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    • 73. 发明授权
    • Electrode cover and evaporation device
    • 电极盖和蒸发装置
    • US08608855B2
    • 2013-12-17
    • US11790383
    • 2007-04-25
    • Nobuharu OhsawaRyoji NomuraMasahiro Takahashi
    • Nobuharu OhsawaRyoji NomuraMasahiro Takahashi
    • C23C16/00
    • C23C16/448C23C14/243C23C14/26H05B3/03
    • The present invention provides an evaporation device for which maintenance is readily conducted, and further, provides an electrode cover which can prevent an evaporation material from being adhered to electrodes. Moreover, the present invention provides an evaporation device including an evaporation chamber; a holding portion for holding an object to be treated; an evaporation source; an electrode; an electrode cover; and a power supply, in which the evaporation chamber includes the holding portion in an upper portion, and includes the evaporation source, the electrode, and the electrode cover in a lower portion; the electrode cover covers at least a part of an exposed surface of the electrode; the electrode and the power supply are electrically connected.
    • 本发明提供了一种容易进行维护的蒸发装置,并且还提供一种能够防止蒸发材料粘附到电极上的电极盖。 此外,本发明提供一种蒸发装置,其包括蒸发室; 用于保持待处理物体的保持部分; 蒸发源; 电极 电极盖; 以及电源,其中蒸发室在上部包括保持部分,并且在下部包括蒸发源,电极和电极盖; 电极盖覆盖电极的暴露表面的至少一部分; 电极和电源电连接。