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    • 71. 发明申请
    • Method of processing solid surface with gas cluster ion beam
    • 用气体簇离子束处理固体表面的方法
    • US20090305507A1
    • 2009-12-10
    • US12312266
    • 2007-10-30
    • Akiko SuzukiAkinobu SatoEmmanuel BourelleJiro MatsuoToshio Seki
    • Akiko SuzukiAkinobu SatoEmmanuel BourelleJiro MatsuoToshio Seki
    • H01L21/308H01L21/302
    • H01L21/3083H01J2237/0812H01L21/3065
    • A solid surface is processed while corner portions of a relief structure are protected from deformation. A method of processing a solid surface with a gas cluster ion beam includes a cluster protection layer formation step of forming, on the solid surface, a relief structure having protrusions with a cluster protection layer formed to cover an upper part thereof and recesses without the cluster protection layer; an irradiation step of emitting a gas cluster ion beam onto the solid surface having the relief structure formed in the cluster protection layer formation step; and a removal step of removing the cluster protection layer. A thickness T of the cluster protection layer satisfies T > nY + ( b 2  Y 2  n - nY 2  ( b 4 - 16  a 2 ) 1 2 2 ) 1 2 , where n is a dose of the gas cluster ion beam, and Y is an etching efficiency of the cluster protection layer, expressed as an etching volume per cluster (a and b are constants).
    • 处理浮雕结构的角部以防止变形的实心表面。 用气体簇离子束处理固体表面的方法包括:簇保护层形成步骤,在固体表面上形成具有突起的浮雕结构,所述突起具有形成为覆盖其上部的簇保护层和没有簇的凹部 保护层; 在所述簇保护层形成工序中形成有具有所述浮雕结构的固体表面上的气体簇离子束的照射工序; 以及去除簇保护层的去除步骤。 簇保护层的厚度T满足T> nY +(b 2 y 2 n n n 2(b 4 - 16 a a 2)1 2 2)1 2,其中n是气体簇的剂量 离子束,Y是簇保护层的蚀刻效率,表示为每簇的蚀刻体积(a和b是常数)。
    • 73. 发明申请
    • Photonic structure
    • 光子结构
    • US20080205842A1
    • 2008-08-28
    • US12072360
    • 2008-02-25
    • Akiko SuzukiAkinobu Sato
    • Akiko SuzukiAkinobu Sato
    • G02B6/10
    • G02B6/1225B82Y20/00
    • A photonic structure has rods arranged with periodicity which is of a non-translational symmetry and defined in a polar coordinate system, which uses a distance in a radial direction and an angle in a circumferential direction, and has a center of the polar coordinate system used as a reference. A heterointerface is provided between adjoining areas of the plurality of areas. The positions of the centers of the polar coordinate systems of the plurality of areas are different. Lines of rods are smoothly connected between adjoining areas of the plurality of areas at the heterointerfaces. Rods are removed in a spiral shape or in a curve whose radius of curvature changes, to form an optical waveguide in the spiral shape or in the curve.
    • 光子结构具有布置成周期性的棒,其具有非平移对称性并且在极坐标系中限定,该极坐标系使用径向方向上的距离和圆周方向上的角度,并且具有使用的极坐标系的中心 作为参考。 在多个区域的相邻区域之间提供异相。 多个区域的极坐标系的中心位置是不同的。 杆的线条在异质界面处的多个区域的相邻区域之间平滑地连接。 杆以螺旋形状或曲率半径变化的曲线移除,形成螺旋状或曲线状的光波导。
    • 75. 发明授权
    • Optical sensor and method of manufacturing the same
    • 光学传感器及其制造方法
    • US07187050B2
    • 2007-03-06
    • US10959641
    • 2004-10-05
    • Akiko SuzukiAkinobu Sato
    • Akiko SuzukiAkinobu Sato
    • H01L29/72
    • H01L31/02327
    • A cubic element of photonic crystal is integrally formed on the surface of a photo-detection element, and a portion of the photonic crystal cubic element is irradiated with ultraviolet rays thereby to change the refractive index of the portion of the cubic element that has been irradiated with ultraviolet rays. Alternatively, by causing globular particles having different refractive indices to eject on the surface of the photo-detection element from an ink-jet apparatus having a nozzle provided with a temperature control part by controlling temperature of the nozzle to form a laminate of globular particle layers having different refractive indices, a photonic crystal lens is integrally formed on the surface of the photo-detection element.
    • 在光检测元件的表面上一体地形成光子晶体的立方体元件,并且用紫外线照射一部分光子晶体立方体元件,从而改变被照射的立方体元件的部分的折射率 用紫外线。 或者,通过使具有不同折射率的球状颗粒从具有设置有温度控制部件的喷嘴的喷墨装置喷射到光检测元件的表面上,通过控制喷嘴的温度来形成球状颗粒层 具有不同的折射率,光子晶体透镜一体地形成在光检测元件的表面上。
    • 76. 发明申请
    • Optical connector, optical coupling method and optical element
    • 光连接器,光耦合方式及光学元件
    • US20060204173A1
    • 2006-09-14
    • US11369356
    • 2006-03-06
    • Akiko SuzukiAkinobu SatoEmmanuel Bourelle
    • Akiko SuzukiAkinobu SatoEmmanuel Bourelle
    • G02B6/26
    • G02B6/1225B82Y20/00G02B6/30
    • An optical connector used for inputting light to an optical element from an external optical system or outputting light from an optical element to an external optical system includes a photonic crystal having a periodic refractive index structure, and an optical waveguide to be optically coupled to the optical element and a region in which a plurality of defects are formed at intervals equal to or less than four times the refractive index period a of the photonic crystal are formed in the photonic crystal. The region has a size equal to or greater than the wavelength of the light input from the external optical system or the wavelength of the light output to the external optical system, and the external optical system and the optical waveguide are optically coupled to each other via the region. The optical connector has an improved optical coupling efficiency, can achieve optical coupling of a plurality of light components of different wavelengths, and can readily achieve alignment.
    • 用于从外部光学系统向光学元件输入光或将光从光学元件输出到外部光学系统的光学连接器包括具有周期性折射率结构的光子晶体和光学耦合到光学 元素和在光子晶体中形成等于或小于光子晶体的折射率周期a的四倍的间隔形成多个缺陷的区域。 该区域具有等于或大于从外部光学系统输入的光的波长或输出到外部光学系统的光的波长的大小,并且外部光学系统和光学波导通过彼此经由 该区域。 光连接器具有改进的光耦合效率,可以实现多个不同波长的光分量的光耦合,并且可以容易地实现对准。