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    • 75. 发明授权
    • Thermal type flow rate sensor
    • 热式流量传感器
    • US08935959B2
    • 2015-01-20
    • US13638259
    • 2011-04-01
    • Ryo SatoKeiji Hanzawa
    • Ryo SatoKeiji Hanzawa
    • G01F1/68G01F1/692G01F1/696G01F25/00
    • G01F1/692G01F1/696G01F25/0007
    • To reduce a signal variation of a bridge circuit connected with a temperature sensing resistor that is caused by a strain even when the strain is generated at a diaphragm portion of a substrate installed with a heater resistor and the temperature sensing resistor. In a thermal type flow rate resistor including a substrate, a diaphragm 13 formed at the substrate, and a heat generating resistor 2 and temperature detecting resistors 7 through 10 formed on the diaphragm for detecting a flow rate of a measured fluid by heating the heat generating resistor, strain detecting resistors 11 and 12 are formed on an upstream side and on a downstream side of a flow of the measured fluid relative to the heat generating resistor on the diaphragm, an amount of a strain generated on the diaphragm is detected by the strain detecting resistors, and a flow rate signal detected by the heat generating resistor and the temperature detecting resistors is compensated for the strain based on the detected amount of the strain.
    • 即使当在安装有加热电阻器的基板的隔膜部分和温度感测电阻器上产生应变时,也可以减小由应变引起的与感温电阻器相连的桥接电路的信号变化。 在包括基板的热式流量电阻器,形成在基板上的隔膜13和形成在隔膜上的发热电阻器2和温度检测电阻器7至10,用于通过加热产生的热量来检测被测流体的流量 电阻器,应变检测电阻器11和12形成在测量流体相对于隔膜上的发热电阻器的流动的上游侧和下游侧,通过应变检测在隔膜上产生的应变量 检测电阻器和由发热电阻器和温度检测电阻器检测的流量信号基于检测到的应变量来补偿应变。
    • 76. 发明授权
    • Thermal flow sensor
    • 热流量传感器
    • US08627717B2
    • 2014-01-14
    • US13361372
    • 2012-01-30
    • Satoshi AsanoMasahiro MatsumotoHiroshi NakanoKeiji Hanzawa
    • Satoshi AsanoMasahiro MatsumotoHiroshi NakanoKeiji Hanzawa
    • G01F1/68
    • G01F1/6845G01F1/692G01F1/698
    • A thermal flow sensor includes a heater temperature controller that realizes stable startup characteristics and prevents degradation of a sensor element and can also accommodate a smaller heater. The sensor also includes a semiconductor substrate; a cavity portion provided in the semiconductor substrate; a dielectric film provided on the semiconductor substrate; a thin layer area formed as a result of the dielectric film covering the cavity portion; a heating resistor provided in the thin layer area on the dielectric film; a first temperature-sensitive resistor provided in the thin layer area on the dielectric film; a heating controller; a second temperature-sensitive resistor provided near the heating resistor; and a flow rate detector that detects a flow rate of a fluid on the basis of temperature of the second temperature-sensitive resistor. The heating controller controls the temperature of the heating resistor on the basis of first and second reference temperatures.
    • 热流传感器包括加热器温度控制器,其实现稳定的启动特性并防止传感器元件的劣化并且还可以容纳较小的加热器。 传感器还包括半导体衬底; 设置在所述半导体基板中的空腔部; 设置在所述半导体基板上的电介质膜; 作为覆盖空腔部分的电介质膜的结果而形成的薄层区域; 设置在电介质膜上的薄层区域中的加热电阻器; 设置在介电膜上的薄层区域中的第一温敏电阻器; 加热控制器 设置在加热电阻附近的第二温敏电阻器; 以及流量检测器,其基于第二温度敏感电阻器的温度来检测流体的流量。 加热控制器基于第一和第二参考温度来控制加热电阻器的温度。
    • 78. 发明授权
    • Thermal flow meter
    • 热流量计
    • US08336376B2
    • 2012-12-25
    • US12844429
    • 2010-07-27
    • Hiroshi NakanoMasahiro MatsumotoKeiji Hanzawa
    • Hiroshi NakanoMasahiro MatsumotoKeiji Hanzawa
    • G01F1/68
    • G01F1/6845G01F1/692G01F1/698G01F1/699
    • Provided is a heating temperature adjustment circuit in a thermal flow meter capable of adjusting fluctuations of a heating temperature of a heat-generating resistor due to fluctuations of resistances with high accuracy and low cost. The thermal flow meter comprises: a heat-generating resistor that generates heat when a current flows therethrough; a first temperature measuring resistor, a second resistor, a third resistor, and a fourth resistor whose resistance values vary due to temperature; and a fixed resistance having a resistance temperature coefficient lower than that of the first temperature measuring resistor, and measuring a flow rate of a fluid by controlling the heating temperature of the heat-generating resistor. The thermal flow meter includes: a first series circuit in which the fixed resistance, the first temperature measuring resistor, and the second resistor are connected to one another in series; and a second series circuit in which the third resistor and the fourth resistor are connected to each other in series, and generates a voltage to be added to the second series circuit based on voltages at both ends of the fixed resistance.
    • 提供一种热流量计中的加热温度调节电路,其能够以高精度和低成本由于电阻的波动而调节发热电阻器的加热温度的波动。 热流量计包括:当电流流过其中时产生热量的发热电阻器; 第一温度测量电阻器,第二电阻器,第三电阻器和电阻值由温度变化的第四电阻器; 以及电阻温度系数低于第一温度测量电阻器的固定电阻,并且通过控制发热电阻器的加热温度来测量流体的流量。 热流量计包括:第一串联电路,其中固定电阻,第一温度测量电阻器和第二电阻器串联连接; 以及第二串联电路,其中第三电阻器和第四电阻器串联连接,并且基于固定电阻两端的电压产生要添加到第二串联电路的电压。
    • 79. 发明申请
    • Sensor Structure
    • 传感器结构
    • US20120198943A1
    • 2012-08-09
    • US13368746
    • 2012-02-08
    • Takayuki SAITOKeiji HanzawaTakayuki Yogo
    • Takayuki SAITOKeiji HanzawaTakayuki Yogo
    • G01F1/34
    • G01L19/0007G01F1/684G01L23/24
    • A sensor structure is provided so that a dynamic pressure effect caused by airflow is avoided as much as possible even when a mass airflow measurement device is integrated with a pressure measurement device, thereby preventing contaminated substances, water droplets, or the like from arriving at a pressure measurement part. In the sensor structure, the mass airflow measurement device is inserted into a sensor insertion port provided in an intake air tube component including an intake air tube and is fixed to the intake air tube, and a pressure measurement device is mounted in a housing structural component of the mass airflow measurement device for measuring the pressure. The pressure measurement device and the inside of the intake air tube are connected by a pressure intake port provided in the housing structural component.
    • 提供了一种传感器结构,即使当质量气流测量装置与压力测量装置集成在一起时也尽可能地避免由气流引起的动态压力效应,从而防止污染物质,水滴等到达 压力测量部件。 在传感器结构中,将质量气流测量装置插入设置在包括进气管的进气管部件中的传感器插入口中,并固定在进气管上,并且将压力测量装置安装在壳体结构部件 用于测量压力的质量气流测量装置。 压力测量装置和进气管的内部通过设置在壳体结构部件中的压力吸入口连接。
    • 80. 发明授权
    • Air flow meter
    • 空气流量计
    • US07992435B2
    • 2011-08-09
    • US12512512
    • 2009-07-30
    • Rintaro MinamitaniKeiji HanzawaAkio Yasukawa
    • Rintaro MinamitaniKeiji HanzawaAkio Yasukawa
    • G01F1/68
    • G01F1/6845
    • In a structure in which peripheral part of a diaphragm section of an electrical insulating film is covered with a protective film made of an organic material, the resistor wire on the diaphragm section crosses the peripheral part of the diaphragm section. At a place where a narrow wire of a resistance temperature detector and the like crosses the peripheral part of the diaphragm section, the protective film is thinner than the other part, and the dust impact resistance is reduced. At a place where a heating resistor wire connected to a heating resistor body or resistance temperature detector wires connected to resistance temperature detector bodies cross a periphery of the diaphragm section, a film component protruding from an electrical insulating film is arranged side by side with the heating resistor wire or the resistance temperature detector wires.
    • 在电绝缘膜的隔膜部分的周边部分被有机材料制成的保护膜覆盖的结构中,隔膜部分上的电阻器线与隔膜部分的周边部分交叉。 在电阻温度检测器等的细线与隔膜部的周边部分交叉的地方,保护膜比其他部分薄,防尘性降低。 在与加热电阻体连接的加热电阻线或与电阻温度检测体相连的电阻温度检测器线与隔膜部分的周边交叉的位置处,从电绝缘膜突出的膜部件并排配置, 电阻丝或电阻温度检测器线。