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    • 83. 发明申请
    • APERIODIC MULTILAYER STRUCTURES
    • APERIODIC多层结构
    • WO2009043374A1
    • 2009-04-09
    • PCT/EP2007/060477
    • 2007-10-02
    • CONSIGLIO NAZIONALE DELLE RICERCHE - INFM ISTITUTO NAZIONALE PER LA FISICA DELLA MATERIAUNIVERSITA' DEGLI STUDI DI PADOVAREFLECTIVE X-RAY OPTICS LLC.PELIZZO, Maria-GuglielminaNICOLOSI, PiergiorgioSUMAN, MicheleWINDT, David L.
    • PELIZZO, Maria-GuglielminaNICOLOSI, PiergiorgioSUMAN, MicheleWINDT, David L.
    • G03F7/20G21K1/06G02B5/08
    • G03F7/70958B82Y10/00G02B5/0891G02B27/0012G03F1/24G03F7/70233G21K1/062G21K2201/061Y10T428/24612
    • Aperiodic mult ilayer structures An aperiodic multilayer structure (2, 2') comprising a plurality of alternating layers of a first (4, 4') and a second (6, 6') material and a capping layer (10, 10') covering these alternating layers, wherein the structure (2, 2') is characterized in that the thickness of the alternating layers chaotically varies in at least a portion of said structure (2, 2'). The invention further comprises design method comprising the step of define a time interval and a first plurality of periodic multilayer structures (A), then calculate a first merit function ( ∫ R(λ ) 10 * I(λ)dλ ) and define a first domain for each first structures. The method further includes the step of apply at least one rando m mutation to each first structures inside the associated first domain and calculate a second merit function ( ∫R(λ) 10 * I(λ)dλ for the at least one mutation. Then, the method proceeds with a co mparison of each first merit functions with the second merit function of the associated at least one mutation and if said second merit function is enhanced with respect to the first merit function, the at least one mutation is substituted for the structure of the first plurality and a second domain is defined for thw mutation, otherwise, the structure of the first plurality is maintained inside the corresponding first domain. The method further includes the step of calculate a mean value of the merit functions o f the first plurality of structures or mutations present in each first or second domain and define a threshold value to said mean value; then, for each first plurality of structures or mutations present in each first or second domain whose merit function is enhanced of the threshold with respect to the mean value, subst itute a third domain to the first or second domain unt il the corresponding merit function is enhanced of said predetermined threshold. Then, the preceding step are repeated unt il the time interval has lapsed and the merit funct ions of the first plurality of structures or mutations present in each first domain are compared and the structure or mutation whose merit function is the more enhanced is selected.
    • 非周期多层结构包括多个第一(4,4'')和第二(6,6')材料的交替层和覆盖层(10,10')的非周期多层结构(2,2'),覆盖 这些交替层,其中所述结构(2,2')的特征在于,所述交替层的厚度在所述结构(2,2')的至少一部分中混沌变化。 本发明还包括设计方法,包括定义时间间隔和第一多个周期性多层结构(A)的步骤,然后计算第一优值函数(ΔR(?)10 * I(?)d?)并定义 每个第一个结构的第一个域。 所述方法还包括对所述相关联的第一结构域内的每个第一结构应用至少一个rando m突变的步骤,并计算所述至少一个突变的第二优点函数(ΔR(α)10 * I(?)d?)。 然后,该方法进行每个第一优点函数与相关联的至少一个突变的第二优值函数的比较,并且如果针对第一优值函数增强所述第二优值函数,则将至少一个突变替换为 所述第一多个结构和第二结构域被定义用于突变,否则,所述第一多个结构的结构被保持在所述对应的第一域内,所述方法还包括以下步骤:计算所述第一和第二域的优点函数的平均值 存在于每个第一或第二结构域中的多个结构或突变,并且对所述平均值定义阈值;然后,对于每个第一或第二结构中存在的每个第一多个结构或突变 cond域,其优点函数相对于平均值增加阈值,将第三域替换为第一或第二域,其中对应的优值函数被增强为所述预定阈值。 然后,重复上述步骤,并且比较每个第一域中存在的第一多个结构或突变的优点函数,并且选择其优点功能更强的结构或突变。