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    • 80. 发明公开
    • SILICA GLASS CRUCIBLE, PROCESS FOR PRODUCTION OF THE SAME, AND PULLING METHOD
    • QUARZGLASTIEGEL,VERFAHREN ZU SEINER HERSTELLUNG UNDZÜCHTUNGSVERFAHREN
    • EP2194166A1
    • 2010-06-09
    • EP08825826.4
    • 2008-09-29
    • Japan Super Quartz Corporation
    • KANDA, Minoru
    • C30B15/10C03B20/00
    • C03B19/095C30B15/10C30B35/002Y10T117/1024
    • A silica glass crucible including an outer surface layer formed of a bubble-containing silica glass layer and an inner surface layer formed of a silica glass layer whose bubbles are invisible to the naked eye, so as to sufficiently disperse heat from the external radiation thereby preventing temperature irregularity in the silicon melt, and at the same time, exhibit excellent heat conductivity thereby giving a uniformly heated state over a wide range in the entire crucible without taking a long time for increasing the temperature to form a silicon melt, wherein an intermediate layer is interposed between the outer surface layer and the inner surface layer while in the intermediate layer, a bubble-containing silica glass layer (bubble-containing layer) including bubbles with a diameter of 100 µm or smaller by 0.1 % or more in the volumetric bubble content and a silica glass layer (transparent glass layer) including the bubbles by 0.05% or less in the volumetric bubble content are laminated.
    • 一种二氧化硅玻璃坩埚,其包括由含气泡的石英玻璃层形成的外表面层和由石墨玻璃层形成的内表面层,所述内表面层的气泡对于肉眼不可见,从而充分地分散来自外部辐射的热量,从而防止 硅熔体中的温度不均匀性,并且同时显示出优异的导热性,从而在整个坩埚中在宽范围内均匀地加热状态,而不需要较长时间来提高温度以形成硅熔体,其中中间层 插入在外表面层和内表面层之间,而在中间层中,在容积泡中含有直径为100μm或更小直径为0.1%或更多的气泡的含气泡的二氧化硅玻璃层(含气泡层) 含有气泡含量的二氧化硅玻璃层(透明玻璃层)的体积气泡含量为0.05%以下 ated。