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    • 78. 发明申请
    • VAPOR DEPOSITION METHOD, VAPOR DEPOSITION DEVICE AND ORGANIC EL DISPLAY DEVICE
    • 蒸气沉积方法,蒸发沉积装置和有机EL显示装置
    • US20130252353A1
    • 2013-09-26
    • US13989053
    • 2011-12-13
    • Shinichi KawatoSatoshi InoueTohru Sonoda
    • Shinichi KawatoSatoshi InoueTohru Sonoda
    • H01L21/66
    • H01L22/10C23C14/042C23C14/12C23C14/243H01L51/0011H01L51/56H01L2924/0002H01L2924/00
    • A coating film (90) is formed by causing vapor deposition particles (91) discharged from a vapor deposition source opening (61) of a vapor deposition source (60) to pass through a space (82) between a plurality of limiting plates (81) of a limiting plate unit (80) and a mask opening (71) of a vapor deposition mask in this order and adhere to a substrate while the substrate is moved relative to the vapor deposition mask in a state in which the substrate (10) and the vapor deposition mask (70) are spaced apart at a fixed interval. It is determined whether or not it is necessary to correct the position of at least one of the plurality of limiting plates in the X axis direction, and in the case where it is necessary to correct the position, the position of at least one of the plurality of limiting plates in the X axis direction is corrected. Accordingly, a coating film whose edge blur is suppressed can be stably formed at a desired position on a large-sized substrate.
    • 通过使从气相沉积源(60)的气相沉积源开口(61)排出的气相沉积颗粒(91)通过多个限制板(81)之间的空间(82)形成涂膜(90) )和气相沉积掩模的掩模开口(71),并且在衬底(10)的状态下,相对于气相沉积掩模移动衬底而粘附到衬底上, 并且气相沉积掩模(70)以固定的间隔间隔开。 确定是否需要校正多个限位板中的至少一个在X轴方向上的位置,并且在需要校正位置的情况下,至少一个限位板的位置 对X轴方向的多个限位板进行校正。 因此,可以在大尺寸基板的期望位置稳定地形成抑制边缘模糊的涂膜。