layer.
摘要翻译：通过在传输电磁波的导电基片上提供具有记录层的记录介质和布置在记录介质附近的导电光学探针，并在基片和光学探针之间施加电压来记录信息。通过从基板侧在记录层上照射优选具有多个波长的电磁波来读取所记录的信息，并用光学探针检测在记录层的表面上渗出的电磁波。

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