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    • 72. 发明申请
    • MIXED GAS SUPPLY APPARATUS
    • 混合气体供应装置
    • US20130025718A1
    • 2013-01-31
    • US13520824
    • 2010-10-22
    • Masaaki NagaseRyousuke DohiKouji NishinoNobukazu Ikeda
    • Masaaki NagaseRyousuke DohiKouji NishinoNobukazu Ikeda
    • F17D1/00
    • B01J4/02G05D11/132H01L21/67017Y10T137/87249
    • A mixed gas supply device includes a plurality of gas supply lines arranged in parallel that include flow rate control devices and outlet side switching valves, wherein gas outlets of respective outlet side switching valves communicate with a manifold, and another gas supply line at a position close to a mixed gas outlet of the manifold supplies a low flow rate gas, wherein an outlet side of the flow rate control device and an inlet side of the outlet side switching valve are hermetically connected via an outlet side connecting fitting of the flow rate control device and a mounting table having a gas passage, wherein a small hole portion is provided at a part of a flow passage at the outlet side connecting fitting and/or a flow passage, which makes the outlet side switching valve and a mixed gas flow passage in the manifold communicate with one another.
    • 混合气体供给装置包括并列布置的多个气体供给管线,包括流量控制装置和出口侧切换阀,其中各个出口侧切换阀的气体出口与歧管连通,另一个气体供给管线位于关闭位置 到歧管的混合气体出口供给低流量气体,其中流量控制装置的出口侧和出口侧切换阀的入口侧经由流量控制装置的出口侧连接配件气密地连接 以及具有气体通道的安装台,其中在出口侧连接配件和/或流路的流路的一部分处设置有小孔部,其使出口侧切换阀和混合气体流路成为 歧管彼此通信。
    • 74. 发明授权
    • Pressure type flow rate control device
    • 压力式流量控制装置
    • US09574917B2
    • 2017-02-21
    • US13483328
    • 2012-05-30
    • Atsushi HidakaMasaaki NagaseRyousuke DohiNobukazu IkedaKouji Nishino
    • Atsushi HidakaMasaaki NagaseRyousuke DohiNobukazu IkedaKouji Nishino
    • G05D7/06G01F1/36G01F15/02
    • G01F1/363G01F15/024G05D7/0635Y10T137/7737Y10T137/776Y10T137/7761
    • A pressure type flow rate control device provides flow rate control for gas at 100-500° C. with an error not more than 1.0% F.S. The pressure type flow rate control device includes a valve body with a fluid passage, a valve portion interposed in the passage, a valve drive unit driving the valve portion to open/close the passage, a restriction mechanism on the downstream side of the valve portion in the passage, a temperature detector detecting gas temperature between the valve portion and restriction mechanism, a pressure detector detecting gas pressure between the valve portion and restriction mechanism, and an arithmetic control device controlling flow rate of gas in the restriction mechanism based on values detected by the temperature detector and the pressure detector, wherein the temperature detector is inserted in an attachment hole of the valve body at a position just above an outlet side fluid passage.
    • 压力式流量控制装置为100-500℃的气体提供流量控制,误差不超过1.0%F.S. 压力式流量控制装置包括具有流体通道的阀体,插入通道中的阀部分,驱动阀部分以打开/关闭通道的阀驱动单元,在阀部分的下游侧的限制机构 在通道中,检测器检测阀部分和限制机构之间的气体温度,检测阀部分和限制机构之间的气体压力的压力检测器以及根据检测到的值控制限制机构中的气体流量的算术控制装置 通过温度检测器和压力检测器,其中温度检测器被插入在阀体的安装孔中,恰好在出口侧流体通道的正上方。
    • 79. 发明授权
    • Corrosion resistant metal made thermal type mass flow rate sensor and a fluid supply device using the same
    • 耐腐蚀金属制热型质量流量传感器和使用其的流体供应装置
    • US07363810B2
    • 2008-04-29
    • US10553235
    • 2004-02-12
    • Nobukazu IkedaKaoru HirataKouji NishinoRyousuke Dohi
    • Nobukazu IkedaKaoru HirataKouji NishinoRyousuke Dohi
    • G01F1/68
    • G01F1/6845
    • A corrosion resistant thermal type mass flow rate sensor, and a fluid supply device employing the sensor are provided thus allowing enhanced corrosion resistance of the thermal type mass flow rate sensor, improve responsiveness, to be achieved particle-free, and to prevent unevenness of product qualities. A thermal type mass flow rate sensor is constituted with a sensor part 1 comprising a corrosion resistant metal substrate 2 formed as a thin plate by applying electrolytic etching on the rear face side of a corrosion resistant metal material W, a thin film F forming a temperature sensor 3 and a heater 4 mounted on the rear face side of the corrosion resistant metal substrate 2, and a sensor base 13 hermetically fitted by welding to the outer periphery of the corrosion resistant metal substrate 2 of the afore-mentioned sensor part 1 fitted into a fixture groove 13a.
    • 提供了耐腐蚀热型质量流量传感器和使用该传感器的流体供给装置,从而能够提高热式质量流量传感器的耐腐蚀性,提高响应性,实现无颗粒,并且防止产品的不均匀 品质 热式质量流量传感器由传感器部件1构成,传感器部件1包括通过在耐腐蚀金属材料W的背面上施加电解蚀刻而形成为薄板的耐腐蚀金属基板2,形成温度 传感器3和安装在耐腐蚀金属基板2的背面侧的加热器4以及通过焊接气密地装配到上述传感器部1的耐腐蚀金属基板2的外周的传感器基座13, 固定槽13a。
    • 80. 发明申请
    • Thermal type mass flow rate sensor made of corrosion resistant metal, and fluid supply equipment using the same
    • 由耐腐蚀金属制成的热式质量流量传感器,以及使用其的流体供给设备
    • US20060053878A1
    • 2006-03-16
    • US10553235
    • 2004-02-12
    • Nobukazu IkedaKaoru HirataKouji NishinoRyousuke Dohi
    • Nobukazu IkedaKaoru HirataKouji NishinoRyousuke Dohi
    • G01F1/68
    • G01F1/6845
    • A corrosion resistant thermal type mass flow rate sensor, and a fluid supply device employing the sensor, are provided thus allowing enhanced corrosion resistance of the thermal type mass flow rate sensor, improve responsiveness, to be achieved particle-free, and to prevent unevenness of product qualities. A thermal type mass flow rate sensor is constituted with a sensor part 1 comprising a corrosion resistant metal substrate 2 formed as a thin plate by applying electrolytic etching on the rear face side of a corrosion resistant metal material W, thin film F forming a temperature sensor 3 and a heater 4 mounted on the rear face side of the corrosion resistant metal substrate 2, and a sensor base 13 hermetically fitted by welding to the outer periphery of the corrosion resistant metal substrate 2 of the afore-mentioned sensor part 1 fitted into a fixture groove 13a.
    • 提供耐腐蚀热型质量流量传感器和采用该传感器的流体供给装置,从而能够提高热型质量流量传感器的耐腐蚀性,提高响应性,实现无颗粒,并且防止不均匀 产品质量 热式质量流量传感器由传感器部件1构成,传感器部件1包括通过在耐腐蚀金属材料W的后表面上施加电解蚀刻而形成为薄板的耐腐蚀金属基板2,形成温度传感器 3和安装在耐腐蚀金属基板2的背面侧的加热器4以及通过焊接气密地装配到上述传感器部1的耐腐蚀金属基板2的外周的传感器基座13, 固定槽13a。