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    • 90. 发明申请
    • Method for manufacturing a magneto-resistance effect element, and magneto-resistance effect element
    • 磁阻效应元件的制造方法以及磁阻效应元件
    • US20080102315A1
    • 2008-05-01
    • US11822545
    • 2007-07-06
    • Hideaki FukuzawaHiromi YuasaYoshihiko Fuji
    • Hideaki FukuzawaHiromi YuasaYoshihiko Fuji
    • G11B5/39B05D5/12H05H1/00
    • G11B5/3983B82Y25/00B82Y40/00G01R33/093G11B5/3906G11B5/398H01F10/3259H01F10/3272H01F41/305H01L43/08H01L43/12Y10T428/1121
    • In a method for manufacturing a magneto-resistance effect element having a pinned magnetic layer of which a magnetization is fixed substantially in one direction, a free magnetization layer of which a magnetization is rotated in accordance with an external magnetic field and a spacer layer, which is located between the fixed magnetization layer and the free magnetization layer, with an insulating layer and a metallic layer penetrating through the insulating layer, the spacer layer is formed by forming a first metallic layer; forming, on the first metallic layer, a second metallic layer to be converted into a portion of the insulating layer; performing a first conversion treatment so as to convert the second metallic layer into the portion of said insulating layer and to form a portion of the metallic layer penetrating through the insulating layer; forming, on the insulating layer and the metallic layer formed through the first conversion treatment, a third metallic layer to be converted into the other portion of the insulating layer; and performing a second conversion treatment so as to convert the third metallic layer into the other portion of the insulating and to form the other portion of the metallic layer penetrating through the insulating layer.
    • 在制造磁阻效应元件的方法中,该磁阻效应元件的磁化强度基本上沿一个方向固定,其中磁化按照外部磁场旋转的自由磁化层和间隔层, 位于固定磁化层和自由磁化层之间,绝缘层和穿过绝缘层的金属层位于隔离层之间,形成第一金属层; 在第一金属层上形成第二金属层,以转化成绝缘层的一部分; 进行第一转换处理,以将第二金属层转换成绝缘层的部分,并形成贯穿绝缘层的金属层的一部分; 在绝缘层和通过第一转换处理形成的金属层上形成将被转换成绝缘层的另一部分的第三金属层; 并进行第二转换处理,以将第三金属层转换成绝缘体的另一部分,并形成贯穿绝缘层的金属层的另一部分。