会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 76. 发明专利
    • Sputtering target and process for producing the same
    • 喷射目标及其生产方法
    • JP2013199704A
    • 2013-10-03
    • JP2013005369
    • 2013-01-16
    • Mitsubishi Materials Corp三菱マテリアル株式会社
    • CHO SHUHINUMEMOTO KEITASHOJI MASAHIRO
    • C23C14/34
    • H01J37/3429B22F3/10B22F2201/20B22F2301/00B22F2999/00C22C1/0425C22C32/0089C23C14/0623C23C14/08C23C14/087C23C14/3414C23C14/35B22F3/1007
    • PROBLEM TO BE SOLVED: To provide a sputtering target which contains a high concentration of Na but is suppressed in the occurrence of discoloration and spots and abnormal discharge, and has high strength and is not easily cracked, and to provide a method for producing the same.SOLUTION: A sputtering target has a component composition that contains 10 to 40 at% of Ga and 1.0 to 15 at% of Na as metal components of the sputtering target other than F, S and Se, with the balance comprising Cu and unavoidable impurities. The sputtering target contains Na as Na-compounds comprising at least one selected from among sodium fluoride, sodium sulfide and sodium selenide. The sputtering target has a theoretical density ratio of 90% or more, a flexural strength of 100 N/mmor more, and a bulk specific resistance of 1 mΩ cm or less, and has 1 or less aggregate on average in the area of a target surface of 1 cm, the aggregate being at least one aggregate having a size of 0.05 mmor more selected from among sodium fluoride, sodium sulfide, and sodium selenide.
    • 要解决的问题:提供一种含有高浓度的Na但是在发生变色和斑点和异常放电时被抑制的溅射靶,并且具有高强度并且不容易破裂,并且提供其制造方法 解决方案:溅射靶具有含有10〜40at%的Ga和1.0〜15at%的Na作为除F,S,Se以外的溅射靶的金属成分的成分组成,余量由Cu和不可避免的杂质构成 。 溅射靶含有Na作为包含选自氟化钠,硫化钠和硒化钠中的至少一种的Na化合物。 溅射靶的理论密度比为90%以上,弯曲强度为100N / mm以上,体电阻为1m&OHgr; cm以下,并且在目标表面的面积为1cm的区域中平均具有1个或更少的骨料,所述骨料为至少一种选自氟化钠,硫化钠和硒化钠中的0.05mm以上的骨料。