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    • 77. 发明申请
    • METHOD AND APPARATUS FOR LASER ABLATION OF A TARGET MATERIAL
    • 目标材料激光消除的方法和装置
    • WO01017001A1
    • 2001-03-08
    • PCT/US2000/023362
    • 2000-08-25
    • B23K26/06B23K26/073B23K26/38H01L21/00H01L21/301H01L21/48B23K26/00B23K26/08B23K26/10B23K26/14B23K26/16B23K26/18H01L21/44H01L21/46H01L21/50H01L21/78
    • H01L21/67092B23K26/0624B23K26/0736B23K26/38B23K2201/40H01L21/4803Y10S438/94
    • A method and apparatus for laser cutting a target material is disclosed. The method includes the steps of generating laser pulses and applying the laser pulses to the target material so that the laser pulses cut through the material. The laser pulses have an approximately ellipse shaped spot, having a temporal pulse width shorter than about 100 nanoseconds, and have an energy density from about 2 to 20 times the ablation threshold energy of the target material. The laser pulses are applied to the material such that the major axis of the ellipse shaped spot moves parallel to the cutting direction. The spot has a leading and trailing edge on the major axis, and the energy density of each laser pulse increases from zero to a maximum along the leading edge and decreases to zero along the trailing edge. The apparatus is a laser system (1) for cutting a target material that includes: a seed laser system (2) for producing a first laser beam; a laser amplifier (4) for amplifying the first laser pulse to produce an amplified laser beam; a harmonic generation system (6) for converting the amplified pulse laser beam into a second pulse laser beam having a shorter wavelength; a focussing system (7) for focussing the second pulse laser beam to an approximately ellipse shaped third pulse laser beam; and a motion control system (8) for moving a target material contacted by the third pulse laser beam.
    • 公开了一种激光切割目标材料的方法和装置。 该方法包括产生激光脉冲并将激光脉冲施加到目标材料的步骤,使得激光脉冲切穿材料。 激光脉冲具有近似椭圆形的点,具有短于约100纳秒的时间脉冲宽度,并且具有来自靶材料的消融阈值能量的约2至20倍的能量密度。 激光脉冲施加到材料上,使得椭圆形点的长轴平行于切割方向移动。 该点在主轴上具有前缘和后缘,并且每个激光脉冲的能量密度沿着前沿从零增加到最大值,并且沿着后沿逐渐减小到零。 该装置是用于切割目标材料的激光系统(1),其包括:用于产生第一激光束的种子激光系统(2) 激光放大器(4),用于放大第一激光脉冲以产生放大的激光束; 用于将放大的脉冲激光束转换成具有较短波长的第二脉冲激光束的谐波发生系统(6); 用于将第二脉冲激光束聚焦到大致椭圆形的第三脉冲激光束的聚焦系统(7); 以及用于移动与第三脉冲激光束接触的目标材料的运动控制系统(8)。