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    • 81. 发明申请
    • Photomask, method of lithography, and method for manufacturing the photomask
    • 光掩模,光刻方法和制造光掩模的方法
    • US20090098473A1
    • 2009-04-16
    • US12314404
    • 2008-12-10
    • Takashi SatoTakashi Sakamoto
    • Takashi SatoTakashi Sakamoto
    • G03F7/20
    • G03F7/70641B64D47/08G03F1/32
    • A photomask has a monitoring pattern configured to obtain information required for adjusting optical system of a projection lithography tool. The monitoring pattern encompasses a mask substrate and an asymmetrical diffraction grating delineated on the mask substrate, configured to generate a positive first order diffracted light and a negative first order diffracted light in different diffraction efficiencies. The asymmetrical diffraction grating includes a plurality of probing-phase shifters, disposed periodically on the mask substrate in parallel, and a plurality of opaque strips disposed on light-shielding faces of the probing-phase shifters. An asymmetrically recessed ridge implements each of the probing-phase shifters.
    • 光掩模具有被配置为获得调整投影光刻工具的光学系统所需的信息的监视图案。 监测图案包括掩模基板和掩模基板上描绘的非对称衍射光栅,被配置为产生不同衍射效率的正一级衍射光和负一级衍射光。 不对称衍射光栅包括平行地周期性地设置在掩模基板上的多个探测移相器,以及设置在探测移相器的光屏蔽面上的多个不透明条。 不对称凹入的脊部实现每个探测移相器。
    • 86. 发明授权
    • Brake control apparatus for vehicle
    • 车辆制动控制装置
    • US07445298B2
    • 2008-11-04
    • US11698917
    • 2007-01-29
    • Hiroaki NiinoTakashi Sato
    • Hiroaki NiinoTakashi Sato
    • B60T13/18
    • B60T8/405B60T8/4059B60T8/4081
    • A brake control apparatus for a vehicle includes: controlling means having timing means for timing an elapsed time from a brake operation starting time, and extended period of time calculating means obtaining an extended period of time based upon a target wheel cylinder pressure corresponding to an operation amount detected by an operation amount detecting sensor when the timing means times a predetermined period of time at which an amount of brake fluid discharged by each pump reaches a threshold value of brake fluid amount to generate an actual wheel cylinder pressure. During the extended period of time, the value of electric current to be supplied to each first and second motor is maintained at the maximum value.
    • 一种用于车辆的制动控制装置,包括:控制装置,具有用于对从制动操作开始时间起经过的时间进行定时的定时装置,以及延长时间计算装置,基于与操作对应的目标轮缸压力获得延长的时间段 当定时装置乘以由每个泵排出的制动液量达到制动液量的阈值的预定时间段时,由操作量检测传感器检测到的量以产生实际的轮缸压力。 在延长的时间段内,向第一和第二电动机供给的电流值保持在最大值。