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    • 79. 发明授权
    • Conveyance system
    • 运输系统
    • US07278812B2
    • 2007-10-09
    • US11045787
    • 2005-01-28
    • Takumi MizokawaMakoto OmoriYuzo TakakadoHitoshi Kawano
    • Takumi MizokawaMakoto OmoriYuzo TakakadoHitoshi Kawano
    • B65G49/07
    • H01L21/67173H01L21/67259H01L21/67727H01L21/67736
    • A wafer conveyance system is described for transporting one or more wafers that undergo, while being transported, different processes at a plurality of wafer processing apparatuses inside which one or more wares are processed. A hermetically closed chamber is provided that defines an isolated environment inside which a controlled atmosphere. At least one guide path is provided inside the hermetically closed chamber. At least one mobile element is movable inside the hermetically closed chamber along the at least one guide path to transport one or more wafers from one wafer processing apparatus to another. A plurality of position sensors that detect positions of the at least one mobile element are deployed along each of the at least one guide path in such a manner that they are deployed at intervals close together when near the wafer processing apparatuses and deployed at wider intervals elsewhere. In another aspect, the guide rails may be constructed of a plurality of connectable rail units. Because the guide rail can be disconnected and/or connected between rail units having position sensors, rearrangement and/or reattachment of the plurality of position sensors is not necessary when changing a configuration and/or extending the layout of the guide rail.
    • 描述了一种晶片传送系统,用于传输在被处理一个或多个晶片的多个晶片处理设备中经历同时进行不同处理的一个或多个晶片。 提供了一个密封的腔室,其限定了一个隔离的环境,其中受控气氛。 至少一个引导路径设置在气密封闭的室内。 至少一个移动元件可以沿着至少一个引导路径在气密封闭的腔室内移动,以将一个或多个晶片从一个晶片处理设备传送到另一个。 检测至少一个移动元件的位置的多个位置传感器沿着至少一个引导路径中的每一个被展开,使得它们在靠近晶片处理设备并以更宽的间隔在其他地方展开 。 在另一方面,导轨可以由多个可连接的轨道单元构成。 由于导轨可以在具有位置传感器的轨道单元之间断开和/或连接,所以在改变构造和/或延伸导轨的布局时,不需要多个位置传感器的重排和/或重新附接。