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    • 88. 发明专利
    • FLUID CONTROLLER
    • IL200195D0
    • 2010-04-29
    • IL20019509
    • 2009-08-02
    • FUJIKIN KK
    • F16K20100101
    • The present invention provides a fluid controller which enables fine adjustments of low flow rates and enables a user to set desired low flow rates. Low-flow-rate piston stop-position setting means 12, which sets a position at which a low-flow-rate piston stops in upward movement thereof, includes: a low-flow-rate control screw 31 which is screwed in a through screw hole 15a provided in the top wall 15 of a casing 4 in such a way as to provide a gap between itself and the upper end surface of a valve rod 5, a tapered portion 32 provided at the tip end portion of the low-flow-rate control screw 31, a stopper piston 33 which has, in an upper surface thereof, a tapered portion 34 facing to the tapered portion 32 with a predetermined interval interposed therebetween and also has a lower surface 33a for restricting the upper position at which the low-flow-rate piston 8 stops, and a plurality of force transmission spherical members 35 which are interposed between the tapered portion 32 of the low-flow-rate control screw 31 and the tapered portion 34 of the stopper piston 33 for transmitting force therebetween.
    • 90. 发明专利
    • METHOD OF DETECTING MALFUNCTION OF RESTRICTION MECHANISM DOWNSTREAM SIDE VALVE OF PRESSURE FLOW CONTROL DEVICE
    • IL195300D0
    • 2009-08-03
    • IL19530008
    • 2008-11-16
    • FUJIKIN KK
    • G05D20100101
    • It has been found to be disadvantageous that, with a conventional pressure type flow control apparatus, it is not possible to determine the state of a valve on the downstream side of a throttle mechanism with a flow rate output signal due to the structural reason of the apparatus. To overcome the difficulty, the determination of whether a valve on the downstream side of a throttle mechanism is open is achieved at ease using the state of changes of a flow rate output signal while a pressure type flow control apparatus is in operation. With a pressure type flow control apparatus, a valve on the downstream side of a throttle mechanism is released and a flow rate setting value Qe to be inputted to a pressure type flow control apparatus is changed to detect the magnitude ”V of changes of a flow rate output signal Qo from a pressure type flow control apparatus while said flow rate setting value Qe changes so that it is determined either that a valve on the downstream side of a throttle mechanism is opening normally in the case that the magnitude ”V of changes of said flow rate output signal Qo is found to be above the predetermined value, or that the releasing operations are malfunctioning in the case that the magnitude ”V of changes is found to be below the predetermined value.