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71. 发明公开

EP1283456A1 Tool for searching similar machining data and automatic programming apparatus based thereon 有权
标题翻译：用于搜索类似加工数据的装置，并在其上自动编程装置基于
公开(公告)号：EP1283456A1
公开(公告)日：2003-02-12
申请号：EP02017390.2
申请日：2002-08-02
申请人： Mori Seiki Co., Ltd. , Intelligent Manufacturing Systems International
发明人： Nakamura, Takayuki , Tanaka, Shojiro
IPC分类号： G05B19/4093
CPC分类号： G05B19/4093 , G05B2219/31265 , G05B2219/35291 , G05B2219/36337 , Y02P90/265
摘要： The invention relates to an apparatus that generates an NC program efficiently by using programming base data for a previously similar machines product. The apparatus comprises: (A) a historical data storing section (16) for prestoring programming base data which is base data for NC program generation and comprises (A.1) machining element data including configuration data concerning a workpiece and a product and process data concerning the kind of machining, and (A.2) tool-related data concerning a tool and machining conditions; (B) a machining element data generating section (13) for generating the machining element data for the product to be machined, based on three-dimensional shape data for the product to be machined and the workpiece; (C) and a searching section (15) for seaching in the historical data storing section (16) on the basis of the generated machining element data, and for extracting programming base data for a product similar to the product to be machined.
摘要翻译：本发明涉及一种装置生成有效地使用编程基础数据针对先前类似机器产品费率做到NC程序。该装置包括：（A）用于急环编程基础数据的所有历史数据存储部（16），其是用于NC程序生成，并包括基本数据（A.1）的加工元件的数据包括配置数据关于工件和一个产品和过程数据关于那种加工，和（A.2）工具相关的数据有关的工具和加工条件的; （B）的加工元件数据生成部（13），用于产生所述加工要素数据为产品基于用于待加工的产品和工件的三维形状数据进行机械加工，; （C）和用于seaching在历史数据存储所生成的加工元件的数据的基础上部分（16），以及用于类似产品的产品中提取节目的基本数据被加工的检索部（15）。

72. 发明申请

WO2018041423A1 CONTROLLING AND MONITORING A PROCESS TO PRODUCE A CHEMICAL, PHARMACEUTICAL OR BIOTECHNOLOGICAL PRODUCT 审中-公开
标题翻译：控制和监测生产化学，药物或生物技术产品的过程
公开(公告)号：WO2018041423A1
公开(公告)日：2018-03-08
申请号：PCT/EP2017/061303
申请日：2017-05-11
申请人： SARTORIUS STEDIM BIOTECH GMBH
发明人： GRIMM, Christian , BECKER, Mario , BÖTTCHER, Lars , THORSTEN, Adams
IPC分类号： G05B19/418
CPC分类号： G05B19/41835 , C12M41/36 , G05B19/4181 , G05B19/4185 , G05B19/41865 , G05B19/41875 , G05B2219/31265 , G05B2219/32191 , G05B2219/32201 , G05B2219/42001 , Y02P90/22
摘要： A computer system and computer-implemented method are described for controlling and monitoring a process to produce a chemical, pharmaceutical or biotechnological product, the method comprising: providing a database, the database storing sets of process parameters to control and monitor respective ones of a plurality of processes performed in order to produce products, wherein each of the stored sets of process parameters is associated with a successful trajectory of a respective one of the processes performed according to the respective set process parameters, wherein each successful trajectory is a time-based profile of measurements recorded during performance of the respective process; receiving a set of characterizing process parameters that characterize the process; identifying a first set process parameters from the stored sets of process parameters, the first set of process parameters having a specified degree of similarity to the set of characterizing process parameters, wherein the first set of process parameters is associated with a first successful trajectory, controlling and monitoring the process using the first successful trajectory, comprising: recording measurements of the process; estimating a trajectory of the process based on the recorded measurements.
摘要翻译：描述了用于控制和监控生产化学，药物或生物技术产品的过程的计算机系统和计算机实现的方法，所述方法包括：提供数据库，所述数据库将过程参数组存储为控制和监测为了生产产品而执行的多个过程中的相应过程，其中，所存储的过程参数组中的每一个与根据相应的设定过程参数执行的过程中的相应过程的成功轨迹相关联，其中每个成功的轨迹是在相应过程的执行过程中记录的基于时间的测量结果; 接收表征所述过程的一组特征化过程参数; 从所存储的过程参数组中识别第一组过程参数，所述第一组过程参数具有与所述一组特征过程参数的指定的相似度，其中所述第一组过程参数与第一成功的轨迹相关联，控制以及使用所述第一成功轨迹监视所述过程，所述方法包括：记录所述过程的测量结果; 根据记录的测量结果估算过程的轨迹。

73. 发明申请

WO2011146914A3 MULTI-STAGE PROCESS MODELING METHOD 审中-公开
标题翻译：多阶段过程建模方法
公开(公告)号：WO2011146914A3
公开(公告)日：2012-01-12
申请号：PCT/US2011037480
申请日：2011-05-21
申请人： FISHER ROSEMOUNT SYSTEMS INC , BLEVINS TERRENCE LYNN , WOJSZNIS WILHELM K , WOREK CHRISTOPHER J , NIXON MARK
发明人： BLEVINS TERRENCE LYNN , WOJSZNIS WILHELM K , WOREK CHRISTOPHER J , NIXON MARK
IPC分类号： G05B17/02
CPC分类号： G05B17/02 , G05B2219/31265 , G05B2219/32077
摘要： A process is modeled by resolving the process into a plurality of process stages, including at least a first process stage and a second process stage, and developing a plurality of models, each model corresponding to a respective one of the plurality of process stages, wherein the model corresponding to each process stage is developed using data from one or more runs of that process stage and output quality data relating to the one or more runs of that process stage and wherein the model corresponding to each process stage is adapted to produce an output quality prediction associated with that process stage, and wherein the output quality prediction produced by the model of a first one of the process stages is used to develop the model of a second one of the process stages.
摘要翻译：通过将过程解析成多个处理阶段（包括至少第一处理阶段和第二处理阶段）以及开发多个模型来建模过程，每个模型对应于多个处理阶段中的相应一个，其中使用来自该过程阶段的一个或多个运行的数据和与该过程阶段的一个或多个运行相关的输出质量数据来开发与每个过程阶段相对应的模型，并且其中与每个过程阶段对应的模型适于产生输出与该处理阶段相关联的质量预测，并且其中由第一个进程阶段的模型产生的输出质量预测用于开发第二个进程阶段的模型。

74. 发明申请

WO2005006411A2 FEEDFORWARD, FEEDBACK WAFER TO WAFER CONTROL METHOD FOR AN ETCH PROCESS 审中-公开
标题翻译： FEEDFORWARD，反馈晶片，晶片控制方法，用于蚀刻工艺
公开(公告)号：WO2005006411A2
公开(公告)日：2005-01-20
申请号：PCT/US2004/016404
申请日：2004-05-24
申请人： TOKYO ELECTRON LIMITED , FUNK, Merritt
发明人： FUNK, Merritt
IPC分类号： H01L21/00
CPC分类号： G05B19/41875 , G05B2219/31265 , G05B2219/32195 , G05B2219/45031 , Y02P90/20 , Y02P90/22 , Y02P90/26
摘要： A method of using a run-to-run (R2R) controller to provide wafer-to-wafer (W2W) control in a semiconductor processing system is provided. The R2R controller includes a feed-forward (FF) controller, a process model controller, a feedback (FB) controller, and a process controller. The R2R controller uses feed-forward data, modeling data, feedback data, and process data to update a process recipe on a wafer-to-wafer time frame.
摘要翻译：提供了使用跑步跑（R2R）控制器在半导体处理系统中提供晶片 - 晶片（W2W）控制的方法。 R2R控制器包括前馈（FF）控制器，过程模型控制器，反馈（FB）控制器和过程控制器。 R2R控制器使用前馈数据，建模数据，反馈数据和过程数据来更新晶圆到晶圆时间帧上的工艺配方。

75. 发明申请

WO0169329A3 CONTROL FOR AN INDUSTRIAL PROCESS USING ONE OR MORE MULTIDIMENSIONAL VARIABLES 审中-公开
标题翻译：使用一个或多个多维变量控制工业过程
公开(公告)号：WO0169329A3
公开(公告)日：2002-06-13
申请号：PCT/US0107542
申请日：2001-03-09
申请人： CYRANO SCIENCES INC
发明人： HSIUNG CHANG-MENG B , MUNOZ BETHSABETH , ROY AJOY KUMAR , STEINTHAL MICHAEL GREGORY , SUNSHINE STEVEN A , VICIC MICHAEL ALLEN , ZHANG SHOU-HUA
IPC分类号： G05B1/00 , G05B11/01 , G05B13/02 , G05B15/02 , G05B19/042 , G05B19/4093 , G05B19/418 , G05B23/02 , G06F11/30 , G06F19/00
CPC分类号： G05B15/02 , G05B19/042 , G05B19/4093 , G05B19/41855 , G05B19/41865 , G05B19/41875 , G05B23/0221 , G05B23/0235 , G05B23/0243 , G05B23/0254 , G05B23/0286 , G05B23/0294 , G05B2219/31265 , G05B2219/31337 , G05B2219/31435 , G05B2219/31457 , G05B2219/32129 , G05B2219/32194 , G05B2219/32196 , G05B2219/32201 , G05B2219/32404 , G05B2219/33209 , G05B2219/35095 , Y02A90/22 , Y02A90/26 , Y02P90/185 , Y02P90/20 , Y02P90/22 , Y02P90/265 , Y02P90/86
摘要： A system for monitoring an industrial process and taking action based on the results of process monitoring. Actions taken may include process control, paging, voicemail, and input for e-enterprise systems. The system includes an input module for receiving a plurality of parameters from a process for manufacture of a substance or object. The system also includes a library module. The library module includes a plurality of computer aided processes. Any one of the computer aided processes is capable of using each of the plurality of parameters to compare at least two of the plurality of parameters against a training set of parameters. The training set of parameters is generally predetermined. The computer aided process is also capable of determining if the at least two of the plurality of parameters are within a predetermined range of the training set of parameters. Additionally, the system includes an output module for outputting a result based upon the training set and the plurality of parameters.
摘要翻译：一个监测工业过程并根据过程监控结果采取行动的系统。所采取的措施可能包括流程控制，分页，语音信箱和电子企业系统的输入。该系统包括用于从用于制造物质或物体的过程接收多个参数的输入模块。该系统还包括一个库模块。库模块包括多个计算机辅助处理。计算机辅助处理中的任何一个能够使用多个参数中的每一个来比较多个参数中的至少两个参数与训练参数集合。参数的训练集一般是预先确定的。计算机辅助处理还能够确定多个参数中的至少两个参数是否在训练参数集合的预定范围内。此外，该系统包括用于基于训练集和多个参数输出结果的输出模块。

76. 发明申请

WO01069329A2 CONTROL FOR AN INDUSTRIAL PROCESS USING ONE OR MORE MULTIDIMENSIONAL VARIABLES 审中-公开
标题翻译：使用一个或多个多维变量控制工业过程
公开(公告)号：WO01069329A2
公开(公告)日：2001-09-20
申请号：PCT/US2001/007542
申请日：2001-03-09
IPC分类号： G05B1/00 , G05B11/01 , G05B13/02 , G05B15/02 , G05B19/042 , G05B19/4093 , G05B19/418 , G05B23/02 , G06F11/30 , G06F19/00 , G05B
CPC分类号： G05B15/02 , G05B19/042 , G05B19/4093 , G05B19/41855 , G05B19/41865 , G05B19/41875 , G05B23/0221 , G05B23/0235 , G05B23/0243 , G05B23/0254 , G05B23/0286 , G05B23/0294 , G05B2219/31265 , G05B2219/31337 , G05B2219/31435 , G05B2219/31457 , G05B2219/32129 , G05B2219/32194 , G05B2219/32196 , G05B2219/32201 , G05B2219/32404 , G05B2219/33209 , G05B2219/35095 , G06F19/00 , Y02A90/22 , Y02A90/26 , Y02P90/185 , Y02P90/20 , Y02P90/22 , Y02P90/265 , Y02P90/86
摘要： A system for monitoring an industrial process and taking action based on the results of process monitoring. Actions taken may include process control, paging, voicemail, and input for e-enterprise systems. The system includes an input module for receiving a plurality of parameters from a process for manufacture of a substance or object. The system also includes a library module. The library module includes a plurality of computer aided processes. Any one of the computer aided processes is capable of using each of the plurality of parameters to compare at least two of the plurality of parameters against a training set of parameters. The training set of parameters is generally predetermined. The computer aided process is also capable of determining if the at least two of the plurality of parameters are within a predetermined range of the training set of parameters. Additionally, the system includes an output module for outputting a result based upon the training set and the plurality of parameters.
摘要翻译：一个监测工业过程并根据过程监控结果采取行动的系统。所采取的措施可能包括流程控制，分页，语音信箱和电子企业系统的输入。该系统包括用于从用于制造物质或物体的过程接收多个参数的输入模块。该系统还包括一个库模块。库模块包括多个计算机辅助处理。计算机辅助处理中的任何一个能够使用多个参数中的每一个来比较多个参数中的至少两个参数与训练参数集合。参数的训练集一般是预先确定的。计算机辅助处理还能够确定多个参数中的至少两个参数是否在训练参数集合的预定范围内。此外，该系统包括用于基于训练集和多个参数输出结果的输出模块。

77. 发明申请

US20170083012A1 METHODS AND APPARATUS TO DEFINE STAGES FOR MULTI-VARIATE BATCH CONTROL ANALYTICS 审中-公开
公开(公告)号：US20170083012A1
公开(公告)日：2017-03-23
申请号：US14858819
申请日：2015-09-18
申请人： Fisher-Rosemount Systems, Inc.
发明人： Steve Murray
IPC分类号： G05B19/418
CPC分类号： G05B19/41885 , G05B2219/31265 , G05B2219/32077 , G05B2219/32096 , G05B2219/32201 , Y02P90/20 , Y02P90/26
摘要： Methods and apparatus to define stages for multi-variate batch control analytics are disclosed. An example method includes determining, with the processor, a current stage in a current batch process based on a current value of a batch stage parameter. The current value of the batch stage parameter determined based on process control data associated with process parameters in the current batch process. The current stage determined independent of batch events defined by at least one of a start or an end of procedures, unit procedures, operations, or phases in a batch recipe. The example method further includes applying, with the processor, a model to the current batch process, the model corresponding to the current stage.

78. 发明授权

US08972037B2 Method and system for monitoring batch product manufacturing 有权
公开(公告)号：US08972037B2
公开(公告)日：2015-03-03
申请号：US13358418
申请日：2012-01-25
申请人： Charles J Scalfani , Donald L Gaudino , Craig A Nelson , Steven C McCormick , Therese M Sonnenfeld , Todd A Soutar
发明人： Charles J Scalfani , Donald L Gaudino , Craig A Nelson , Steven C McCormick , Therese M Sonnenfeld , Todd A Soutar
IPC分类号： G06F19/00 , G05B17/02 , G05B19/418
CPC分类号： G05B17/02 , G05B19/4183 , G05B2219/31265 , G05B2219/31311 , Y02P90/10
摘要： A system and method for monitoring product through a batch manufacturing plant is provided. The system includes, a parallel flow mode when product flows concurrently from at least two units to a single unit; and a serial flow mode where product flows from one unit to another at a given time, wherein the batch manufacturing plant is modeled based on the parallel and serial flow modes. A lot association is built based on product flow and a parent/child record is created for lot association. The system also includes a data collection system that collects phase information for every unit and a procedure identifier is used to create a batch identifier, where a batch identifier is associated with each lot on each unit through which product is flowing to and/or from at a given time.

79. 发明授权

US08353738B2 Advanced finishing control 有权
标题翻译：高级整理控制
公开(公告)号：US08353738B2
公开(公告)日：2013-01-15
申请号：US13136437
申请日：2011-08-01
申请人： Charles J. Molnar
发明人： Charles J. Molnar
IPC分类号： B24B49/00 , B24B51/00
CPC分类号： B24B37/042 , G05B19/41865 , G05B2219/31265 , G05B2219/31415 , G05B2219/45031 , G06Q10/06 , G06Q50/04 , H01L21/67248 , H01L21/68785 , Y02P90/18 , Y02P90/20 , Y02P90/22 , Y02P90/30 , Y02P90/86
摘要： Methods of using in situ finishing information for finishing workpieces and semiconductor wafers are described. Methods of using yield information at least in part related to cost of manufacture for finishing workpieces and semiconductor wafers are described. Changes or improvements to cost of manufacture of a workpiece using current in-process cost of manufacture information, tracked current in-process cost of manufacture information, or current cost of manufacture parameters are discussed. Appreciable changes to quality or cost of manufacture of a workpiece using tracking, using in-process tracked information, networks including a multiplicity of apparatus, and using in situ finishing information are discussed. A factory, apparatus, and methods to change or improve process control are discussed. A factory, apparatus, and methods to change or improve real-time process control are discussed. A factory, apparatus, and methods to change or improve feedforward and feedback control are discussed. The workpieces can be tracked individually or by process group such as a process batch.
摘要翻译：描述了使用原位精加工信息来完成工件和半导体晶片的方法。描述了至少部分地与完成工件和半导体晶片的制造成本相关的产量信息的方法。讨论了使用当前的制造过程成本信息，跟踪电流在制造信息的过程成本或制造参数的当前成本来改变或改进制造工件的成本。讨论了使用跟踪，使用过程中跟踪信息，包括多种设备的网络和使用原位整理信息的工件的质量或制造成本的可观察的变化。讨论了改变或改进过程控制的工厂，设备和方法。讨论了改变或改进实时过程控制的工厂，设备和方法。讨论了改变或改进前馈和反馈控制的工厂，设备和方法。工件可以单独跟踪，也可以由工艺组进行跟踪，例如工艺批次。

80. 发明授权

US08352049B2 Temporary expanding integrated monitoring network 有权
公开(公告)号：US08352049B2
公开(公告)日：2013-01-08
申请号：US13049294
申请日：2011-03-16
申请人： Chang-Meng B. Hsiung , Bethsabeth Munoz , Ajoy Kumar Roy , Michael Gregory Steinthal , Steven A. Sunshine , Michael Allen Vicic , Shou-Hua Zhang
发明人： Chang-Meng B. Hsiung , Bethsabeth Munoz , Ajoy Kumar Roy , Michael Gregory Steinthal , Steven A. Sunshine , Michael Allen Vicic , Shou-Hua Zhang
IPC分类号： G05B13/02 , G06F15/18
CPC分类号： G05B15/02 , G05B19/042 , G05B19/4093 , G05B19/41855 , G05B19/41865 , G05B19/41875 , G05B23/0221 , G05B23/0235 , G05B23/0243 , G05B23/0254 , G05B23/0286 , G05B23/0294 , G05B2219/31265 , G05B2219/31337 , G05B2219/31435 , G05B2219/31457 , G05B2219/32129 , G05B2219/32194 , G05B2219/32196 , G05B2219/32201 , G05B2219/32404 , G05B2219/33209 , G05B2219/35095 , G06F19/00 , Y02A90/22 , Y02A90/26 , Y02P90/185 , Y02P90/20 , Y02P90/22 , Y02P90/265 , Y02P90/86
摘要： A system for monitoring an industrial process and taking action based on the results of process monitoring. Actions taken may include process control, paging, voicemail, and input for e-enterprise systems. The system includes an input module for receiving a plurality of parameters from a process for manufacture of a substance or object. The system also includes a library module. The library module includes a plurality of computer aided processes. Any one of the computer aided processes is capable of using each of the plurality of parameters to compare at least two of the plurality of parameters against a training set of parameters. The training set of parameters is generally predetermined. The computer aided process is also capable of determining if the at least two of the plurality of parameters are within a predetermined range of the training set of parameters. Additionally, the system includes an output module for outputting a result based upon the training set and the plurality of parameters.

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