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81. 发明授权

US07153088B2 Method and apparatus for transferring a semiconductor substrate 有权
公开(公告)号：US07153088B2
公开(公告)日：2006-12-26
申请号：US10855033
申请日：2004-05-27
申请人： Peter Reimer , Jayesh Patel
发明人： Peter Reimer , Jayesh Patel
IPC分类号： B65G49/07
CPC分类号： H01L21/681 , H01L21/68707 , Y10S414/136 , Y10S414/141
摘要： A method and apparatus for transferring a substrate is provided. In one embodiment, an apparatus for transferring a substrate includes at least one end effector. A disk is rotatably coupled to the end effector. The disk is adapted to rotate the substrate relative to the end effector. The end effector may additionally include a sensor coupled thereto. The sensor is adapted to detect an indicia of orientation of the substrate supported by the end effector. In another embodiment, a method for transferring a substrate includes rotating the substrate disposed on an end effector and detecting an indicia of orientation of the substrate.

82. 发明授权

US07077159B1 Processing apparatus having integrated pumping system 失效
标题翻译：具有集成泵送系统的处理装置
公开(公告)号：US07077159B1
公开(公告)日：2006-07-18
申请号：US09220153
申请日：1998-12-23
申请人： Peter Reimer , Pedram Sabouri , Dennis R. Smith
发明人： Peter Reimer , Pedram Sabouri , Dennis R. Smith
IPC分类号： C23C16/00
CPC分类号： H01L21/6719 , F04D17/168 , F04D19/04 , F04D27/0261 , F04D29/4213 , F04D29/601 , H01L21/67017 , H01L21/67167 , H01L21/67184 , H01L21/67196 , Y10T137/86035 , Y10T137/86083 , Y10T137/86139 , Y10T137/86163
摘要： An apparatus 115 for processing a substrate 20, comprises an integrated pumping system 155 having a high operating efficiency, small size, and low vibrational and noise levels. The apparatus 115 comprises a chamber, such as a load-lock chamber 110, transfer chamber 115, or process chamber 120. An integrated and local pump 165 is abutting or adjacent to one of the chambers 110, 115, 120 for evacuating gas from the chambers. The pump has an inlet 170 connected to a chamber 110, 115, 120, and an outlet 175 that exhausts the gas to atmospheric pressure. Preferably, the pump 165 comprises a pre-vacuum pump or a low vacuum pump.
摘要翻译：用于处理衬底20的设备115包括具有高操作效率，小尺寸和低振动和噪声水平的集成泵送系统155。设备115包括诸如加载锁定室110，传送室115或处理室120的室。集成的和局部泵165邻接或邻近室110,115,120中的一个，用于将气体从房间。泵具有连接到室110,115,120的入口170和将气体排出到大气压的出口175。优选地，泵165包括预真空泵或低真空泵。

83. 发明申请

US20050034767A1 Processing apparatus having integrated pumping system 失效
标题翻译：具有集成泵送系统的处理装置
公开(公告)号：US20050034767A1
公开(公告)日：2005-02-17
申请号：US10945727
申请日：2004-09-21
申请人： Peter Reimer , Pedram Sabouri , Dennis Smith
发明人： Peter Reimer , Pedram Sabouri , Dennis Smith
IPC分类号： F17C13/00 , B01J3/02 , F04B37/16 , F04C25/02 , F04C28/08 , H01L21/00 , H01L21/02 , H01L21/205 , H01L21/302 , H01L21/3065 , C23C16/00 , F04F3/00
CPC分类号： H01L21/6719 , F04D17/168 , F04D19/04 , F04D27/0261 , F04D29/4213 , F04D29/601 , H01L21/67017 , H01L21/67167 , H01L21/67184 , H01L21/67196 , Y10T137/86035 , Y10T137/86083 , Y10T137/86139 , Y10T137/86163
摘要： An apparatus 115 for processing a substrate 20, comprises an integrated pumping system 155 having a high operating efficiency, small size, and low vibrational and noise levels. The apparatus 115 comprises a chamber, such as a load-lock chamber 110, transfer chamber 115, or process chamber 120. An integrated pump 165 is abutting or adjacent to one of the chambers 110, 115, 120 for evacuating gas from the chambers. In operation, the pump is located within the actual envelope or footprint of the apparatus and has an inlet 170 connected to a chamber 110, 115, 120, and an outlet 175 that exhausts the gas to atmospheric pressure. Preferably, the integrated pump 165 comprises a pre-vacuum pump or a low vacuum pump and is housed in a noise reducing enclosure having means for moving the pump between locations and means for stacking pumps vertically in use.
摘要翻译：用于处理衬底20的设备115包括具有高操作效率，小尺寸和低振动和噪声水平的集成泵送系统155。设备115包括诸如加载锁定室110，传送室115或处理室120的室。集成泵165邻接或邻近其中一个室110,115,120，用于从室抽空气体。在操作中，泵位于设备的实际封壳或占地面积内，并且具有连接到室110,115,120的入口170和将气体排出到大气压的出口175。优选地，集成泵165包括预真空泵或低真空泵，并且容纳在具有用于在位置之间移动泵的装置的降噪外壳和用于在使用中垂直堆叠的装置的装置。

84. 发明授权

US06752585B2 Method and apparatus for transferring a semiconductor substrate 失效
标题翻译：用于转移半导体衬底的方法和装置
公开(公告)号：US06752585B2
公开(公告)日：2004-06-22
申请号：US09882394
申请日：2001-06-13
申请人： Peter Reimer , Jayesh Patel
发明人： Peter Reimer , Jayesh Patel
IPC分类号： B65G4907
CPC分类号： H01L21/681 , H01L21/68707 , Y10S414/136 , Y10S414/141
摘要： A method and apparatus for transferring a substrate is provided. In one embodiment, an apparatus for transferring a substrate includes at least one end effector. A disk is rotatably coupled to the end effector. The disk is adapted to rotate the substrate relative to the end effector. The end effector may additionally include a sensor coupled thereto. The sensor is adapted to detect an indicia of orientation of the substrate supported by the end effector. In another embodiment, a method for transferring a substrate includes rotating the substrate disposed on an end effector and detecting an indicia of orientation of the substrate.
摘要翻译：提供了一种用于转移衬底的方法和装置。在一个实施例中，用于传送衬底的装置包括至少一个端部执行器。盘可旋转地联接到末端执行器。盘适于相对于末端执行器旋转衬底。末端执行器可以另外包括耦合到其上的传感器。传感器适于检测由末端执行器支撑的基板的取向的标记。在另一个实施例中，用于转移衬底的方法包括旋转设置在端部执行器上的衬底并且检测衬底的取向的标记。

85. 发明授权

US06589023B2 Device and method for reducing vacuum pump energy consumption 失效
标题翻译：降低真空泵能耗的装置和方法
公开(公告)号：US06589023B2
公开(公告)日：2003-07-08
申请号：US09975129
申请日：2001-10-09
申请人： Douglas Royce , Pedram Sabouri , Peter Reimer
发明人： Douglas Royce , Pedram Sabouri , Peter Reimer
IPC分类号： F04B2500
CPC分类号： F04C28/02 , F04B37/14 , F04B41/06 , F04C25/02
摘要： Generally, a vacuum pumping system having efficient power usage is provided. In one embodiment, the vacuum pumping system includes a first pump, a check valve and a second pump. The check valve and second pump are coupled in parallel to an exhaust line of the first pump. The first pump and second pump have a ratio of internal volume that is about 20 to about 130. In another embodiment, the vacuum pumping system includes a first pump, a check valve and a second pump. The check valve and second pump are coupled in parallel to an exhaust line of the first pump. The first pump and second pump have a ratio of power consumption that is about 5 to about 20. In yet another embodiment, the first pump and second pump have a ratio of pumping capacity that is about 50 to about 200.
摘要翻译：通常，提供了具有高效能量使用的真空泵系统。在一个实施例中，真空泵系统包括第一泵，止回阀和第二泵。止回阀和第二泵与第一泵的排气管并联。第一泵和第二泵具有约20至约130的内部体积比。在另一个实施例中，真空泵系统包括第一泵，止回阀和第二泵。止回阀和第二泵与第一泵的排气管并联。第一泵和第二泵具有大约5至大约20的功率消耗比。在另一个实施例中，第一泵和第二泵具有大约50至大约200的泵送能力的比率。

86. 发明授权

US5608748A Cooling device for a pulsed laser and process for the operation of such a cooling device 失效
标题翻译：用于脉冲激光的冷却装置和用于这种冷却装置的操作的过程
公开(公告)号：US5608748A
公开(公告)日：1997-03-04
申请号：US547077
申请日：1995-10-18
申请人： Peter Reimer , Heinz Abramowsky , Roland Brenner
发明人： Peter Reimer , Heinz Abramowsky , Roland Brenner
IPC分类号： H01S3/04 , H01S3/042
CPC分类号： H01S3/042 , H01S3/0407
摘要： A cooling device for a pulsed laser includes a cooling circuit with a cooling medium whose volume is increased in the pulsed excitation process. At least one inlet valve and at least one outlet valve are provided in the cooling circuit, and are dimensioned in dependence on the operating parameters of the laser such that at least a partial circulation of the cooling medium takes place in the cooling circuit due solely to the increase of the cooling medium volume in the excitation process, Separate pumps for the circulation of the cooling medium are dispensed with,
摘要翻译：用于脉冲激光的冷却装置包括具有在脉冲激励过程中其体积增加的冷却介质的冷却回路。至少一个入口阀和至少一个出口阀设置在冷却回路中，并且根据激光器的操作参数来确定尺寸，使得冷却回路的至少部分循环在冷却回路中发生，这仅仅是因为励磁过程中冷却介质体积的增加，冷却介质循环用的分离泵，

87. 发明授权

US5533998A Apparatus and method for laser cyclo-photocoagulation 失效
标题翻译：激光环光凝固的装置和方法
公开(公告)号：US5533998A
公开(公告)日：1996-07-09
申请号：US354404
申请日：1994-12-12
申请人： Manfred Freese , Peter Reimer , Theo Lasser
发明人： Manfred Freese , Peter Reimer , Theo Lasser
IPC分类号： A61F9/00 , A61F9/007 , A61F9/008 , A61N5/06
CPC分类号： A61F9/009 , A61F9/00781 , A61F9/008 , A61F9/00821 , A61F2009/0052 , A61F2009/00865 , A61F2009/00891
摘要： A laser cyclo-photocoagulation in the eye is monitored on-line by means of an ultrasonic biomicroscope, i.e., visual representations of the treated field, inclusive of the effects obtained in the tissue, are provided continuously on a display placed at the disposal of the attending doctor. The doctor decides, by means of the generated ultrasonic images, on the course of the further treatment. The choice is possible between different operating modes of the ultrasonic biomicroscope.
摘要翻译：通过超声波生物显微镜在线监测眼睛中的激光环光凝固，即，经处理的场的视觉表示，包括在组织中获得的效果，连续地提供在处置的显示器上主治医生。医生通过生成的超声波图像决定进一步处理的过程。在超声波生物显微镜的不同操作模式之间进行选择是可能的。

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