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    • 83. 发明公开
    • RESISTIVE MEMS HUMIDITY SENSOR
    • 电阻式微机电传感器
    • EP2984474A1
    • 2016-02-17
    • EP13821548.8
    • 2013-12-17
    • Robert Bosch GmbHFeyh, AndoGraham, AndrewSamarao, AshwinYama, GaryO'Brien, Gary
    • FEYH, AndoGRAHAM, AndrewSAMARAO, AshwinYAMA, GaryO'BRIEN, Gary
    • G01N27/12
    • G01N27/121
    • A semiconductor device includes a substrate, an insulating film provided on a surface of the substrate, and a sensing film formed of a conductive material deposited on top of the insulating film. The sensing film defines at least one conductive path between a first position and a second position on the insulating film. A first circuit connection is electrically connected to the sensing film at the first position on the insulating layer, and a second circuit connection is electrically connected to the sensing film at the second position. A control circuit is operatively connected to the first circuit connection and the second circuit connection for measuring an electrical resistance of the sensing film. The sensing film has a thickness that enables a resistivity of the sensing film to be altered predictably in a manner that is dependent on ambient moisture content.
    • 半导体器件包括衬底,设置在衬底的表面上的绝缘膜和由沉积在绝缘膜的顶部上的导电材料形成的感测膜。 感测膜限定绝缘膜上的第一位置和第二位置之间的至少一个导电路径。 第一电路连接在绝缘层上的第一位置电连接到感测膜,并且第二电路连接在第二位置电连接到感测膜。 控制电路可操作地连接到第一电路连接和用于测量感测膜的电阻的第二电路连接。 感测膜具有能够以取决于环境水分含量的方式预测地改变感测膜的电阻率的厚度。
    • 89. 发明申请
    • SEMICONDUCTOR SENSOR HAVING A SUSPENDED STRUCTURE AND ITS MANUFACTURING METHOD
    • 具有悬挂结构的半导体传感器及其制造方法
    • WO2015082467A1
    • 2015-06-11
    • PCT/EP2014/076249
    • 2014-12-02
    • ROBERT BOSCH GMBH
    • SAMARAO, AshwinFEYH, AndoOBRIEN, GaryYAMA, GaryPURKL, Fabian
    • G01N27/12
    • G01N27/028G01N27/12G01N33/0062
    • A semiconductor gas sensor device includes a substrate, a conductive layer supported by the substrate, a non-suitable seed layer, and a porous gas sensing layer portion. The non-suitable seed layer is formed from a first material and includes a first support portion supported by the conductive layer, a second support portion supported by the conductive layer, and a suspended seed portion extending from the first support portion to the second support portion and suspended above the conductive layer. The porous gas sensing layer portion is formed from a second material and is supported directly by the non-suitable seed layer in electrical communication with the conductive layer. The first material and the second material form a non- suitable pair of materials.
    • 半导体气体传感器装置包括衬底,由衬底支撑的导电层,非合适的种子层和多孔气体感测层部分。 非合适的种子层由第一材料形成,并且包括由导电层支撑的第一支撑部分,由导电层支撑的第二支撑部分和从第一支撑部分延伸到第二支撑部分的悬挂种子部分 并悬浮在导电层上方。 所述多孔气体感测层部分由第二材料形成,并且由与所述导电层电连通的所述非合适种子层直接支撑。 第一材料和第二材料形成非合适的材料对。