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    • 71. 发明授权
    • Lens for microscopic inspection
    • 镜片用于显微镜检查
    • US06362923B1
    • 2002-03-26
    • US09602920
    • 2000-06-23
    • Steve R. LangeDavid Shafer
    • Steve R. LangeDavid Shafer
    • G02B1514
    • G02B21/04G02B17/0808G02B17/0856G02B17/0892G02B21/0016G02B21/025
    • An optical system comprising three lens sections, a catadioptric objective lens section, a reimaging lens section and a zoom lens section, which are all aligned along the optical path of the optical system. The reimaging lens section re-images the system pupil such that the re-imaged pupil is accessible separately from any of the lens sections. The reimaging lens section includes an intermediate focus lens group, which is used to create an intermediate focus, a recollimating lens group, which is used to recollimate the light traveling from the intermediate focus lens group, refocusing group to generate the re-image of the pupil. The optical system may also include a beamsplitter, which creates a separated illumination pupil and collection pupil. The illumination pupil and the collection pupil may then be manipulated with an illumination aperture and a collection aperture, respectively, so that the optical system may operate in various test modes such as brightfield, ring darkfield, full-sky illumination, and laser darkfield with Fourier filtering capability. Another aspect of the invention pertains to a method for using the broad spectral region catadioptric optical system. The method includes the operations of directing radiation from a radiation source so that the radiation passes through the illumination pupil and the collection pupil of the optical system. The method also includes operations for configuring the illumination pupil and the collection pupil so that the optical system may operate in brightfield, ring darkfield, full-sky or laser darkfield illumination mode, with Fourier filtering capability.
    • 一种光学系统,包括三个透镜部分,反射折射物镜部分,再成像透镜部分和变焦透镜部分,它们都沿光学系统的光路对准。 重新成像的镜头部分重新成像系统光瞳,使得重新成像的光瞳可以与任何透镜部分分离地接近。 再成像透镜部分包括用于产生中间焦点的中间聚焦透镜组,用于重新聚焦从中间聚焦透镜组行进的光的再准焦透镜组,重聚焦组,以产生中间焦点的再图像 瞳孔。 光学系统还可以包括分束器,其产生分离的照明光瞳和收集光瞳。 然后可以分别用照明孔和收集孔来操纵照明光瞳和收集光瞳,使得光学系统可以在诸如亮场,环形暗场,全天空照明和具有傅立叶的激光暗场的各种测试模式中操作 过滤能力。 本发明的另一方面涉及一种使用宽光谱区反射折射光学系统的方法。 该方法包括从辐射源引导辐射的操作,使得辐射通过照明光瞳和光学系统的收集光瞳。 该方法还包括用于配置照明光瞳和收集光瞳的操作,使得光学系统可以在具有傅立叶滤波能力的明场,环形暗场,全天空或激光暗场照明模式下操作。