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    • 81. 发明授权
    • High performance probe system
    • 高性能探头系统
    • US07227371B2
    • 2007-06-05
    • US11273889
    • 2005-11-14
    • Charles A. Miller
    • Charles A. Miller
    • G01R31/02
    • G01R31/2889G01R1/07314G01R1/07378G01R31/31905Y10T29/49117
    • A probe system for providing signal paths between an integrated circuit (IC) tester and input/output, power and ground pads on the surfaces of ICs to be tested includes a probe board assembly, a flex cable and a set of probes arranged to contact the IC's I/O pads. The probe board assembly includes one or more rigid substrate layers with traces and vias formed on or within the substrate layers providing relatively low bandwidth signal paths linking the tester to probes accessing some of the IC's pads. The flex cable provides relatively high bandwidth signal paths linking the tester to probes accessing others of the IC's pads.
    • 用于在集成电路(IC)测试器和要测试的IC的表面上的输入/输出,电源和接地焊盘之间提供信号路径的探针系统包括探针板组件,柔性电缆和一组探针, IC的I / O焊盘。 探针板组件包括一个或多个刚性衬底层,其具有形成在衬底层上或衬底层内的迹线和通孔,其提供将测试器连接到访问IC的一些衬垫的探针的相对低带宽的信号路径。 柔性电缆提供相对高带宽的信号路径,将测试仪连接到访问IC其他焊盘的探针。
    • 85. 发明授权
    • System for calibrating timing of an integrated circuit wafer tester
    • 用于校准集成电路晶片测试仪的时序的系统
    • US06622103B1
    • 2003-09-16
    • US09598399
    • 2000-06-20
    • Charles A. Miller
    • Charles A. Miller
    • G01R3126
    • G01R31/318385G01R31/31905G01R31/3191
    • A timing calibration system for a wafer level integrated circuit (IC) tester is disclosed. The tester includes channels linked by paths through an interconnect system to pads of the IC. During a test each channel may send a test signal edge to an IC pad following a clock signal edge with a delay including “programmable drive” delay and “drive calibration” delay components, or may sample an IC output signal following the clock signal edge with a delay including “programmable compare” delay and adjustable “compare calibration” delay components. The interconnect system also links a spare channel to a point on the IC. To adjust the compare calibration delay of each channel, the interconnect system sequentially connects the tester channels to interconnect areas on a “calibration” wafer instead of to the IC on the wafer to be tested. Each interconnect area provides a path linking a channel to be calibrated to the spare channel. With the programmable drive delay of the channel being calibrated and the programmable compare and compare calibration delays of the spare channel set to standard values, the drive calibration delay of the channel being calibrated is adjusted so it sends a test signal edge to the spare channel close to when the spare channel samples it. Pairs of tester channels are then interconnected through another wafer interconnect area. Each channel then sends a test signal edge to the other tester channel with a standard delay following a clock signal edge to provide a reference for calibrating the receiving channel's compare calibration delay.
    • 公开了一种用于晶片级集成电​​路(IC)测试仪的定时校准系统。 测试仪包括通过互连系统通过IC焊盘连接的通道。 在测试期间,每个通道可以在具有包括“可编程驱动器”延迟和“驱动校准”延迟组件的延迟的时钟信号边沿之后向IC垫发送测试信号边沿,或者可以采用时钟信号边沿之后的IC输出信号 延迟包括“可编程比较”延迟和可调“比较校准”延迟组件。 互连系统还将备用通道连接到IC上的一个点。 为了调整每个通道的比较校准延迟,互连系统顺序地将测试仪通道连接到“校准”晶片上的互连区域,而不是连接到要测试的晶片上的IC。 每个互连区域提供将要校准的信道链接到备用信道的路径。 随着通道的可编程驱动延迟被校准,并且可编程比较和比较备用通道的校准延迟设置为标准值,校准的通道的驱动校准延迟被调整,以便将测试信号边沿发送到备用通道关闭 当备用通道采样时。 然后,一对测试仪通道通过另一个晶片互连区互连。 然后,每个通道在时钟信号边沿之后以标准延迟将测试信号边沿发送到另一个测试仪通道,以提供用于校准接收通道的比较校准延迟的参考。
    • 90. 发明授权
    • Efficient parallel testing of integrated circuit devices using a known good device to generate expected responses
    • 使用已知的良好设备对集成电路设备进行有效的并行测试以产生预期响应
    • US06452411B1
    • 2002-09-17
    • US09260460
    • 1999-03-01
    • Charles A. MillerRichard S. Roy
    • Charles A. MillerRichard S. Roy
    • G01R3126
    • G01R31/3193G01R31/31905
    • A system for testing integrated circuit devices is disclosed in which a tester communicates with a known good device through a channel. Tester-DUT interface circuitry is provided for monitoring the channel while the tester is writing data as part of a test sequence to locations in the known good device. In response, the interface circuitry writes the data to corresponding locations in each of a number of devices under test (DUTs). The interface circuitry monitors the channel while the tester is reading from the locations in the known good device (KGD), and in response performs a comparison between DUT data read from the corresponding locations in the DUTs and expected responses obtained form the KGD.
    • 公开了一种用于测试集成电路器件的系统,其中测试器通过通道与已知的良好器件进行通信。 测试仪 - DUT接口电路用于监视通道,同时测试人员将数据作为测试序列的一部分写入已知的良好设备中的位置。 作为响应,接口电路将数据写入被测设备(DUT)中的每一个中的相应位置。 当测试仪从已知的良好设备(KGD)中的位置读取时,接口电路监视通道,并且响应于从被测设备中的相应位置读取的DUT数据和从KGD获得的预期响应之间的比较。