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    • 83. 发明授权
    • Transistor structure having an active region and a dielectric platform region
    • 具有有源区和电介质平台区的晶体管结构
    • US08076724B2
    • 2011-12-13
    • US12248820
    • 2008-10-09
    • Robert Bruce Davies
    • Robert Bruce Davies
    • H01L29/66H01L29/78
    • H01L29/7811H01L21/26586H01L29/0653H01L29/0661H01L29/0696H01L29/0878H01L29/402H01L29/41766H01L29/42376H01L29/66727
    • A semiconductor device is formed having lower gate-to-drain capacitance. The semiconductor device having an active region (1300) and a dielectric platform region (1310). A trench (80) is formed adjacent to a drain (20) of the semiconductor device to a first depth. The etch process for forming trench (80) etches the dielectric platform region (1310) to a first depth. A second trench (210) is etched in trench (80) to further isolate areas in the active region (1300). The etch process for forming the second trench (210) etches the dielectric platform region (1310) to form a support structure for the dielectric platform in the substrate. The dielectric platform, the trench (80), and the second trench (210) is capped and sealed. The dielectric platform is made approximately planar to the major surface of the substrate by forming the support structure from the first depth to the second depth.
    • 形成具有较低栅 - 漏电容的半导体器件。 具有有源区(1300)和电介质平台区(1310)的半导体器件。 与半导体器件的漏极(20)相邻形成第一深度的沟槽(80)。 用于形成沟槽(80)的蚀刻工艺将电介质平台区域(1310)蚀刻到第一深度。 在沟槽(80)中蚀刻第二沟槽(210)以进一步隔离有源区域(1300)中的区域。 用于形成第二沟槽(210)的蚀刻工艺蚀刻介电平台区域(1310)以形成用于衬底中的电介质平台的支撑结构。 绝缘平台,沟槽(80)和第二沟槽(210)被封盖并密封。 通过从第一深度到第二深度形成支撑结构,使电介质平台与基板的主表面大致平面。
    • 84. 发明授权
    • Semiconductor structure and method of manufacture
    • 半导体结构及制造方法
    • US08063467B2
    • 2011-11-22
    • US12330748
    • 2008-12-09
    • Michael Albert Tischler
    • Michael Albert Tischler
    • H01L29/02
    • H01L27/0617H01L21/76232H01L27/0629H01L27/08
    • In various embodiments, semiconductor structures and methods to manufacture these structures are disclosed. In one embodiment, a method includes removing a portion of a semiconductor material to form a first protrusion and a cavity having a boundary that is below a surface of the semiconductor material, wherein the first protrusion extends from the boundary of the cavity. The method further includes forming a non-conformal material over a first portion of the first protrusion using an angled deposition of the non-conformal material, wherein the angle of deposition of the non-conformal material is non-perpendicular to the surface of the semiconductor material. Other embodiments are described and claimed.
    • 在各种实施例中,公开了制造这些结构的半导体结构和方法。 在一个实施例中,一种方法包括去除半导体材料的一部分以形成第一突起和具有在半导体材料的表面下方的边界的空腔,其中第一突起从腔的边界延伸。 该方法还包括使用非保形材料的成角度沉积在第一突起的第一部分上形成非保形材料,其中非保形材料的沉积角度不垂直于半导体的表面 材料。 描述和要求保护其他实施例。
    • 86. 发明授权
    • Transistor structure having dual shield layers
    • 具有双屏蔽层的晶体管结构
    • US08008719B2
    • 2011-08-30
    • US12248811
    • 2008-10-09
    • Robert Bruce Davies
    • Robert Bruce Davies
    • H01L29/78
    • H01L29/7802H01L21/26586H01L21/2815H01L29/0653H01L29/0878H01L29/1095H01L29/407H01L29/42376H01L29/456H01L29/4933H01L29/66719H01L29/66727H01L29/7811
    • A semiconductor device is formed having lower gate to drain capacitance. A trench (80) is formed adjacent to a drain (20) of the semiconductor device. Trench (80) has a sidewall surface (100) and a surface (90). A doped region (110) is implanted through the sidewall surface (100) of trench (80). A dielectric layer (150) overlies the sidewall surface (100) of trench (80). A shield layer (170) overlies the dielectric layer (150). The shield layer (170) is between a portion of drain (20) and a portion of the gate and gate interconnect of the semiconductor device thereby reducing gate to drain capacitance. The shield layer (170) overlies a minority portion of the surface (90) of trench (80). A second shield layer (270) further reduces gate to drain capacitance.
    • 形成具有较低栅极至漏极电容的半导体器件。 邻近半导体器件的漏极(20)形成沟槽(80)。 沟槽(80)具有侧壁表面(100)和表面(90)。 通过沟槽(80)的侧壁表面(100)注入掺杂区域(110)。 电介质层(150)覆盖在沟槽(80)的侧壁表面(100)上。 屏蔽层(170)覆盖在电介质层(150)上。 屏蔽层(170)位于漏极(20)的一部分和半导体器件的栅极和栅极互连的一部分之间,从而减小栅极至漏极电容。 屏蔽层(170)覆盖沟槽(80)的表面(90)的少数部分。 第二屏蔽层(270)进一步减小栅极至漏极电容。
    • 87. 发明授权
    • Sacrificial pillar dielectric platform
    • 牺牲支柱电介质平台
    • US07985977B2
    • 2011-07-26
    • US12330765
    • 2008-12-09
    • Bishnu Prasanna GogoiDavid William Wolfert, Jr.
    • Bishnu Prasanna GogoiDavid William Wolfert, Jr.
    • H01L33/00
    • H01L21/764H01L21/76224H01L2924/0002H01L2924/00
    • Briefly, in accordance with one or more embodiments, a dielectric platform is at least partially formed in a semiconductor substrate and extending at least partially below a surface of a semiconductor substrate. The dielectric platform may include structural pillars formed by backfilling a first plurality of cavities etched in the substrate, and a second plurality of cavities formed by etching away sacrificial pillars disposed between the structural pillars. The second plurality of cavities may be capped to hermetically seal the second plurality of cavities to impart the dielectric constant of the material contained therein, for example air, to the characteristic dielectric constant of the dielectric platform. Alternatively, the second plurality of cavities may be backfilled with a material having a lower dielectric constant than the substrate, for example silicon dioxide where the substrate comprises silicon.
    • 简而言之,根据一个或多个实施例,绝缘平台至少部分地形成在半导体衬底中并且至少部分地延伸到半导体衬底的表面之下。 电介质平台可以包括通过回填在衬底中蚀刻的第一多个空腔而形成的结构柱,以及通过蚀刻掉设置在结构柱之间的牺牲柱而形成的第二多个空腔。 第二多个空腔可以被封盖以密封第二多个空腔,以将包含在其中的材料(例如空气)的介电常数赋予介电平台的特性介电常数。 或者,第二多个空腔可以用具有比衬底更低的介电常数的材料回填,例如二氧化硅,其中衬底包括硅。
    • 88. 发明申请
    • ELECTRICAL STRESS PROTECTION APPARATUS AND METHOD OF MANUFACTURE
    • 电力应力保护装置及其制造方法
    • US20100103578A1
    • 2010-04-29
    • US12652839
    • 2010-01-06
    • Robert Bruce Davies
    • Robert Bruce Davies
    • H02H3/00
    • H01L27/0262
    • In various embodiments, circuits and semiconductor devices and structures and methods to manufacture these structures and devices are disclosed. In one embodiment, a bidirectional polarity, voltage transient protection device is disclosed. The voltage transient protection device may include a bipolar PNP transistor having a turn-on voltage of VBE1, a bipolar NPN transistor having a turn-on voltage of VBE2, and a field effect transistor (FET) having a threshold voltage of VTH, wherein a turn-on voltage VTO of the voltage transient protection device is approximately equal to the sum of VBE1, VBE2, and VTH, that is, VTO≅VBE1+VBE2+VTH. Other embodiments are described and claimed.
    • 在各种实施例中,公开了用于制造这些结构和装置的电路和半导体器件及其结构和方法。 在一个实施例中,公开了双向极性电压瞬变保护装置。 电压瞬变保护装置可以包括具有VBE1的导通电压的双极性PNP晶体管,具有VBE2导通电压的双极性NPN晶体管和具有阈值电压VTH的场效应晶体管(FET),其中a 电压瞬变保护装置的导通电压VTO近似等于VBE1,VBE2和VTH的总和,即VTO≅VBE1+ VBE2 + VTH。 描述和要求保护其他实施例。