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    • 74. 发明专利
    • X-ray inspection apparatus
    • X射线检查装置
    • JP2013156172A
    • 2013-08-15
    • JP2012017452
    • 2012-01-31
    • X-Ray Precision Inc株式会社エックスレイプレシジョン
    • HOSOKAWA YOSHINORI
    • G01N23/04
    • G01N23/04G01N23/087G01N2223/6113G01N2223/616
    • PROBLEM TO BE SOLVED: To provide an X-ray inspection apparatus capable of quickly, highly accurately and non-destructively measuring a shape and a content of gold (Au) contained in an inspection target.SOLUTION: An X-ray inspection apparatus 1 includes: an X-ray generator 4 for applying an X-ray of 90 keV or more to an inspection target W; X-ray detectors 6, 7 for detecting the X-ray passed through the inspection target W; and an operation part 8 for measuring a shape and a content of Au contained in the inspection target W on the basis of X-ray signals detected by the X-ray detectors 6, 7. An Au filter 6 and a Pt filter 7 are respectively arranged between the X-ray detectors 6, 7 and the inspection target W, the X-ray detectors 6, 7 respective detect an X-ray irradiated from the X-ray generator 4 and transmitted through the inspection target W and the Au filter 6 and an X-ray irradiated from the X-ray generator 4 and transmitted through the inspection target W and the Pt filter 7, and the operation part 8 measures a shape and a content of Au contained in the inspection target W on the basis of respective X-ray signals.
    • 要解决的问题:提供能够快速,高精度和非破坏性地测量检查对象物中所含的金(Au)的形状和含量的X射线检查装置。解决方案:X射线检查装置1包括 :用于将90keV以上的X射线施加到检查对象W的X射线发生器4; 用于检测通过检查对象W的X射线的X射线检测器6,7; 以及用于基于由X射线检测器6,7所检测的X射线信号测量检查对象W中包含的Au的形状和含量的操作部8,Au滤波器6和Pt滤波器7分别 配置在X射线检测器6,7之间和检查对象物W之间,X射线检测器6,7分别检测从X射线发生器4照射的X射线,透过检查对象物W和Au滤光片6 以及从X射线发生器4照射并透过检查对象物W和Pt滤光片7的X射线,操作部8基于各自的测量对测定对象物W的形状和含量进行测定 X射线信号。
    • 78. 发明公开
    • Method and system for performing EDS analysis
    • Verfahren und System zurDurchführungeiner EDS-Analyze
    • EP2990783A1
    • 2016-03-02
    • EP14002994.3
    • 2014-08-29
    • Carl Zeiss Microscopy Ltd.
    • Hill, Edward
    • G01N23/225
    • G01N23/2252G01N2223/402G01N2223/616G01N2223/66
    • A method of X-ray Energy Dispersive Spectroscopic (EDS) analysis comprises: providing (101) a first set of materials and associated material data, wherein each material data represent properties of the associated material; directing (103) an electron beam to a plurality of locations on a sample and recording an energy dispersive x-ray spectrum associated with each of the plurality of locations; processing (105) each location of the plurality of locations by: assigning a material of the first set of materials to the processed location, if a first similarity criterion determined based on the energy dispersive x-ray spectrum associated with the processed location and the first set of material data is fulfilled (133); and then determining (109) a first group of locations which do not have the material of the first set of materials assigned; and processing (113) locations of the first group of locations by determining a second group of locations which have the material of the first set of materials assigned and which fulfil a first proximity criterion relative to the processed location; and assigning at least one material of the first set of materials to the processed location based on the materials assigned to the locations of the second group of locations. In other words, it is provided a method for X-ray material identification using energy dispersive spectroscopy and a library of reference X-ray spectra of known materials. Data points which cannot be identified from the library, thereby declared "unassigned", are identified based on identified data points which are in close proximity with them.
    • X射线能量分散光谱(EDS)分析的方法包括:提供(101)第一组材料和相关材料数据,其中每个材料数据表示相关材料的性质; 将电子束引导(103)到样品上的多个位置并记录与所述多个位置中的每一个相关联的能量色散X射线谱; 通过以下方式来处理(105)多个位置的每个位置:如果基于与处理的位置相关联的能量色散x射线谱确定的第一相似性标准和第一个 一套材料数据被满足(133); 然后确定(109)不具有分配的第一组材料的材料的第一组位置; 以及通过确定第二组位置来处理(113)所述第一组位置的位置,所述第二组位置具有被分配的第一组材料的材料,并且相对于处理的位置实现第一接近标准; 以及基于分配给所述第二组位置的位置的材料,将所述第一组材料的至少一种材料分配给所述经处理的位置。 换句话说,提供了使用能量色散光谱的X射线材料识别方法和已知材料的参考X射线光谱库。 根据与它们非常接近的所识别的数据点,识别从库中无法识别的数据点,从而声明为“未分配”。