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    • 74. 发明授权
    • Automatic light intensity control for x-ray film viewer
    • 自动光强度控制用于X光胶片查看器
    • US4118654A
    • 1978-10-03
    • US745754
    • 1976-11-29
    • Takahiro OhtaAkira Muramatsu
    • Takahiro OhtaAkira Muramatsu
    • G02B27/02H05B39/08H05B37/02
    • H05B39/081
    • The intensity of light penetrating an X-ray film being viewed is automatically maintained at a preset, adjustable, eye comfort level. A photosensor detects the average light level on the observer side, and its output controls the charging time of a capacitor coupled to the emitter of a unijunction transistor. When the capacitor reaches a predetermined voltage it fires the transistor and dumps its charge through a pulse generator which in turn triggers a gated semiconductor connected in series with the viewer light source. The period between successive firing cycles is proportional to the penetrating light level. Thus, if the light level increases, as when a relatively transparent film negative is inserted in the viewer or when a negative is removed, the capacitor charging time increases, the firing period increases, and the light source intensity therefore decreases to restore the preset level of light penetration.
    • 被观察的穿透X射线胶片的光的强度自动保持在预设的可调节的眼睛舒适度。 光电传感器检测观测器侧的平均光级,其输出控制耦合到单结晶体管的发射极的电容器的充电时间。 当电容器达到预定电压时,它激发晶体管并将其电荷转移通过脉冲发生器,脉冲发生器又触发与观察者光源串联连接的门控半导体。 连续点火周期之间的周期与穿透光水平成比例。 因此,如果光水平增加,则当在观察者中插入相对透明的胶片负片或者当消除阴影时,电容器充电时间增加,触发周期增加,并且光源强度因此降低以恢复预设电平 的光线渗透。
    • 78. 发明授权
    • Sealing part and substrate processing apparatus
    • 密封件和基材加工装置
    • US08608856B2
    • 2013-12-17
    • US11407079
    • 2006-04-20
    • Daisuke HayashiAkira Muramatsu
    • Daisuke HayashiAkira Muramatsu
    • C23C16/00H01L21/3065F16J15/02F16J15/10
    • F16J15/128F16J15/104H01L21/67126
    • A sealing part that is inexpensive and enable excellent durability to be secured without the need for a predetermined sealing space as would be required for a double sealing structure. A sealing part seals an inside of a reduced pressure vessel from an outside, in which a high-elasticity polymeric material-eroding eroding substance is present and which is comprised of a substrate processing apparatus carrying out predetermined processing on a substrate housed in the reduced pressure vessel. The sealing part has a radical sealing member and a vacuum sealing member. The radical sealing member is disposed on an inside side of the reduced pressure vessel and is resistant to the eroding substance. The vacuum sealing member is made of the high-elasticity polymeric material and is disposed on an outside side of the reduced pressure vessel. At least one refuge space is formed through at least part of the radical sealing member and at least part of the vacuum sealing member being separated from one another. The radical sealing member and the vacuum sealing member are fitted together.
    • 密封部件是廉价的并且能够确保优异的耐久性,而不需要如双重密封结构所需的预定密封空间。 密封部分从外部密封减压容器的内部,其中存在高弹性聚合材料侵蚀的侵蚀物质,并且其包括在容纳在减压中的基板上进行预定处理的基板处理装置 船只。 密封部具有自由基密封部件和真空密封部件。 自由基密封构件设置在减压容器的内侧,并且抵抗侵蚀物质。 真空密封件由高弹性聚合材料制成,并设置在减压容器的外侧。 通过自由基密封件的至少一部分形成至少一个避难所空间,并且真空密封件的至少一部分彼此分离。 自由基密封构件和真空密封构件组装在一起。