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    • 81. 发明授权
    • MIS transistor and method for producing same
    • MIS晶体管及其制造方法
    • US07303965B2
    • 2007-12-04
    • US09879208
    • 2001-06-13
    • Yukihito OowakiMizuki OnoMitsuhiro NoguchiDaisaburo TakashimaAkira Nishiyama
    • Yukihito OowakiMizuki OnoMitsuhiro NoguchiDaisaburo TakashimaAkira Nishiyama
    • H01L21/33H01L21/3205H01L31/00
    • H01L21/28185H01L21/28194H01L21/28202H01L29/513H01L29/517H01L29/518H01L29/66545H01L29/66621H01L29/78
    • In a MIS transistor, the top surfaces of source/drain regions (S/D diffusion layers) formed on a semiconductor substrate 1 are arranged nearer to a gate electrode than a channel plane on the semiconductor substrate, and the top surfaces of the source/drain regions are arranged nearer than the channel plane than the interface between a gate insulator film provided on the upper side of the channel plane and the gate electrode. In this transistor, a groove is selectively formed in the surface of the semiconductor substrate, and a polycrystalline silicon deposited in the groove may be used as a mask to form impurity diffusion layers serving as source/drain regions to laminate and form a gate insulator film of a high dielectric film and a gate electrode. Alternatively, the polycrystalline silicon may be selectively formed to be used as a mask to elevate and form the impurity diffusion layer to laminate and form the gate insulator film and the gate electrode. Thus, it is possible to achieve both of the reduction of the resistance of the S/D diffusion layers and the reduction of the gate parasitic capacitance.
    • 在MIS晶体管中,形成在半导体基板1上的源极/漏极区域(S / D扩散层)的上表面布置成比半导体衬底上的沟道平面更靠近栅电极,源极/漏极区域的顶表面 漏区比布置在沟道平面上侧的栅极绝缘膜与栅电极之间的界面更靠近沟道平面。 在该晶体管中,在半导体衬底的表面中选择性地形成沟槽,并且可以将沉积在沟槽中的多晶硅用作掩模,以形成用作源极/漏极区域的杂质扩散层,以层压并形成栅极绝缘膜 的高介电膜和栅电极。 或者,可以选择性地形成多晶硅以用作掩模以升高和形成杂质扩散层以层压并形成栅极绝缘膜和栅电极。 因此,可以实现S / D扩散层的电阻的降低和栅极寄生电容的降低。
    • 88. 发明申请
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US20060038239A1
    • 2006-02-23
    • US11114105
    • 2005-04-26
    • Yoshinori TsuchiyaAkira Nishiyama
    • Yoshinori TsuchiyaAkira Nishiyama
    • H01L23/62
    • H01L21/823842H01L21/84H01L27/1203H01L29/785
    • Disclosed is a semiconductor device comprising a semiconductor substrate having isolation regions a p-type MIS transistor comprising a pair of source/drain regions formed in the semiconductor substrate, a gate insulating film formed on the semiconductor substrate, and a gate electrode formed on the gate insulating film and having a first metal layer at least at the gate electrode/gate insulator interface, and an n-type MIS transistor comprising a pair of source/drain regions formed in the semiconductor substrate, a gate insulating film formed on the semiconductor substrate, and a gate electrode formed on the gate insulating film and having a boride layer of the first metal at least at an interface thereof with the gate insulating film.
    • 公开了一种半导体器件,包括具有隔离区域的半导体衬底,p型MIS晶体管,包括形成在半导体衬底中的一对源极/漏极区,形成在半导体衬底上的栅极绝缘膜,以及形成在栅极上的栅电极 绝缘膜,并且至少在栅电极/栅极绝缘体界面处具有第一金属层,以及包括形成在半导体衬底中的一对源极/漏极区的n型MIS晶体管,形成在半导体衬底上的栅极绝缘膜, 以及形成在所述栅极绝缘膜上并且至少在与所述栅极绝缘膜的界面处具有所述第一金属的硼化物层的栅电极。