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81. 发明申请

US20070243657A1 Method and Apparatus to Form Thin Layers of Materials on a Base 失效
标题翻译：在基材上形成薄层材料的方法和装置
公开(公告)号：US20070243657A1
公开(公告)日：2007-10-18
申请号：US11735430
申请日：2007-04-13
申请人： Bulent Basol , Serkan Erdemli
发明人： Bulent Basol , Serkan Erdemli
IPC分类号： H01L21/00
CPC分类号： H01L21/67103 , C23C14/0623 , C23C14/541 , C23C14/562 , H01L31/0322 , H01L31/0749 , H01L31/1864 , Y02E10/541 , Y02P70/521
摘要： The present invention relates to method and apparatus for preparing thin films of materials for various applications including electronic devices such as solar cells. In one aspect, each of the method and apparatus passing an electrical current through at least one of the base or sheet to provide controlled localized heat to the base or sheet, or to layers disposed above the base or sheet. In another aspect, the controlled localized heat is provided in combination with a process environment that can be a non-inert gas that contains an element that will become part of a compound on the base or sheet, or an inert gas that allows for the process environment to provide annealing.
摘要翻译：本发明涉及用于制备各种应用的材料薄膜的方法和装置，包括诸如太阳能电池的电子器件。在一个方面，每个方法和装置使电流通过基底或片材中的至少一个，以向基底或片材提供受控的局部热量，或者设置在基底或片材上方的层。在另一方面，受控的局部热与可以是非惰性气体的工艺环境组合提供，该非惰性气体包含将成为基底或片材上的化合物的一部分的元素，或允许该方法的惰性气体环境提供退火。

82. 发明申请

US20070166964A1 Precursor Containing Copper Indium And Gallium For Selenide (Sulfide) Compound Formation 失效
标题翻译：含有硒化铟（硫化物）化合物形成的铜铟和镓的前体
公开(公告)号：US20070166964A1
公开(公告)日：2007-07-19
申请号：US11621101
申请日：2007-01-08
申请人： Bulent Basol
发明人： Bulent Basol
IPC分类号： H01L21/20
CPC分类号： H01L31/0322 , H01L21/02568 , H01L21/02614 , H01L21/02628 , Y02E10/541
摘要： The present invention relates to systems and methods for preparing metallic precursor thin films for the growth of semiconductor compounds to be used for radiation detector and solar cell fabrication. In one aspect, there is provided a method of efficiently using expensive materials necessary for the making of solar cells.
摘要翻译：本发明涉及用于制备用于辐射检测器和太阳能电池制造的半导体化合物的生长的金属前体薄膜的系统和方法。在一个方面，提供了一种有效地使用制造太阳能电池所需的昂贵材料的方法。

83. 发明申请

US20070111523A1 Process for conditioning conductive surfaces after electropolishing 审中-公开
标题翻译：电解抛光后导电表面的调理工艺
公开(公告)号：US20070111523A1
公开(公告)日：2007-05-17
申请号：US11283112
申请日：2005-11-17
申请人： Ismail Emesh , Bulent Basol
发明人： Ismail Emesh , Bulent Basol
IPC分类号： H01L21/44
CPC分类号： H01L21/32115 , H01L21/02074 , H01L21/32125 , H01L21/67028 , H01L21/67051
摘要： A method of conditioning an electropolished conductive layer of a substrate is disclosed, the conductive layer having impurities thereon. The conductive layer may be formed on a thin conductive film or barrier layer that coats one or more cavities formed on the substrate surface. The method comprises applying a first process solution onto the electropolished conductive layer to dissolve a portion thereof, and then applying a second process solution onto the conductive layer. The second process solution is preferably configured to charge and move the impurities away from the conductive layer. The substrate surface can then be rinsed to remove the first and second process solutions and the impurities.
摘要翻译：公开了一种调节基底的电抛光导电层的方法，该导电层上具有杂质。导电层可以形成在涂覆在衬底表面上形成的一个或多个空腔的薄导电膜或阻挡层上。该方法包括将第一工艺溶液施加到电抛光导电层上以溶解其一部分，然后将第二工艺溶液施加到导电层上。第二工艺溶液优选构造成使杂质从导电层充电并移动。然后可以将衬底表面漂洗以除去第一和第二工艺溶液和杂质。

84. 发明申请

US20070093059A1 Method And Apparatus For Thin Film Solar Cell Manufacturing 失效
标题翻译：薄膜太阳能电池制造方法与装置
公开(公告)号：US20070093059A1
公开(公告)日：2007-04-26
申请号：US11552503
申请日：2006-10-24
申请人： Bulent Basol
发明人： Bulent Basol
IPC分类号： H01L21/44 , H01L21/28 , H01L21/3205
CPC分类号： H01L31/0322 , C23C14/3414 , Y02E10/541
摘要： The present invention provides a method of making a Cu-In-Ga sputtering target by melting Cu, In and Ga, Cu and In or Cu and Ga to form a uniform melt with a pre-determined stoichiometry, which melt is sprayed to cause sprayed uniform melt particles to solidify into Cu-In-Ga particles with the pre-determined stoichiometry. The sputtering target is then made using the Cu-hi-Ga particles. In a further aspect of the invention, there is provided a method of producing a thin film absorber layer for solar cell fabrication by sputter depositing a precursor film with a first composition
摘要翻译：本发明提供一种通过熔化Cu，In和Ga，Cu和In或Cu和Ga来制备Cu-In-Ga溅射靶的方法，以形成具有预定化学计量的均匀熔体，该熔融物被喷雾以引起喷雾均匀的熔融颗粒以预定的化学计量固化成Cu-In-Ga颗粒。然后使用Cu-Ga-Ga颗粒制备溅射靶。在本发明的另一方面，提供了一种通过溅射沉积具有第一组成的前体膜来制造用于太阳能电池制造的薄膜吸收层的方法

85. 发明申请

US20060178012A1 Method of Forming Semiconductor Compound Film for Fabrication of Electronic Device and Film Produced By Same 失效
标题翻译：形成用于制造电子器件的半导体复合膜的方法和由其制造的膜
公开(公告)号：US20060178012A1
公开(公告)日：2006-08-10
申请号：US11278662
申请日：2006-04-04
申请人： Bulent Basol
发明人： Bulent Basol
IPC分类号： H01L21/31
CPC分类号： C23C8/02 , C23C10/02 , C23C10/06 , C23C12/00 , H01L31/0322 , H01L31/18 , Y02E10/541
摘要： A process of forming a compound film includes formulating a nano-powder material with a controlled overall composition and including particles of one solid solution The nano-powder material is deposited on a substrate to form a layer on the substrate, and the layer is reacted in at least one suitable atmosphere to form the compound film. The compound film may be used in fabrication of a radiation detector or solar cell.
摘要翻译：形成化合物膜的方法包括配制具有受控整体组成的纳米粉末材料并且包括一种固溶体的颗粒将纳米粉末材料沉积在基底上以在基底上形成层，并且该层在至少一种合适的气氛形成复合膜。复合膜可用于制造辐射检测器或太阳能电池。

86. 发明申请

US20050006244A1 Electrode assembly for electrochemical processing of workpiece 有权
标题翻译：工件电化学处理用电极组件
公开(公告)号：US20050006244A1
公开(公告)日：2005-01-13
申请号：US10723045
申请日：2003-11-26
申请人： Cyprian Uzoh , Bulent Basol
发明人： Cyprian Uzoh , Bulent Basol
IPC分类号： C25D5/08 , C25D7/12 , C25D17/14 , C25F7/00 , H01L21/288 , H01L21/321 , H01L21/3213 , H01L21/768 , C25D5/20 , C25D21/10
CPC分类号： H01L21/2885 , C25D5/08 , C25D7/12 , C25D17/001 , C25D17/14 , C25F7/00 , H01L21/32115 , H01L21/3212 , H01L21/32134 , H01L21/76877
摘要： The present invention provides a novel system, apparatus, and method to deposit conductive films on a workpiece. A system for electroplating a surface of a workpiece using a process solution is disclosed. The system comprises a solution housing configured to house an electrode and to contain the process solution, a filter element disposed in the solution housing configured to partition the solution housing into a lower chamber and an upper chamber, and an upper inlet port coupled to the solution housing configured to deliver the process solution to the upper chamber of the solution housing to fill the upper chamber and the lower chamber immersing the electrode in the lower chamber.
摘要翻译：本发明提供了一种在工件上沉积导电膜的新型系统，装置和方法。公开了一种使用工艺溶液对工件的表面进行电镀的系统。该系统包括配置成容纳电极并容纳处理溶液的溶液壳体，设置在溶液壳体中的过滤元件，构造成将溶液壳体分隔成下腔室和上腔室，以及连接到溶液的上入口端口壳体，被配置为将处理溶液输送到溶液壳体的上腔室以填充上室，下室将电极浸入下室中。

87. 发明授权

US06579800B2 Chemical mechanical polishing endpoint detection 失效
标题翻译：化学机械抛光终点检测
公开(公告)号：US06579800B2
公开(公告)日：2003-06-17
申请号：US09976469
申请日：2001-10-12
申请人： Bulent Basol , Homayoun Talleh
发明人： Bulent Basol , Homayoun Talleh
IPC分类号： H01L21302
CPC分类号： B24B37/013 , B24B49/12 , B24B57/02
摘要： The present invention provides apparatus and methods for detecting removal of a material in a chemical mechanical polishing process that uses a solution and operates upon a top layer made of a material that is disposed over another layer on a multi-layer workpiece. When the top layer from the workpiece is removed using chemical mechanical polishing with the solution, a flow of used solution results, with the flow of used solution containing therein the material removed from the top layer. While removing the top layer, a beam of light is transmitted on the flow of used solution to obtain an output beam of light that is altered due to absorption by the material, and a change in a characteristic of the output beam of light from the beam of light indicative of a change in an amount of the material within the flow of used solution is detected.
摘要翻译：本发明提供了用于检测在化学机械抛光工艺中去除材料的装置和方法，所述化学机械抛光工艺使用溶液并在由多层工件上的另一层上设置的材料制成的顶层上操作。当用溶液进行化学机械抛光来除去来自工件的顶层时，产生所用溶液的流动，其中使用的溶液流包含从顶层除去的材料。在去除顶层的同时，在使用的溶液流中传输光束，以获得由于材料的吸收而改变的输出光束，并且来自光束的输出光束的特性的变化检测到指示使用溶液流动中的材料量变化的光。

88. 发明申请

US20080102251A1 PLATING METHOD AND APPARATUS FOR CONTROLLING DEPOSITION ON PREDETERMINED PORTIONS OF A WORKPIECE 有权
标题翻译：用于控制工件预测部分沉积的沉积方法和装置
公开(公告)号：US20080102251A1
公开(公告)日：2008-05-01
申请号：US11932708
申请日：2007-10-31
申请人： Bulent Basol
发明人： Bulent Basol
IPC分类号： B32B3/00 , C25D5/34 , C25D5/48
CPC分类号： H01L21/76879 , C25D5/06 , C25D5/10 , C25D5/22 , C25D5/34 , C25D7/123 , C25D17/001 , H01L21/2885 , H01L21/7684 , H01L21/76877 , Y10T428/24562
摘要： The present invention relates to methods and apparatus for plating a conductive material on a workpiece surface in a highly desirable manner. Using a workpiece-surface-influencing device, such as a mask or sweeper, that preferentially contacts the top surface of the workpiece, relative movement between the workpiece and the workpiece-surface-influencing device is established so that an additive in the electrolyte solution disposed on the workpiece and which is adsorbed onto the top surface is removed or otherwise its amount or concentration changed with respect to the additive on the cavity surface of the workpiece. Plating of the conductive material can place prior to, during and after usage of the workpiece-surface-influencing device, particularly after the workpiece surface influencing device no longer contacts any portion of the top surface of the workpiece, to achieve desirable semiconductor structures.
摘要翻译：本发明涉及以非常理想的方式在工件表面上电镀导电材料的方法和装置。使用优先接触工件顶面的工件表面影响装置（例如掩模或清扫器），建立工件和工件表面影响装置之间的相对运动，使得电解质溶液中的添加剂被设置在工件上并被吸附到顶部表面上的材料被去除或者其它量或浓度相对于在工件的空腔表面上的添加剂改变。特别是在工件表面影响装置不再接触工件顶表面的任何部分之后，导电材料的电镀可以放置在工件表面影响装置的使用之前，期间和之后，以实现期望的半导体结构。

89. 发明申请

US20080095938A1 REEL-TO-REEL REACTION OF PRECURSOR FILM TO FORM SOLAR CELL ABSORBER 有权
标题翻译：前驱膜的旋转辊反应形成太阳能电池吸收器
公开(公告)号：US20080095938A1
公开(公告)日：2008-04-24
申请号：US11938679
申请日：2007-11-12
申请人： Bulent Basol
发明人： Bulent Basol
IPC分类号： C23C16/00
CPC分类号： C23C14/562 , C23C14/0623
摘要： A roll-to-roll rapid thermal processing (RTP) tool with multiple chambers for forming a solar cell absorber by reacting a precursor layer on a continuous flexible workpiece. The RTP tool includes an elongated housing having a heating chamber with a predetermined temperature profile, a supply chamber and a receiving chamber. The heating chamber includes a small process gap in which the precursor layer is reacted with a Group VIA material to form an absorber layer. The continuous flexible workpiece is unrolled and advanced from the supply chamber into the heating chamber, and the processed continuous flexible workpiece is taken up and rolled in the receiving chamber.
摘要翻译：一种具有多个腔室的卷对卷快速热处理（RTP）工具，用于通过使连续柔性工件上的前体层反应来形成太阳能电池吸收体。 RTP工具包括具有预定温度分布的加热室的细长壳体，供应室和接收室。加热室包括小的工艺间隙，其中前体层与VIA族材料反应以形成吸收层。连续的柔性工件从供应室展开并进入加热室，并且处理后的连续柔性工件被卷取并在接收室中滚动。

90. 发明申请

US20080000518A1 Technique for Manufacturing Photovoltaic Modules 审中-公开
标题翻译：制造光伏组件技术
公开(公告)号：US20080000518A1
公开(公告)日：2008-01-03
申请号：US11692806
申请日：2007-03-28
申请人： Bulent Basol
发明人： Bulent Basol
IPC分类号： H01L31/055 , H01L31/048
CPC分类号： H01L31/048 , Y02E10/52
摘要： The present invention, in one aspect, is directed to methods for manufacturing solar or photovoltaic modules for better environmental stability. In another aspect, the present invention is directed to environmentally stable solar or photovoltaic modules. These method and apparatus use a moisture barrier film to form a moisture-resistant surface on the circuit, preferably on an illuminating surface of solar cells, or an entire side of a circuit formed of a plurality of solar cells that includes the illuminating surface of solar cells. In certain embodiments, the moisture-resistant film is applied conformally, and in other embodiments the moisture-resistant film is substantially transparent.
摘要翻译：本发明在一个方面涉及制造用于更好的环境稳定性的太阳能或光伏组件的方法。在另一方面，本发明涉及环境稳定的太阳能或光伏组件。这些方法和装置使用防潮膜在电路上，优选地在太阳能电池的照明表面上，或由包括太阳能照射表面的多个太阳能电池形成的电路的整个侧面上形成防潮表面细胞。在某些实施方案中，保湿膜被保形地施加，并且在其它实施方案中，防潮膜基本上是透明的。

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