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    • 88. 发明授权
    • Charged beam apparatus and method that provide charged beam aerial dimensional map
    • 带电波束装置和方法,提供带电波束空间立体图
    • US07485859B2
    • 2009-02-03
    • US11736191
    • 2007-04-17
    • Lin ZhouEric Peter Solecky
    • Lin ZhouEric Peter Solecky
    • G01R27/00F41G1/30
    • G01N23/225
    • A charged beam apparatus, such as an electron microscopy apparatus, and a method for determining an aerial dimensional map of a charged beam within the charged beam apparatus, each use a test structure that includes a feature located upon a substrate. One of the feature and the substrate is conductive and the other of the feature and the structure is non conductive. The charged beam within the charged beam apparatus is scanned in a plurality of non-parallel linear directions with respect to the substrate and the feature to provide a corresponding plurality of current versus position response curves from which may be determined the aerial dimensional map of the charged beam within the charged beam apparatus.
    • 带电波束装置,例如电子显微镜装置,以及用于确定带电波束装置内的带电波束的空间维度图的方法,每个使用包括位于基底上的特征的测试结构。 特征和衬底之一是导电的,另一个特征和结构是不导电的。 带电波束装置内的带电波束相对于基底以多个非平行线性方向被扫描,并且该特征以提供对应的多个电流对位置响应曲线,从该电流对位置响应曲线可以确定带电波束的空间维度图 在带电束装置内的光束。