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81. 发明申请

US20090155931A1 FERROELECTRIC LAYER WITH DOMAINS STABILIZED BY STRAIN 有权
标题翻译：具有由应变稳定的域的电介质层
公开(公告)号：US20090155931A1
公开(公告)日：2009-06-18
申请号：US11958826
申请日：2007-12-18
申请人： Qing Ma , Li-Peng Wang , Valluri Rao
发明人： Qing Ma , Li-Peng Wang , Valluri Rao
IPC分类号： H01L21/00
CPC分类号： G11B9/02 , C30B23/02 , C30B25/02 , C30B29/32 , H01L21/28291
摘要： The present invention describes a method including: providing a substrate; forming an underlying layer over the substrate; heating the substrate; forming a ferroelectric layer over the underlying layer, the ferroelectric layer having a thickness below a critical thickness, the underlying layer having a smaller lattice constant than the ferroelectric layer; cooling the substrate to room temperature; and inducing a compressive strain in the ferroelectric layer.
摘要翻译：本发明描述了一种方法，包括：提供衬底; 在衬底上形成下层; 加热基板; 在所述下层上形成铁电层，所述铁电层的厚度低于临界厚度，所述下层具有比所述铁电层更小的晶格常数; 将基板冷却至室温; 并在铁电层中产生压应变。

82. 发明授权

US07364851B2 Nucleic acid sequencing by Raman monitoring of uptake of precursors during molecular replication 有权
公开(公告)号：US07364851B2
公开(公告)日：2008-04-29
申请号：US10886400
申请日：2004-07-07
申请人： Andrew Berlin , Steven J. Kirch , Gabi Neubauer , Valluri Rao , Mineo Yamakawa
发明人： Andrew Berlin , Steven J. Kirch , Gabi Neubauer , Valluri Rao , Mineo Yamakawa
IPC分类号： C12Q1/68 , C12P19/34 , C12M1/34 , C12M3/00
CPC分类号： G01N21/6428 , B01L3/5027 , C12Q1/6869 , G01J3/4406 , G01N21/65 , G01N21/658 , G01N2021/6441 , G01N2021/651 , G01N2021/653 , G01N2021/655 , G01N2021/656 , C12Q2565/632 , C12Q2565/101 , C12Q2533/101 , C12Q2565/629 , C12Q2565/60
摘要： The methods, compositions and apparatus disclosed herein are of use for nucleic acid sequence determination. The methods involve isolation of one or more nucleic acid template molecules and polymerization of a nascent complementary strand of nucleic acid, using a DNA or RNA polymerase or similar synthetic reagent. As the nascent strand is extended one nucleotide at a time, the disappearance of nucleotide precursors from solution is monitored by Raman spectroscopy or FRET. The nucleic acid sequence of the nascent strand, and the complementary sequence of the template strand, may be determined by tracking the order of incorporation of nucleotide precursors during the polymerization reaction. Certain embodiments concern apparatus comprising a reaction chamber and detection unit, of use in practicing the claimed methods. The methods, compositions and apparatus are of use in sequencing very long nucleic acid templates in a single sequencing reaction.

83. 发明授权

US07291561B2 MEMS device integrated chip package, and method of making same 有权
标题翻译： MEMS器件集成芯片封装及其制造方法
公开(公告)号：US07291561B2
公开(公告)日：2007-11-06
申请号：US10623965
申请日：2003-07-21
申请人： Qing Ma , Peng Cheng , Valluri Rao
发明人： Qing Ma , Peng Cheng , Valluri Rao
IPC分类号： H01L21/461 , H01L21/311 , H01L29/00 , H01L27/108
CPC分类号： B81C1/00333 , H01G5/16 , H01G5/40 , H01L2224/48091 , Y10T428/24248 , H01L2924/00014
摘要： The present invention relates to a chip package that includes a semiconductor device and at least one micro electromechanical structure (MEMS) such that the semiconductor device and the MEMS form an integrated package. One embodiment of the present invention includes a semiconductor device, a first MEMS device disposed in a conveyance such as a film, and a second MEMS device disposed upon the semiconductor device through a via in the conveyance.The present invention also relates to a process of forming a chip package that includes providing a conveyance such as a tape automated bonding (TAB) structure, that may hold at least one MEMS device. The method is further carried out by disposing the conveyance over the active surface of the device in a manner that causes the at least one MEMS to communicate electrically to the active surface. Where appropriate, a sealing structure such as a solder ring may be used to protect the MEMS.
摘要翻译：本发明涉及包括半导体器件和至少一个微机电结构（MEMS）的芯片封装，使得半导体器件和MEMS形成集成封装。本发明的一个实施例包括半导体器件，设置在诸如膜的输送器中的第一MEMS器件，以及通过输送中的通孔设置在半导体器件上的第二MEMS器件。本发明还涉及一种形成芯片封装的方法，其包括提供诸如胶带自动键合（TAB）结构的输送，其可以保持至少一个MEMS器件。该方法进一步通过以使得至少一个MEMS与活性表面电连通的方式布置在器件的有效表面上的输送来进行。在适当的情况下，可以使用诸如焊环的密封结构来保护MEMS。

84. 发明申请

US20070224629A1 LASER EXPOSURE OF PHOTOSENSITIVE MASKS FOR DNA MICROARRAY FABRICATION 审中-公开
标题翻译：激光曝光用于DNA微量制备的光敏掩模
公开(公告)号：US20070224629A1
公开(公告)日：2007-09-27
申请号：US11757225
申请日：2007-06-01
申请人： Valluri Rao , Mineo Yamakawa , Andrew Berlin
发明人： Valluri Rao , Mineo Yamakawa , Andrew Berlin
IPC分类号： C12Q1/68 , C23C26/00
CPC分类号： B82Y30/00 , B01J19/0046 , B01J2219/00441 , B01J2219/00527 , B01J2219/00608 , B01J2219/0061 , B01J2219/00612 , B01J2219/00621 , B01J2219/00689 , B01J2219/00711 , B01J2219/00722
摘要： A method and apparatus for forming a polymer array on a substrate suitable for synthesizing polymer sequences. This includes forming an array, each location of the array having at least one strand end, forming photosensitive protection on the strand ends, and selectively scanning and modulating at least one energy beam to expose a pattern on the photosensitive protection. In some embodiments, the method further includes removing a protective group from selected strand ends based on the exposed pattern. The method then includes adding a predetermined one or more polymeric subunits to the deprotected strand ends. In some embodiments the photosensitive protection includes a layer of photoresist to cover the strand ends. Some embodiments use an ultra-violet laser.
摘要翻译：一种在适于合成聚合物序列的基材上形成聚合物阵列的方法和装置。这包括形成阵列，阵列的每个位置具有至少一个绞合端，在绞合端上形成感光保护，并且选择性地扫描和调制至少一个能量束以暴露感光保护上的图案。在一些实施方案中，该方法还包括基于暴露图案从选定的链末端去除保护基团。该方法然后包括将预定的一个或多个聚合物亚单位加入去保护的末端。在一些实施例中，感光保护包括一层光致抗蚀剂以覆盖绞合端。一些实施例使用紫外激光。

85. 发明授权

US07168484B2 Thermal interface apparatus, systems, and methods 有权
标题翻译：热接口设备，系统和方法
公开(公告)号：US07168484B2
公开(公告)日：2007-01-30
申请号：US10612711
申请日：2003-06-30
申请人： Yuegang Zhang , C. Michael Garner , Andrew A. Berlin , Valluri Rao , Bryan M. White , Paul A. Koning
发明人： Yuegang Zhang , C. Michael Garner , Andrew A. Berlin , Valluri Rao , Bryan M. White , Paul A. Koning
IPC分类号： F28F7/00 , H05K7/20
CPC分类号： F28F3/02 , B82Y10/00 , H01L23/373 , H01L23/433 , H01L24/28 , H01L24/31 , H01L2224/16225 , H01L2224/73253 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01019 , H01L2924/01024 , H01L2924/01027 , H01L2924/01029 , H01L2924/01042 , H01L2924/01047 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/10253 , H01L2924/14 , H01L2924/1433 , H01L2924/00 , H01L2224/0401
摘要： An apparatus and system, may include a thermal interface material comprised of an array of carbon nanotubes and a buffer layer disposed between the thermal interface material and one of a die or a heat spreader. In some embodiments the carbon nanotubes may be formed above a buffer layer formed above a surface of the heat spreader.
摘要翻译：装置和系统可以包括由界面材料和模具或散热器之一组成的热介质材料，其由碳纳米管阵列和缓冲层构成。在一些实施方案中，碳纳米管可以形成在形成在散热器表面上方的缓冲层之上。

86. 发明申请

US20060219016A1 Silicon micromachined ultra-sensitive vibration spectrum sensor array (VSSA) 失效
公开(公告)号：US20060219016A1
公开(公告)日：2006-10-05
申请号：US11097059
申请日：2005-03-31
申请人： Li-Peng Wang , Qing Ma , Valluri Rao , Goutam Paul
发明人： Li-Peng Wang , Qing Ma , Valluri Rao , Goutam Paul
IPC分类号： G01P15/02
CPC分类号： G01H1/00
摘要： An apparatus comprising a substrate and an array of vibration sensors formed on the substrate, the array comprising two or more vibration sensors, wherein each vibration sensor in the array has a different noise floor and a different operational frequency range than any of the other vibration sensors in the array. A process comprising forming an array of vibration sensors on a substrate, the array comprising two or more vibration sensors, wherein each of the two or more vibration sensors in the array has a different noise floor and a different operational frequency range than any of the other vibration sensors in the array. Other embodiments are disclosed and claimed.

87. 发明申请

US20060133953A1 Biosensor utilizing a resonator having a functionalized surface 有权
公开(公告)号：US20060133953A1
公开(公告)日：2006-06-22
申请号：US11317518
申请日：2005-12-22
申请人： Yuegang Zhang , Andrew Berlin , Qing Ma , Li-Peng Wang , Valluri Rao , Mineo Yamakawa
发明人： Yuegang Zhang , Andrew Berlin , Qing Ma , Li-Peng Wang , Valluri Rao , Mineo Yamakawa
IPC分类号： G01N33/48
CPC分类号： G01N33/54373 , B82Y15/00 , B82Y30/00 , G01N27/126 , G01N29/022 , G01N29/036 , G01N29/2437 , G01N29/348 , G01N33/0031 , G01N2291/02466 , G01N2291/0255 , G01N2291/0256 , G01N2291/0426 , Y10T436/11 , Y10T436/143333 , Y10T436/144444 , Y10T436/25375
摘要： Systems and methods for detecting the presence of biomolecules in a sample using biosensors that incorporate resonators which have functionalized surfaces for reacting with target biomolecules. In one embodiment, a device includes a piezoelectric resonator having a functionalized surface configured to react with target molecules, thereby changing the mass and/or charge of the resonator which consequently changes the frequency response of the resonator. The resonator's frequency response after exposure to a sample is compared to a reference, such as the frequency response before exposure to the sample, a stored baseline frequency response or a control resonator's frequency response.

88. 发明申请

US20060063192A1 Nucleic acid sequencing by Raman monitoring of molecular deconstruction 审中-公开
标题翻译：通过拉曼监测分子解构的核酸测序
公开(公告)号：US20060063192A1
公开(公告)日：2006-03-23
申请号：US11255386
申请日：2005-10-20
申请人： Mineo Yamakawa , Andrew Berlin , Steven Kirch , Gabi Neubauer , Valluri Rao
发明人： Mineo Yamakawa , Andrew Berlin , Steven Kirch , Gabi Neubauer , Valluri Rao
IPC分类号： C12Q1/68 , C12M1/34 , G06F19/00
CPC分类号： B01L3/5027 , B01L3/502761 , B01L2200/0668 , B01L2400/0454 , C12Q1/6818 , C12Q1/6825 , C12Q1/6869 , C12Q2565/632 , C12Q2521/319
摘要： The disclosed methods, apparatus and compositions are of use for nucleic acid sequencing. More particularly, the methods and apparatus concern sequencing single molecules of single stranded DNA or RNA by exposing the molecule to exonuclease activity, removing free nucleotides one at a time from one end of the nucleic acid, and identifying the released nucleotides by Raman spectroscopy or FRET.
摘要翻译：公开的方法，装置和组合物可用于核酸测序。更具体地说，方法和装置涉及通过将分子暴露于核酸外切酶活性来测序单链DNA或RNA的单分子，从核酸的一端一次一个地去除游离核苷酸，并通过拉曼光谱法或FRET鉴定释放的核苷酸。

89. 发明授权

US07002436B2 Vacuum-cavity MEMS resonator 有权
公开(公告)号：US07002436B2
公开(公告)日：2006-02-21
申请号：US10921383
申请日：2004-08-19
申请人： Qing Ma , Peng Cheng , Valluri Rao
发明人： Qing Ma , Peng Cheng , Valluri Rao
IPC分类号： H03H9/10 , H03H9/24 , H03H9/46
CPC分类号： B81B7/0077 , H03H3/0072 , H03H9/1057 , H03H9/2405 , H03H9/2431 , H03H9/2457 , H03H9/2463 , H03H2009/02503 , H03H2009/02511
摘要： A microelectromechanical (MEMS) resonator with a vacuum-cavity is fabricated using polysilicon-enabled release methods. A vacuum-cavity surrounding the MEMS beam is formed by removing release material that surrounds the beam and sealing the resulting cavity under vacuum by depositing a layer of nitride over the structure. The vacuum-cavity MEMS resonators have cantilever beams, bridge beams or breathing-bar beams.

90. 发明申请

US20050218509A1 Semiconductor substrate with interconnections and embedded circuit elements 有权
标题翻译：具有互连和嵌入式电路元件的半导体衬底
公开(公告)号：US20050218509A1
公开(公告)日：2005-10-06
申请号：US10816264
申请日：2004-03-31
申请人： Issy Kipnis , Valluri Rao
发明人： Issy Kipnis , Valluri Rao
IPC分类号： H01L21/48 , H01L23/48 , H01L25/16
CPC分类号： B81C1/0023 , H01L25/16 , H01L2224/16 , H01L2924/09701 , H01L2924/15311 , H01L2924/16152 , H01L2924/19107 , H01L2924/3011
摘要： A semiconductor substrate integrated with interconnections and circuit components. A silicon backplane is processed with silicon processing to provide electrical connectivity for circuit elements. In one embodiment functional circuit elements, e.g., MEMS, switches, filters, are integrated on the silicon backplane. In one embodiment the function circuit elements are monolithically processed into the silicon backplane. In one embodiment the silicon backplane includes interconnections for integrated circuits on different substrates to be bonded to the silicon backplane.
摘要翻译：与互连和电路组件集成的半导体衬底。用硅处理处理硅背板，为电路元件提供电连接。在一个实施例中，诸如MEMS，开关，滤波器的功能电路元件集成在硅背板上。在一个实施例中，功能电路元件被单片处理成硅背板。在一个实施例中，硅背板包括用于不同衬底上的用于结合到硅背板的集成电路的互连。

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