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    • 85. 发明公开
    • HYDROGEN CONCENTRATION MEASURING DEVICE
    • 氢浓度测量装置
    • EP3185010A1
    • 2017-06-28
    • EP16204765.8
    • 2016-12-16
    • STANLEY ELECTRIC CO., LTD.Tokyo University of Science Educational Foundation Administrative Organization
    • MATSUMOTO, KojiSATSU, MasakazuAIMONO, TakanoriIKEGAMI, KeiichiUOZUMI, ShinichiNISHIO, KeishiYAMAGUCHI, Yuki
    • G01N33/00
    • G01N33/005G01N27/04G01N33/0032
    • The present invention provides a hydrogen concentration measuring device capable of measuring with high accuracy a hydrogen concentration over an extensive range by a simple configuration. A hydrogen concentration measuring device 1 includes: a sensor chip 2 which detects the electric resistance of a sensing film 2a; an optical measurement unit 3 which detects the transmitted light intensity of the sensing film 2a; and a controller which performs first hydrogen concentration measurement processing whereby to measure a hydrogen concentration in the gas atmosphere on the basis of a detected electric resistance in a first measurement range, second hydrogen concentration measurement processing whereby to measure a hydrogen concentration in a gas atmosphere on the basis of the detected transmitted light intensity in a second measurement range having at least a part thereof overlapping with the first measurement range, and measurement value correction processing in which a difference between the hydrogen concentration measured by the first hydrogen concentration measurement processing and the hydrogen concentration measured by the second hydrogen concentration measurement processing is reduced to determine the measurement value of the hydrogen concentration in a range in which the first measurement range and the second measurement range overlap.
    • 本发明提供一种氢浓度测定装置,其能够通过简单的结构高精度地测定广泛的范围内的氢浓度。 氢浓度测量装置1包括:传感器芯片2,其检测传感膜2a的电阻; 光学测量单元3,其检测传感膜2a的透射光强度; 以及控制器,其执行第一氢浓度测量处理,从而基于第一测量范围内的检测电阻来测量气体气氛中的氢浓度;第二氢浓度测量处理,其用于测量在第一测量范围上的气体气氛中的氢浓度 在至少一部分与第一测量范围重叠的第二测量范围中检测到的透射光强度的基础以及测量值校正处理,在该测量值校正处理中,通过第一氢浓度测量处理测量的氢浓度与氢气 通过第二氢浓度测量处理测量的浓度降低以确定在第一测量范围和第二测量范围重叠的范围中的氢浓度的测量值。