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71. 发明公开

EP2318303A2 MIKROMECHANISCHE STRUKTUR SOWIE VERFAHREN ZUM EINSTELLEN DER ARBEITSSUPALTBREITE EINER MIKROMECHANISCHEN STRUKTUR 有权
标题翻译：微机械结构和设置方法的微观力学结构的工作间隙宽度
公开(公告)号：EP2318303A2
公开(公告)日：2011-05-11
申请号：EP09779758.3
申请日：2009-06-15
申请人： Robert Bosch GmbH
发明人： FRIEDRICH, Thomas , MEISEL, Daniel, Christoph , RAUDZIS, Carsten
IPC分类号： B81B3/00
CPC分类号： B81B3/0037 , B81B2201/033 , H02N1/008
摘要： The invention relates to a micromechanical structure (1), in particular sensor or actuator, comprising at least one working gap (4, 5) delimited by at least two structure sections (6, 7, 8, 9) which are adjustable relative to one another, and comprising means for setting the working gap width. The invention provides for the means to be embodied such that they widen the working gap (4, 5) by adjusting the at least one structure section (6, 7) that is stationary relative to a reference point during operation of the micromechanical structure (1) relative to the structure section (8, 9) that is movable relative to said reference point during operation. The invention furthermore relates to a method for setting a working gap width.

72. 发明授权

EP1663850B1 Process for fabricating a micro-electro-mechanical system with movable components 有权
标题翻译：一种用于制造微机电系统具有移动部件的方法
公开(公告)号：EP1663850B1
公开(公告)日：2009-09-16
申请号：EP04773454.6
申请日：2004-09-21
申请人： Panasonic Electric Works Co., Ltd.
发明人： OKA, Naomasa, c/o Panasonic Electric Works Co., Ltd , HARADA, Hiroshi, c/o Panasonic Electric Works Co.,Ltd. , OGIHARA, Jun, c/o Panasonic Electric Works Co., Ltd. , FUKSHIMA, Hiroshi, c/o Panasonic Electric Works Co., Ltd. , NOGE, Hiroshi, c/o Panasonic Electric Works Co.,Ltd. , SUZUKI, Yuji, c/o Panasonic Electric Works Co., Ltd. , KAWANO, Kiyohiko, c/o Panasonic Electric Works Co., Ltd. , YOSHIHARA, Takaaki, c/o Panasonic Electric Works Co., Ltd. , SUZUMURA, Masahiko, c/o Panasonic Electric Works Co.,Ltd.
IPC分类号： B81B3/00 , G02B26/08 , B81C1/00
CPC分类号： G02B26/0816 , B81B3/0086 , B81B2201/033 , B81B2201/045 , B81C1/00484 , B81C2201/0109 , B81C2201/019 , G02B6/3516 , G02B6/3518 , G02B6/3546 , G02B6/355 , G02B6/357 , G02B6/3584 , H02N1/008
摘要： A process for fabricating a micro-electro-mechanical system (MEMS) composed of fixed components fixedly supported on a lower substrate and movable components movably supported on the lower substrate. The process utilizes an upper substrate separate from the lower substrate. The upper substrate is selectively etched in its top layer to form therein a plurality of posts which project commonly from a bottom layer of the upper substrate. The posts include the fixed components to be fixed to the lower substrate and the movable components which are resiliently supported only to one or more of the fixed components to be movable relative to the fixed components. The lower substrate is formed in its top surface with at least one recess. The upper substrate is then bonded to the top of the lower substrate upside down in such a manner as to place the fixed components directly on the lower substrate and to place the movable components upwardly of the recess. Finally, the bottom layer of the upper substrate is removed to release the movable components from the bottom layer for floating the movable components above the recess and allowing them to move relative to the lower substrate, while keeping the fixed components fixed to the top of the lower substrate.

73. 发明公开

EP2038205A1 MEMS-BASED MICRO AND NANO GRIPPERS WITH TWO- AXIS FORCE SENSORS 有权
标题翻译：微米和纳米抢MEMS基地，两个力传感器
公开(公告)号：EP2038205A1
公开(公告)日：2009-03-25
申请号：EP07720006.1
申请日：2007-06-21
申请人： Sun, Yu , Kim, Keekyoung
发明人： Sun, Yu , Kim, Keekyoung
IPC分类号： B81C1/00 , B81B3/00 , B82B3/00
CPC分类号： B81C99/002 , B25J9/104 , B81B2201/0292 , B81B2201/031 , B81B2201/033
摘要： The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sizes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.

74. 发明公开

EP1975674A2 Micro oscillating device and mircro oscillating device array 有权
标题翻译：维克里斯坦
公开(公告)号：EP1975674A2
公开(公告)日：2008-10-01
申请号：EP08103114.8
申请日：2008-03-28
申请人： Fujitsu Limited
发明人： Tsuboi, Osamu , Mizuno, Yoshihiro , Soneda, Hiromitsu , Okuda, Hisao , Matsumoto, Tsuyoshi , Kouma, Norinao
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , B81B3/0086 , B81B2201/033 , B81B2201/047
摘要： A micro oscillating device includes a frame, an oscillating part including a first drive electrode for application of a reference electric potential, and a connecting part for connecting the frame and the oscillating part to each other, where the connecting part defines an axis of an oscillating motion of the oscillating part. A second drive electrode is fixed to the frame to cooperate with the first drive electrode for generation of a driving force for the oscillating movement. The first drive electrode includes a first end extension and a second end extension separated from each other and extending in a direction crossing the axis. The second drive electrode is within a separation distance between the first and the second end extensions.
摘要翻译：微振荡装置包括框架，包括用于施加参考电位的第一驱动电极的振荡部分和用于将框架和振荡部分彼此连接的连接部分，其中连接部分限定摆动轴线摆动部分的运动。第二驱动电极固定到框架以与第一驱动电极协作以产生用于振荡运动的驱动力。第一驱动电极包括彼此分离并沿与轴线交叉的方向延伸的第一端延伸部和第二端部延伸部。第二驱动电极在第一和第二端部延伸部之间的间隔距离内。

75. 发明公开

EP1902453A1 DISPOSITIF CAPACITIF A VOLUME CAPACITIF OPTIMISE 有权
标题翻译：具有优化电容体积电容性装置
公开(公告)号：EP1902453A1
公开(公告)日：2008-03-26
申请号：EP06777625.2
申请日：2006-07-06
申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人： DESPESSE, Ghislain , CHAILLOUT, Jean-Jacques , JAGER, Thomas
IPC分类号： H01G5/16
CPC分类号： H01G5/16 , B81B3/0086 , B81B2201/033 , G01C19/56 , G01P15/125 , G01P2015/0814
摘要： The invention mainly concerns a capacitive device comprising at least first (2) and second (4) combs, respectively provided with interdigital fingers, adapted to be mobile relative to each other depending on the closing-spacing apart of the axes of the fingers, at least one finger of the first comb (2) including a surface opposite a surface of a finger of the second comb (4). The invention is characterized in that the axis of the finger of the first comb and the axis of the finger of the second comb are inclined relative to a plane orthogonal to the first direction (X) of displacement of the combs, the plane being defined by second (Y) and third (Z) directions perpendicular to the direction (X), and mutually perpendicular.

76. 发明专利

TWI234819B 側壁保護之選擇性蝕刻方法及應用該方法所組成之結構失效
简体标题：侧壁保护之选择性蚀刻方法及应用该方法所组成之结构
公开(公告)号：TWI234819B
公开(公告)日：2005-06-21
申请号：TW092112374
申请日：2003-05-06
申请人：華新麗華股份有限公司 WALSIN LIHWA CORP.
发明人：謝哲偉 HSIEH, JERWEI , 朱懷遠 CHU, HUAI YUAN , 蔡明霖 JULIUS MING-LIN TSAI , 方維倫 FANG, WEILEUN
IPC分类号： H01L
CPC分类号： H02N1/008 , B81B2201/033 , B81C1/00595 , Y10S438/942
摘要：本案關於一種側壁保護之選擇性蝕刻方法，其係包含下列步驟：(a)提供一基板；(b)形成一第一遮罩層於該基板上；(c)形成一第二遮罩層於該第一遮罩層上；(d)形成一光阻層於該第二遮罩層上，而於基板上形成複數個蝕刻窗；(e)進行第一次蝕刻，以使該複數個蝕刻窗向下延伸至部分該基板；(f)進行第二次蝕刻以移除該光阻層，並向下蝕刻該基板以形成不同深度之深槽結構；(g)形成一側壁補強結構於不同深度之深槽結構的周邊；(h)進行第三次蝕刻以移除第二遮罩層，並去除底部之該側壁補強結構以形成一下結構；以及(i)進行側向蝕刻，藉以釋放一上結構。
简体摘要：本案关于一种侧壁保护之选择性蚀刻方法，其系包含下列步骤：(a)提供一基板；(b)形成一第一遮罩层于该基板上；(c)形成一第二遮罩层于该第一遮罩层上；(d)形成一光阻层于该第二遮罩层上，而于基板上形成复数个蚀刻窗；(e)进行第一次蚀刻，以使该复数个蚀刻窗向下延伸至部分该基板；(f)进行第二次蚀刻以移除该光阻层，并向下蚀刻该基板以形成不同深度之深槽结构；(g)形成一侧壁补强结构于不同深度之深槽结构的周边；(h)进行第三次蚀刻以移除第二遮罩层，并去除底部之该侧壁补强结构以形成一下结构；以及(i)进行侧向蚀刻，借以释放一上结构。

77. 发明授权

EP2743639B1 STRUCTURE OF DISPLACEMENT MONITORING ELECTRODE 失效
公开(公告)号：EP2743639B1
公开(公告)日：2018-09-19
申请号：EP11870767.8
申请日：2011-08-09
申请人： Toyota Jidosha Kabushiki Kaisha
发明人： NARITA, Katsutoshi
IPC分类号： G01C19/56 , G01B7/00 , B81B3/00 , G01C19/5733
CPC分类号： G01B7/14 , B81B3/0086 , B81B2201/033 , G01C19/5733
摘要： The displacement amount monitoring electrode structure according to the present invention is for maintaining the amplitude of the detection mass at a constant target amplitude even when the relative relationship between a fixed electrode and a movable electrode changes, and includes a fixed electrode and a movable electrode each having a comb-teeth shape including a base part and electrode fingers extending from the base part in a predetermined axis direction parallel to a substrate, the fixed electrode and the movable electrode facing each other such that the electrode fingers of the fixed electrode and the electrode fingers of the movable electrode are meshed together, the fixed electrode being fixed to the substrate and the movable electrode being able to be displaced in the predetermined axis direction, wherein the displacement amount monitoring electrode structure monitors a displacement amount of a detection mass to be driven at a target amplitude based on a change amount of a capacitance between the fixed electrode and the movable electrode, wherein a change sensitivity of the change amount of the capacitance with respect to a displacement amount of the movable electrode in the predetermined axis direction, becomes larger after the displacement of the movable electrode in the predetermined axis direction reaches a target displacement amount corresponding to the target amplitude of the detection mass, compared to before the displacement of the movable electrode reaches the target displacement amount.

78. 发明授权

EP2419370B1 LONG TRAVEL RANGE MEMS ACTUATOR 有权
标题翻译：长行程范围MEMS驱动器
公开(公告)号：EP2419370B1
公开(公告)日：2017-11-29
申请号：EP10716949.2
申请日：2010-04-16
申请人： SI-Ware Systems
发明人： MEDHAT, Mostafa , NADA, Yasseen , MORTADA, Bassem , SAADANY, Bassam, A.
IPC分类号： B81B3/00 , H02N1/00
CPC分类号： B81B3/0051 , B81B3/0037 , B81B2201/033 , B81B2203/0136 , B81B2203/051 , H02N1/008 , Y10T74/20558

79. 发明授权

EP2100179B1 MIKROSPIEGEL-AKTUATOR MIT KAPSELUNGSMÖGLICHKEIT SOWIE VERFAHREN ZUR HERSTELLUNG 有权
标题翻译：与KAPSELUNGSMÖGLICHKEIT和方法微镜致动器用于生产
公开(公告)号：EP2100179B1
公开(公告)日：2013-11-06
申请号：EP07856077.8
申请日：2007-12-11
申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
发明人： HOFMANN, Ulrich , OLDSEN, Marten
IPC分类号： G02B26/08 , B81B3/00 , B81C1/00
CPC分类号： G02B26/0841 , B81B2201/033 , B81B2201/042 , B81C1/00166

80. 发明授权

EP1803160B1 Post-release capacitance enhancement in micromachined devices and a method of performing the same 有权
标题翻译：在微机械设备豁免和执行程序的能力提高
公开(公告)号：EP1803160B1
公开(公告)日：2013-11-06
申请号：EP05798017.9
申请日：2005-09-07
申请人： The Regents of the University of California
发明人： Acar, Cenk , Shkel, Andrei M.
IPC分类号： B81B3/00 , H01L29/84 , H01L29/94 , H01L27/20 , G01P15/08 , G01P15/125 , H02N1/00 , G01C19/5719 , G01L1/14
CPC分类号： H02N1/008 , B81B3/0056 , B81B2201/033 , B81B2203/051 , G01C19/5719 , G01P15/0802 , G01P15/125

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