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    • 83. 发明公开
    • 포토레지스트용 스트리퍼 조성물
    • 剥离器组合物
    • KR1020070114038A
    • 2007-11-29
    • KR1020070050852
    • 2007-05-25
    • 주식회사 엘지화학
    • 한희박민춘김경준서성우권혁준안경호최병규민성준황지영
    • G03F7/42H01L21/027H01L21/306
    • G03F7/425G03F7/422H01L21/0273H01L21/0274H01L21/30608H01L21/30617
    • A photoresist stripper composition, a method for stripping a photoresist containing aluminum copper or aluminum and copper on a substrate by using the composition, and a method for preparing a liquid crystal display device and a semiconductor device by using the stripping method are provided to improve the corrosion resistance to an under conductive metallic layer or insulating layer and to allow a photoresist to be removed clearly within a short time. A photoresist stripper composition comprises 1-95 wt% of a polar aprotic solvent. Preferably the polar aprotic solvent is N-methyl formamide, or a polar aprotic solvent mixture containing N-methyl formamide. Optionally the photoresist stripper composition comprises further at least one selected from 1-60 wt% of a water-soluble organic amine compound, 0.01-5 wt% of a corrosion inhibitor, and a water-soluble nonionic surfactant.
    • 提供光致抗蚀剂剥离剂组合物,通过使用该组合物在基材上剥离含有铝铜或铝和铜的光致抗蚀剂的方法,以及通过使用剥离法制备液晶显示装置和半导体装置的方法, 对导电金属层或绝缘层具有耐腐蚀性,并允许在短时间内清除光致抗蚀剂。 光致抗蚀剂剥离剂组合物包含1-95重量%的极性非质子溶剂。 优选极性非质子溶剂是N-甲基甲酰胺,或含有N-甲基甲酰胺的极性非质子溶剂混合物。 任选地,光致抗蚀剂剥离剂组合物还包含选自1-60重量%的水溶性有机胺化合物,0.01-5重量%的腐蚀抑制剂和水溶性非离子表面活性剂中的至少一种。