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    • 71. 发明授权
    • Pressure sensor
    • 压力传感器
    • US4939497A
    • 1990-07-03
    • US339826
    • 1989-04-18
    • Minoru NishidaYosiyasu AndoTadashi HattoriYouiti Kotanishi
    • Minoru NishidaYosiyasu AndoTadashi HattoriYouiti Kotanishi
    • G01L9/00
    • G01L19/147
    • The pressure sensor has a housing, a sensing body mounted inside an internal space of the housing and having a cavity, one end thereof being open and other end thereof being closed, to form a pressure introducing portion therein, the closed end thereof having a thin thickness forming a diaphragm for receiving a pressure, and a semiconductor chip mounted on one surface of the closed end opposite to the diaphragm for receiving a pressure. The pressure sensor is characterized in that the sensing body is attenuated at a portion including at least the closed end thereof and has a diameter smaller than that of the remaining portion thereof, and a shoulder is provided therebetween, whereby the sensing body is fixedly connected to the internal space of said housing by abutting the shoulder thereof against a stopper portion provided in the internal space of the housing and the external surface thereof is placed in contact with the inner surface of the internal space of the housing. The pressure sensor having the above construction is highly sensitive and can accurately measure a pressure of a high pressure fluid, as the sensing body is firmly fixed to the inner surface of the housing and has a simple construction.
    • 压力传感器具有壳体,安装在壳体的内部空间内的感测体,具有空腔,其一端开口,另一端封闭,在其内形成压力导入部,其封闭端部具有薄 形成用于接收压力的膜片的厚度,以及安装在与膜片相对的封闭端的一个表面上以接收压力的半导体芯片。 压力传感器的特征在于,感测体在至少包括其封闭端的部分被衰减并且具有比其余部分小的直径,并且在其间设置有肩部,由此感测体固定地连接到 所述壳体的内部空间通过将其肩部抵靠设置在壳体的内部空间中的止动部分及其外表面而与壳体的内部空间的内表面接触。 具有上述结构的压力传感器是高灵敏度的,并且可以精确地测量高压流体的压力,因为感测体牢固地固定在壳体的内表面上并具有简单的结构。