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71. 发明授权

US08308440B2 Vacuum processing apparatus, method of controlling vacuum processing apparatus, device manufacturing method, and storage medium 有权
标题翻译：真空处理装置，真空处理装置的控制方法，装置的制造方法以及存储介质
公开(公告)号：US08308440B2
公开(公告)日：2012-11-13
申请号：US12403659
申请日：2009-03-13
申请人： Yasuyuki Shirai
发明人： Yasuyuki Shirai
IPC分类号： F04B49/00
CPC分类号： F16K51/02 , F16K31/122 , H01L21/67126 , Y10T137/85986 , Y10T137/8601 , Y10T137/86035 , Y10T137/86083
摘要： A vacuum processing apparatus having a vacuum chamber includes a gate valve arranged in the vacuum chamber and including a valve body which moves in a direction relative to an exhaust port of the vacuum chamber to open/close the exhaust port, and a driving unit configured to move the valve body, a connecting portion having one end connected to the exhaust port of the vacuum chamber and formed in a direction inclined from a moving direction of the valve body, and an exhaust pump connected to an opposite end of the connecting portion and capable of evacuating an interior of the connecting portion. The driving unit includes (i) a rod serving as a driving shaft which drives the valve body in a direction to close the exhaust port or a direction to open the exhaust port, and (ii) a cylinder driving the rod, and the rod extends parallel to a moving direction of the valve body and supports the valve body at one end. In addition, the connecting portion is connected to the exhaust port of the vacuum chamber in a direction inclined at a predetermined angle from an axial direction of the rod, and the cylinder is arranged outside the connecting portion and connected to an opposite end of the rod.
摘要翻译：具有真空室的真空处理装置包括设置在真空室中的闸阀，该闸阀具有相对于真空室排气口的方向移动以打开/关闭排气口的阀体，以及驱动单元，移动阀体，连接部分的一端连接到真空室的排气口，并沿从阀体的移动方向倾斜的方向形成;以及排气泵，其连接到连接部分的相对端，并且能够抽出连接部分的内部。驱动单元包括（i）用作驱动轴的杆，其驱动阀体沿关闭排气口的方向或打开排气口的方向，以及（ii）驱动杆的缸体，杆延伸平行于阀体的移动方向并在一端支撑阀体。此外，连接部分沿着从杆的轴向以预定角度倾斜的方向连接到真空室的排气口，并且气缸布置在连接部分的外部并且连接到杆的相对端。

72. 发明授权

US08252118B2 Substrate support device and plasma processing apparatus 有权
标题翻译：基板支撑装置和等离子体处理装置
公开(公告)号：US08252118B2
公开(公告)日：2012-08-28
申请号：US12423235
申请日：2009-04-14
申请人： Yohsuke Shibuya , Yasuyuki Shirai , Hirofumi Asanuma , Junji Nakamura
发明人： Yohsuke Shibuya , Yasuyuki Shirai , Hirofumi Asanuma , Junji Nakamura
IPC分类号： H01L21/306 , C23C16/44
CPC分类号： C23C14/50 , C23C14/541 , H01L21/67103 , H01L21/67109 , Y10T279/23
摘要： There is provided a substrate support device capable of preventing powder dust from being produced. A thermoconductive intermediate member is interposed between a base table and a substrate support table and has a communication aperture path for communicating the aperture path of the base table with the aperture path of the substrate support table. An elastic member such as bellows tube is disposed in the communication aperture path of the thermoconductive intermediate member, for insulating the thermoconductive intermediate member from the inert gas which flows through the communication aperture path.
摘要翻译：提供了能够防止粉尘产生的基板支撑装置。导热中间构件插入在基台和基板支撑台之间，并且具有用于使基台的孔径路径与基板支撑台的孔径连通的连通孔径路径。诸如波纹管的弹性构件设置在导热中间构件的连通孔径路径中，用于使导热中间构件与流过连通孔径的惰性气体绝缘。

73. 发明申请

US20060085281A1 Online shopping system and method 审中-公开
标题翻译：在线购物系统和方法
公开(公告)号：US20060085281A1
公开(公告)日：2006-04-20
申请号：US11250366
申请日：2005-10-17
申请人： Atsushi Hanai , Masayuki Nishimoto , Fusakichi Ohkouchi , Tsukasa Fukudome , Tatsuto Torikai , Hiroshi Hosoda , Yasuyuki Shirai , Eiji Shinohara , Akihiro Nishida , Sachiko Misumi , Takuya Higashimae , Yoshiaki Ohno , Keisuke Kataoka , Shizuo Kamimura
发明人： Atsushi Hanai , Masayuki Nishimoto , Fusakichi Ohkouchi , Tsukasa Fukudome , Tatsuto Torikai , Hiroshi Hosoda , Yasuyuki Shirai , Eiji Shinohara , Akihiro Nishida , Sachiko Misumi , Takuya Higashimae , Yoshiaki Ohno , Keisuke Kataoka , Shizuo Kamimura
IPC分类号： G06Q30/00
CPC分类号： G06Q30/0601 , G06Q30/02 , G06Q30/0631 , G06Q30/0641
摘要： There is provided a network shopping system that contributes to the omission of the item to be purchased and the prevention of purchasing an unnecessary item. Information of equipment that each client possesses is stored in net member DB. A main item, an option, or an item having a tendency to be used at the same time, are associated with an item related thereto and stored in related item DB. When a user inputs individual identification information for authentication processing, the system searches net member DB to specify equipment that the user possesses. Next, the system gains access to related item DB, searches a related item, and recommends the item to the user.
摘要翻译：提供了一种有助于省略要购买的物品的网络购物系统，并且防止购买不必要的物品。每个客户拥有的设备信息存储在网络成员DB中。主要项目，选项或具有同时使用倾向的项目与与之相关的项目相关联并存储在相关项目DB中。当用户输入用于认证处理的个人识别信息时，系统搜索网络成员DB以指定用户拥有的设备。接下来，系统访问相关项目DB，搜索相关项目，并向用户推荐该项目。

74. 发明授权

US06178465B1 Image processors for reading and outputting data 失效
标题翻译：用于读取和输出数据的图像处理器
公开(公告)号：US06178465B1
公开(公告)日：2001-01-23
申请号：US08894607
申请日：1997-08-06
申请人： Yasuyuki Shirai , Chiharu Wakabayashi
发明人： Yasuyuki Shirai , Chiharu Wakabayashi
IPC分类号： G06F300
CPC分类号： G06T1/20 , G06T11/60 , Y10S707/99945 , Y10S707/99948
摘要： An image processor which reads and outputs image data. Only by inputting a keyword which causes us to associate an image intuitively, the image processor produces and outputs an image based on a plurality of image data combined on the basis of the input keyword. To this end, an illustration part keyword table contains a plurality of keywords and a plurality of illustration part codes for each keyword. A part arrangement table contains a plurality of image pointer values and their arrangement information in correspondence to illustration part codes. A CPU searches the illustration part keyword table and part arrangement table for a match of the input keyword and reads a plurality of illustration image data corresponding to the keyword from an illustration part image file and arranges the respective illustration images in accordance with the corresponding arrangement information.
摘要翻译：一种读取和输出图像数据的图像处理器。仅通过输入使我们直观地关联图像的关键字，图像处理器基于基于输入的关键字组合的多个图像数据来产生和输出图像。为此，图示部分关键字表包含关于每个关键字的多个关键字和多个插图部分代码。部件布置表包含与图示部件代码对应的多个图像指针值及其布置信息。 CPU在图示部分关键词表和部分排列表中搜索输入关键字的匹配，并且从图示部分图像文件中读取与该关键词对应的多个插图图像数据，并根据相应的排列信息排列各自的图示图像。

75. 发明授权

US08505399B2 Electric actuator 有权
标题翻译：电动执行器
公开(公告)号：US08505399B2
公开(公告)日：2013-08-13
申请号：US12643228
申请日：2009-12-21
申请人： Masanori Hirai , Yasuyuki Shirai , Tsunehisa Nomura , Koji Itoh
发明人： Masanori Hirai , Yasuyuki Shirai , Tsunehisa Nomura , Koji Itoh
IPC分类号： F16H25/22
CPC分类号： H02K7/06 , B64C25/24 , F16H25/2015 , F16H2025/2075 , H02K7/10 , Y10T74/18168 , Y10T74/18656
摘要： An object of the present invention is to provide an electric actuator having a structure capable of reducing an external force or impact acting on a screw shaft when a piston rod is at a stretched position. An electric actuator includes a nut, a piston rod, recesses, keys, holes, and a tapered portion. Into the nut, a screw shaft is screwed. The piston rod moves linearly via the nut. The recesses are formed on an outer circumferential surface of the nut. The keys are each provided to a recess. The tapered portion is formed on an inner wall of the cylinder body. The piston rod advances to move the keys outward to cause the keys to fit to the tapered portion to block retraction of the piston rod.
摘要翻译：本发明的一个目的是提供一种电致动器，其具有当活塞杆处于拉伸位置时能够减小作用在螺杆轴上的外力或冲击的结构。电致动器包括螺母，活塞杆，凹槽，键，孔和锥形部分。螺母拧入螺丝轴。活塞杆通过螺母线性移动。凹部形成在螺母的外周面上。钥匙分别设置在凹槽中。锥形部分形成在缸体的内壁上。活塞杆向前移动以使键向外移动，以使键适配于锥形部分以阻止活塞杆的缩回。

76. 发明申请

US20120187798A1 THREE-PHASE DC MOTOR 有权
标题翻译：三相直流电动机
公开(公告)号：US20120187798A1
公开(公告)日：2012-07-26
申请号：US13352700
申请日：2012-01-18
申请人： Yasuyuki Shirai
发明人： Yasuyuki Shirai
IPC分类号： H02K1/16
CPC分类号： H02K1/165 , H02K7/06 , H02K21/14
摘要： A three-phase DC motor includes a rotor 30 having poles 30a and a stator 28 having core units 32b arranged around the rotor 30. Three or more coils are wound around the core units 32b. An outer surface of the rotor 30 has alternating poles of N and S around the circumference of the rotor 30. The coils 35a, 35b, 35c, and 35d are placed only within a range defined by second virtual planes P2 specified respectively by rotating a first virtual plane P1 according to a predetermined angle in a rotor rotating direction and a direction opposite thereto. The first virtual plane P1 passes through the axial center of the rotor 30. The inner surface of the adjacent 3N (N=1, 2, 3, . . . ) number of core units 32b are delimited within a width of one pole on the outer surface of the rotor 30.
摘要翻译：三相直流电动机包括具有极数30a的转子30和具有围绕转子30配置的铁心单元32b的定子28.三个或更多个线圈缠绕在铁心单元32b周围。转子30的外表面在转子30的周围具有N和S的交变极。线圈35a，35b，35c和35d仅在由第二虚拟平面P2限定的范围内，第二虚拟平面P2分别通过旋转第一虚拟平面P1根据转子旋转方向上的预定角度和与其相反的方向。第一虚拟平面P1穿过转子30的轴向中心。相邻的3N（N = 1,2,3，...）数量的芯单元32b的内表面在一个极的宽度上限定在转子30的外表面。

77. 发明申请

US20090229688A1 VACUUM PROCESSING APPARATUS, METHOD OF CONTROLLING VACUUM PROCESSING APPARATUS, DEVICE MANUFACTURING METHOD, AND STORAGE MEDIUM 有权
标题翻译：真空加工设备，真空加工设备的控制方法，设备制造方法和存储介质
公开(公告)号：US20090229688A1
公开(公告)日：2009-09-17
申请号：US12403659
申请日：2009-03-13
申请人： Yasuyuki Shirai
发明人： Yasuyuki Shirai
IPC分类号： F16K3/00
CPC分类号： F16K51/02 , F16K31/122 , H01L21/67126 , Y10T137/85986 , Y10T137/8601 , Y10T137/86035 , Y10T137/86083
摘要： A space necessary to install an exhaust pump and a driving portion for a gate valve is reduced to make an entire apparatus compact. A vacuum processing apparatus includes a vacuum chamber, an exhaust pump communicating with the exhaust port of the vacuum chamber, and a gate valve having a valve body which moves in a direction to come close to and separate from the exhaust port and opens/closes the exhaust port. The vacuum chamber is provided with a connecting portion extending from the exhaust port in a direction inclined from the moving direction of the valve body. The connecting portion is connected to the exhaust pump. The gate valve includes the valve body arranged in the vacuum chamber, and a driving portion having a rod which extends in the moving direction of the valve body and drives the valve body. The driving portion is arranged outside the connecting portion.
摘要翻译：减少了安装排气泵和用于闸阀的驱动部分所需的空间，使整个设备紧凑。真空处理装置包括真空室，与真空室的排气口连通的排气泵，以及具有阀体的闸阀，该阀体沿着与排气口接近并分离的方向移动并打开/关闭排气口。真空室设置有从排气口沿从阀体的移动方向倾斜的方向延伸的连接部分。连接部分连接到排气泵。闸阀包括布置在真空室中的阀体和具有杆的驱动部分，该杆在阀体的移动方向上延伸并驱动阀体。驱动部配置在连接部的外侧。

78. 发明授权

US4747928A Substrate processing apparatus including wafer transporting and substrate cooling mechanisms 失效
标题翻译：基板处理装置，包括晶片输送和基板冷却机构
公开(公告)号：US4747928A
公开(公告)日：1988-05-31
申请号：US894146
申请日：1986-08-07
申请人： Nobuyuki Takahashi , Ryuji Sugimoto , Yasuyuki Shirai
发明人： Nobuyuki Takahashi , Ryuji Sugimoto , Yasuyuki Shirai
IPC分类号： H01L21/205 , C23C14/54 , C23C14/56 , H01L21/00 , H01L21/285 , H01L21/31 , C23C14/34 , B65G29/00
CPC分类号： H01L21/67207 , C23C14/541 , C23C14/56 , H01L21/67109 , Y10S414/135 , Y10S414/136 , Y10S414/139
摘要： In a substrate processing apparatus, a substrate is processed to form a thin film thereon while it is maintained in the vertical direction, Furthermore, the rear surface of the substrate is cooled by a substrate cooling mechanism which contacts the rear surface thereof. The substrate cooling mechanism moves in a reciprocating fashion, whereas a substrate holder for holding the substrate moves both in horizontal and vertical directions.
摘要翻译：在基板处理装置中，在保持基板的上下方向的状态下，对基板进行处理，形成薄膜。此外，基板的后表面被与其后表面接触的基板冷却机构冷却。衬底冷却机构以往复方式移动，而用于保持衬底的衬底保持器在水平和垂直方向上都移动。

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