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    • 87. 发明授权
    • Swing support apparatus
    • 摆动支撑装置
    • US5886488A
    • 1999-03-23
    • US850748
    • 1997-05-02
    • Hisashi NakajimaMasashi ShimizuKazuhito Yokomori
    • Hisashi NakajimaMasashi ShimizuKazuhito Yokomori
    • F16C11/04G01R31/26G01R31/28H01L21/66H02P7/00
    • G01R31/2851G01R31/2887
    • A mechanism for stopping an object to be swung in a predetermined stop position and holding the object in that position includes a temporary stopping unit for stopping the swing of the object in a temporary stop position before the stop position, a rotation complementing unit for complementarily further rotating the object from the temporary stop position to the stop position, and a holding unit for holding the object in the stop position. As a preferable embodiment of the rotation complementing means, it is possible to use a) a coupling unit for coupling a mounting member to a second power transmission wheel such that the mounting member can freely rotate in both the forward and reverse directions with respect to the second power transmission wheel, b) a rotation angle regulating unit for regulating the angle range within which the mounting member can freely rotate in the forward and reverse directions with respect to the second power transmission wheel, c) a mounting member pre-rotating unit for allowing a driving unit to rotate the mounting member within the angle range prior to the second power transmission wheel, and driving the second power transmission wheel after the mounting member stops rotating due to the rotation angle regulating unit, and d) a complementary torque apply unit for applying a complementary torque to the object in the temporary stop position and complementarily further rotating the object from the temporary stop position to the stop position.
    • 用于停止在预定停止位置摆动的物体并将物体保持在该位置的机构包括用于在停止位置之前停止物体在暂时停止位置的摆动的临时停止单元,用于互补地进一步的旋转补充单元 将物体从临时停止位置旋转到停止位置,以及保持单元,用于将物体保持在停止位置。 作为旋转补充装置的优选实施例,可以使用a)用于将安装构件联接到第二动力传递轮的联接单元,使得安装构件可相对于第二动力传递轮沿正反方向自由旋转 第二动力传递轮,b)旋转角度调节单元,用于调节安装构件相对于第二动力传动轮在正反方向上自由旋转的角度范围; c)安装构件预旋转单元, 使得驱动单元在第二动力传动轮之前的角度范围内旋转安装构件,并且在安装构件由于旋转角度调节单元停止旋转之后驱动第二动力传递轮,以及d)互补转矩施加单元 用于在暂时停止位置对物体施加互补的扭矩,并且使物体从t互补地进一步旋转 他暂停停止位置到停止位置。
    • 90. 发明授权
    • Probe apparatus for correcting the probe card posture before testing
    • 用于在测试前校正探针卡姿态的探针装置
    • US5642056A
    • 1997-06-24
    • US361537
    • 1994-12-22
    • Hisashi NakajimaHaruhiko Yoshioka
    • Hisashi NakajimaHaruhiko Yoshioka
    • G01R1/067G01R1/073G01R31/28G01R31/02
    • G01R31/2891G01R1/06705G01R31/2887G01R1/07342
    • A probe apparatus including a table on which a semiconductor wafer is mounted, for a wafer having a circuit connected to a plurality of pads. A probe card assembly is positioned relative to a reference plane, and has a card body and groups of probes held by a card holder. A drive system moves the table up and down to cause the pads to contact probe tips, and a test head sends test signals to the circuit through the probes and pads, which contact one another, to test the electric property of the circuit. In addition, a sensor detects the probe tip profile or levels at plural points of the probe card assembly, and a controller calculates the tilting degree and direction of probe tip profile of probe groups on the basis of the results thus detected to thereby send correction commands. A tilt correction unit supports the card holder and adjusts a level of the card holder at the plural points, in response to the command applied from the controller, to thereby make the probe tip profile or each probe group parallel to the reference plane.
    • 一种探针装置,包括安装有半导体晶片的台,用于具有连接到多个焊盘的电路的晶片。 探针卡组件相对于参考平面定位,并且具有卡体和由卡夹保持的探针组。 驱动系统上下移动工作台,使焊盘接触探头,测试头通过彼此接触的探头和焊盘将测试信号发送到电路,以测试电路的电气特性。 此外,传感器检测探头卡组件的多个点处的探头尖端轮廓或水平,并且控制器基于所检测到的结果计算探针组的探针尖端轮廓的倾斜度和方向,从而发送校正命令 。 倾斜校正单元响应于从控制器施加的命令,支持卡夹并且在多个点处调整卡夹的水平,从而使探针针尖轮廓或每个探针组平行于参考平面。