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    • 73. 发明申请
    • METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER MOLD WITH HIGH BIT-ASPECT-RATIO FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS
    • 使用块状共聚物制备具有高比特比例的主模的纳米压印图形磁记录盘的方法
    • US20120111827A1
    • 2012-05-10
    • US13351385
    • 2012-01-17
    • Thomas R. AlbrechtRicardo Ruiz
    • Thomas R. AlbrechtRicardo Ruiz
    • B05D3/10B05D5/12
    • G11B5/855
    • The invention is a method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks. The method uses conventional optical or e-beam lithography to form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines of alternating block copolymer components. The radial lines of one of the components are removed and the radial lines of the remaining component are used as an etch mask to etch the substrate. Conventional lithography is used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands.
    • 本发明是用于制造用于纳米压印图案化介质磁记录盘的母模的方法。 该方法使用常规光学或电子束光刻在基底上形成大致径向条纹的图案,其中条纹被分组成环形区域或条带。 嵌段共聚物材料沉积在图案上,导致嵌段共聚物引导自组装成其组分,以将大致径向的条带乘以交替的嵌段共聚物组分的大致径向线。 除去其中一个部件的径向线,并且将其余部件的径向线用作蚀刻掩模以蚀刻基板。 常规光刻用于在大致径向线上形成同心环。 在蚀刻和抗蚀剂去除之后,主模具有布置成圆形环的柱,其中环被分组成环形带。
    • 74. 发明申请
    • METHOD FOR MAKING A MASTER DISK FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS
    • 用于制作用于印制图形磁记录盘的主磁盘的方法
    • US20110226737A1
    • 2011-09-22
    • US13151981
    • 2011-06-02
    • Thomas R. Albrecht
    • Thomas R. Albrecht
    • C23F1/00B28B7/38
    • G11B5/855B82Y10/00G11B5/743G11B5/82
    • A method for making a master disk to be used for nanoimprinting patterned-media magnetic recording disks uses sidewall lithography. In one implementation, the master disk substrate has a first pattern of concentric rings formed on it by sidewall lithography, followed by a second pattern of generally radially-directed pairs of parallel lines, also formed by sidewall lithography, with the pairs of parallel lines intersecting the rings. An etching process is then performed, using the upper pattern as an etch mask, to remove unprotected portions of the underlying concentric rings. This leaves a pattern of pillars on the substrate, which then serve as an etch mask for an etching process that etches unprotected portions of the master disk substrate. The resulting master disk then has pillars of substrate material arranged in a pattern of concentric rings and generally radially-directed pairs of parallel lines.
    • 用于制造用于纳米压印图案化介质磁记录盘的母盘的方法使用侧壁光刻。 在一个实施方案中,母盘基板具有通过侧壁光刻在其上形成的同心环的第一图案,随后是也通过侧壁光刻形成的大体上径向指向的一对平行线的第二图案,并且所述平行线对相交 戒指。 然后使用上部图案作为蚀刻掩模进行蚀刻工艺,以去除下面的同心环的未受保护的部分。 这在衬底上留下了柱状图案,其然后用作用于蚀刻母盘衬底的未受保护部分的蚀刻工艺的蚀刻掩模。 所得到的母盘然后具有以同心环和大体上径向指向的平行线对图案布置的基底材料柱。
    • 79. 发明授权
    • Magnetic recording disk with patterned nondata islands of alternating polarity
    • 具有交替极性的图案化非磁性岛的磁记录盘
    • US07771852B2
    • 2010-08-10
    • US11148918
    • 2005-06-09
    • Thomas R. AlbrechtZvonimir Bandic
    • Thomas R. AlbrechtZvonimir Bandic
    • G11B5/66
    • B82Y10/00G11B5/1278G11B5/59655G11B5/743G11B5/855
    • A magnetic recording disk has patterned nondata regions that are used for read/write head positioning and data synchronization. The nondata regions contain nondata islands of magnetizable material separated by nonmagnetic spaces with the nondata islands having alternating magnetization polarity in the along-the-track direction. In each nondata region, every other nondata island in the along-the track direction has the same magnetization direction, with adjacent nondata islands having antiparallel magnetization directions. The disk may be either a horizontal magnetic recording disk, wherein the antiparallel magnetization directions are in the plane of the recording layer and parallel to the along-the-track direction, or a perpendicular magnetic recording disk, wherein the antiparallel the magnetization directions are “into” and “out of” the recording layer.
    • 磁记录盘具有用于读/写头定位和数据同步的非图形区域。 非磁性区域包含由非磁性空间分离的可磁化材料的非磁性岛,其中沿着磁道方向具有交变磁化极性的非磁性岛。 在每个非数据区域中,沿轨道方向的每隔一个非数据岛具有相同的磁化方向,相邻的非数据岛具有反平行的磁化方向。 盘可以是水平磁记录盘,其中反平行磁化方向在记录层的平面中并且平行于轨道方向,或垂直磁记录盘,其中反并联的磁化方向为“ 进入“和”离开“记录层。
    • 80. 发明授权
    • Method for making a master disk for nanoimprinting patterned magnetic recording disks, master disk made by the method, and disk imprinted by the master disk
    • 用于制造用于纳米压印图案化磁记录盘的母盘的方法,由该方法制造的母盘和由主盘印制的盘
    • US07758981B2
    • 2010-07-20
    • US11782664
    • 2007-07-25
    • Thomas R. Albrecht
    • Thomas R. Albrecht
    • G11B5/66
    • G11B5/855B82Y10/00G11B5/743G11B5/82
    • A method for making a master disk to be used for nanoimprinting patterned-media magnetic recording disks uses sidewall lithography. In one implementation, the master disk substrate has a first pattern of concentric rings formed on it by sidewall lithography, followed by a second pattern of generally radially-directed pairs of parallel lines, also formed by sidewall lithography, with the pairs of parallel lines intersecting the rings. An etching process is then performed, using the upper pattern as an etch mask, to remove unprotected portions of the underlying concentric rings. This leaves a pattern of pillars on the substrate, which then serve as an etch mask for an etching process that etches unprotected portions of the master disk substrate. The resulting master disk then has pillars of substrate material arranged in a pattern of concentric rings and generally radially-directed pairs of parallel lines.
    • 用于制造用于纳米压印图案化介质磁记录盘的母盘的方法使用侧壁光刻。 在一个实施方案中,母盘基板具有通过侧壁光刻在其上形成的同心环的第一图案,随后是也通过侧壁光刻形成的大致径向定向的一对平行线的第二图案,并且所述平行线对相交 戒指。 然后使用上部图案作为蚀刻掩模进行蚀刻工艺,以去除下面的同心环的未受保护的部分。 这在衬底上留下了柱状图案,其然后用作用于蚀刻母盘衬底的未受保护部分的蚀刻工艺的蚀刻掩模。 所得到的母盘然后具有以同心环和大体上径向指向的平行线对图案布置的基底材料柱。