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71. 发明授权

US09477233B2 Microfluidic system with a plurality of sequential T-junctions for performing reactions in microdroplets 有权
标题翻译：具有用于在微滴中进行反应的多个顺序T结的微流体系统
公开(公告)号：US09477233B2
公开(公告)日：2016-10-25
申请号：US11174298
申请日：2005-07-01
申请人： Rustem F. Ismagilov , Bo Zheng , Cory J. Gerdts
发明人： Rustem F. Ismagilov , Bo Zheng , Cory J. Gerdts
IPC分类号： B01L3/00 , G05D7/06 , B01F5/04 , B01F13/00 , B01J19/00 , B01L3/02 , G01N35/08 , G01N35/10
CPC分类号： G05D7/0694 , B01F5/0471 , B01F13/0071 , B01J19/0046 , B01J2219/00522 , B01J2219/00585 , B01J2219/0059 , B01J2219/00599 , B01L3/0293 , B01L3/502746 , B01L3/502784 , B01L2200/0673 , B01L2300/0816 , B01L2300/0838 , B01L2300/0864 , B01L2300/0867 , B01L2400/0487 , G01N1/38 , G01N35/08 , G01N2035/1034 , Y10T137/0318
摘要： A microfluidic system with a plurality of sequential T-junctions for performing reactions in a plurality of droplets (plugs) of micro- to femtoliter volumes is disclosed. The microfluidic system is configured such that the plurality of plugs are flowing through a loading component, with the loading component splitting the plurality of plugs at each of the plurality of downstream T-junctions and each inlet of the plurality of detachable holding components is configured to be operably coupled with at least one of outlets of the plurality of downstream T-junctions so that the holding components received a plurality of split plugs in the immiscible carrier fluid from the loading component.
摘要翻译：公开了一种具有多个连续T形接头的微流体系统，用于在多个液滴（塞子）中进行微 - 飞镖体积的反应。微流体系统构造成使得多个塞子流过加载部件，其中装载部件将多个塞子分解成多个下游T形接头中的每一个，并且多个可拆卸保持部件的每个入口被配置为与所述多个下游T形接头的至少一个出口可操作地联接，使得所述保持部件在与所述装载部件不相容的载体流体中接收多个分离塞。

72. 发明授权

US08832116B1 Using mobile application logs to measure and maintain accuracy of business information 有权
标题翻译：使用移动应用程序日志来衡量和保持业务信息的准确性
公开(公告)号：US08832116B1
公开(公告)日：2014-09-09
申请号：US13348563
申请日：2012-01-11
申请人： Fang Chu , Bo Zheng , Gang Feng , Dylan Myers
发明人： Fang Chu , Bo Zheng , Gang Feng , Dylan Myers
IPC分类号： G06F17/30
CPC分类号： G06Q10/0637
摘要： Business information about business entities are received from a plurality of aggregate information sources such as business directories. Mobile application logs about user activities are received from a plurality of mobile devices. Business entities related to the user activities are identified based on the mobile application logs. Scored attributes about the related business entities are acquired by applying data analysis rules to the mobile application logs. Accuracy scores are determined for attribute values in the business information based on the acquired scored attributes. Updated business information for the business entities is generated based on the accuracy scores and outputted to users upon request.
摘要翻译：从业务目录等多个聚合信息源接收关于业务实体的业务信息。从多个移动设备接收关于用户活动的移动应用日志。基于移动应用程序日志识别与用户活动相关的业务实体。通过将数据分析规则应用于移动应用程序日志来获取有关业务实体的分数属性。基于所获得的评分属性，确定商业信息中的属性值的准确度分数。业务实体的更新业务信息根据准确度分数生成，并根据要求输出给用户。

73. 发明授权

US08822148B2 Method of performing PCR reaction in continuously flowing microfluidic plugs 有权
标题翻译：在连续流动的微流体塞中进行PCR反应的方法
公开(公告)号：US08822148B2
公开(公告)日：2014-09-02
申请号：US13563347
申请日：2012-07-31
申请人： Rustem F. Ismagliov , Joshua David Tice , Cory John Gerdts , Bo Zheng
发明人： Rustem F. Ismagliov , Joshua David Tice , Cory John Gerdts , Bo Zheng
IPC分类号： C12Q1/68 , G01N1/28 , B01L3/00 , B01F5/06 , B01F13/00 , B01J19/00 , B82Y30/00 , G01N35/08
CPC分类号： B01L3/502784 , B01D9/0072 , B01D2009/0086 , B01F5/0646 , B01F5/0647 , B01F13/0071 , B01J14/00 , B01J19/0046 , B01J19/0093 , B01J2219/00286 , B01J2219/00576 , B01J2219/00585 , B01J2219/00599 , B01J2219/00722 , B01J2219/00725 , B01J2219/00736 , B01J2219/00756 , B01J2219/00783 , B01J2219/00837 , B01J2219/0086 , B01J2219/00869 , B01J2219/00889 , B01J2219/00891 , B01J2219/00894 , B01J2219/00903 , B01J2219/00975 , B01J2219/00977 , B01L3/502715 , B01L3/50273 , B01L2200/0673 , B01L2200/12 , B01L2300/0867 , B01L2400/0487 , B82Y30/00 , C07K14/43 , C12N9/2462 , C12Q1/6806 , C12Y302/01017 , C30B7/14 , C30B29/54 , C30B29/58 , G01N1/28 , G01N35/08 , Y10T117/10 , Y10T137/0318 , Y10T436/117497 , Y10T436/143333 , Y10T436/25
摘要： The present invention provides microfabricated substrates and methods of conducting reactions within these substrates. The reactions occur in plugs transported in the flow of a carrier-fluid.
摘要翻译：本发明提供微制造的底物和在这些底物内进行反应的方法。反应发生在在载体流体流中输送的塞子中。

74. 发明授权

US08772162B2 Method for removing native oxide and associated residue from a substrate 有权
标题翻译：从底物中除去天然氧化物和相关残留物的方法
公开(公告)号：US08772162B2
公开(公告)日：2014-07-08
申请号：US13906543
申请日：2013-05-31
申请人： Bo Zheng , Arvind Sundarrajan , Xinyu Fu
发明人： Bo Zheng , Arvind Sundarrajan , Xinyu Fu
IPC分类号： H01L21/44
CPC分类号： H01L21/02063 , H01J37/32082 , H01L21/02057 , H01L21/0206 , H01L21/28518 , H01L21/28556 , H01L21/28568 , H01L21/743 , H01L21/768
摘要： Native oxides and associated residue are removed from surfaces of a substrate by sequentially performing two plasma cleaning processes on the substrate in a single processing chamber. The first plasma cleaning process removes native oxide formed on a substrate surface by generating a cleaning plasma from a mixture of ammonia (NH3) and nitrogen trifluoride (NF3) gases, condensing products of the cleaning plasma on the native oxide to form a thin film that contains ammonium hexafluorosilicate ((NH4)2SiF6), and subliming the thin film off of the substrate surface. The second plasma cleaning process removes remaining residues of the thin film by generating a second cleaning plasma from nitrogen trifluoride gas. Products of the second cleaning plasma react with a few angstroms of the bare silicon present on the surface, forming silicon tetrafluoride (SiF4) and lifting off residues of the thin film.
摘要翻译：通过在单个处理室中在衬底上依次执行两个等离子体清洗工艺，从衬底的表面除去天然氧化物和相关残留物。第一等离子体清洁工艺通过从氨（NH 3）和三氟化氮（NF 3）气体的混合物中产生清洁等离子体，从而将清洁等离子体的产物冷凝在天然氧化物上，从而去除在基底表面上形成的天然氧化物，形成薄膜，含有六氟硅酸铵（（NH 4）2 SiF 6），并将薄膜从衬底表面上升华。通过从三氟化氮气体产生第二清洗等离子体，第二等离子体清洗工艺去除剩余的薄膜残留物。第二清洗等离子体的产物与表面上存在的裸硅几埃反应，形成四氟化硅（SiF4）并提取薄膜的残留物。

75. 发明授权

US08579591B2 Centrifugal compressor impeller 有权
标题翻译：离心式压缩机叶轮
公开(公告)号：US08579591B2
公开(公告)日：2013-11-12
申请号：US12914335
申请日：2010-10-28
申请人： John Chen Chiang Ho , Bo Zheng , Timothy M. Hollman , Kevin K. Taft , Jang Y. Jo , Anthony C. Jones
发明人： John Chen Chiang Ho , Bo Zheng , Timothy M. Hollman , Kevin K. Taft , Jang Y. Jo , Anthony C. Jones
IPC分类号： F01D5/04 , F01D5/14
CPC分类号： F04D29/284 , F04D29/30
摘要： A compressor impeller includes a hub, main blades and splitter blades. The main blades are equally spaced around the circumference of the hub. Each splitter blade is equally spaced between two adjacent main blades. Each main blade and splitter blade has suction and pressure surfaces formed in substantial compliance with normalized Cartesian coordinate values of X, Y, and Z set forth in Tables 1-4. When connected by smooth, continuing arcs, the normalized Cartesian coordinates form complete main blade and splitter blade shapes that are substantially matched by the main blade and splitter blade shapes of the compressor impeller.
摘要翻译：压缩机叶轮包括轮毂，主叶片和分流叶片。主叶片围绕轮毂的圆周等间隔开。每个分流叶片在两个相邻的主叶片之间相等间隔。每个主叶片和分流叶片具有大体上符合表1-4所示的X，Y和Z的归一化笛卡尔坐标值的吸力和压力表面。当通过光滑的连续弧连接时，归一化的笛卡尔坐标形成完全的主叶片和分流叶片形状，其基本上与压缩机叶轮的主叶片和分流叶片形状基本匹配。

76. 发明申请

US20130193108A1 METHODS OF END POINT DETECTION FOR SUBSTRATE FABRICATION PROCESSES 失效
标题翻译：基板制造工艺的端点检测方法
公开(公告)号：US20130193108A1
公开(公告)日：2013-08-01
申请号：US13360633
申请日：2012-01-27
申请人： Bo Zheng , Mei Chang , Arvind Sundarrajan
发明人： Bo Zheng , Mei Chang , Arvind Sundarrajan
IPC分类号： B44C1/22 , B08B7/00 , B08B7/04 , C23C16/52 , B05C5/00
CPC分类号： C23C14/54 , C23C14/564 , C23C16/4401 , C23C16/4404 , C23C16/52
摘要： Methods and substrate processing systems for analyzing an end point of a process are provided. By-products of the process are detected and monitored to determine the completion of various types of reaction processes within a substrate processing chamber. The methods provide real time process monitoring, thereby reducing the need to rigidly constrain other substrate processing parameters, increasing chamber cleaning efficiency, and/or increasing substrate processing throughput.
摘要翻译：提供了用于分析过程终点的方法和底物处理系统。检测和监测该方法的副产物以确定基材处理室内各种类型的反应过程的完成。这些方法提供了实时过程监控，从而减少了刚性限制其他衬底处理参数，提高室清洁效率和/或增加衬底处理生产量的需要。

77. 发明申请

US20120329171A1 DEVICE AND METHOD FOR PRESSURE-DRIVEN PLUG TRANSPORT 有权
标题翻译：用于压力驱动输送的装置和方法
公开(公告)号：US20120329171A1
公开(公告)日：2012-12-27
申请号：US13563347
申请日：2012-07-31
申请人： Rustem F. Ismagliov , Joshua David Tice , Cory John Gerdts , Bo Zheng
发明人： Rustem F. Ismagliov , Joshua David Tice , Cory John Gerdts , Bo Zheng
IPC分类号： G01N21/76 , C12P19/34 , G01N1/28
CPC分类号： B01L3/502784 , B01D9/0072 , B01D2009/0086 , B01F5/0646 , B01F5/0647 , B01F13/0071 , B01J14/00 , B01J19/0046 , B01J19/0093 , B01J2219/00286 , B01J2219/00576 , B01J2219/00585 , B01J2219/00599 , B01J2219/00722 , B01J2219/00725 , B01J2219/00736 , B01J2219/00756 , B01J2219/00783 , B01J2219/00837 , B01J2219/0086 , B01J2219/00869 , B01J2219/00889 , B01J2219/00891 , B01J2219/00894 , B01J2219/00903 , B01J2219/00975 , B01J2219/00977 , B01L3/502715 , B01L3/50273 , B01L2200/0673 , B01L2200/12 , B01L2300/0867 , B01L2400/0487 , B82Y30/00 , C07K14/43 , C12N9/2462 , C12Q1/6806 , C12Y302/01017 , C30B7/14 , C30B29/54 , C30B29/58 , G01N1/28 , G01N35/08 , Y10T117/10 , Y10T137/0318 , Y10T436/117497 , Y10T436/143333 , Y10T436/25
摘要： The present invention provides microfabricated substrates and methods of conducting reactions within these substrates. The reactions occur in plugs transported in the flow of a carrier-fluid.
摘要翻译：本发明提供微制造的底物和在这些底物内进行反应的方法。反应发生在在载体流体流中输送的塞子中。

78. 发明授权

US08291857B2 Apparatuses and methods for atomic layer deposition 有权
标题翻译：用于原子层沉积的装置和方法
公开(公告)号：US08291857B2
公开(公告)日：2012-10-23
申请号：US12494901
申请日：2009-06-30
申请人： Hyman Lam , Bo Zheng , Hua Ai , Michael Jackson , Xiaoxiong (John) Yuan , Hou Gong Wang , Salvador P. Umotoy , Sang Ho Yu
发明人： Hyman Lam , Bo Zheng , Hua Ai , Michael Jackson , Xiaoxiong (John) Yuan , Hou Gong Wang , Salvador P. Umotoy , Sang Ho Yu
IPC分类号： C23C16/452 , C23C16/455 , C23F1/00 , H01L21/306 , C23C16/06 , C23C16/22
CPC分类号： C23C16/45565 , C23C16/4412 , C23C16/45536 , C23C16/45544 , C23C16/4558 , H01J37/32449 , Y10T137/87265
摘要： Embodiments of the invention provide apparatuses and methods for atomic layer deposition (ALD), such as plasma-enhanced ALD (PE-ALD). In some embodiments, a PE-ALD chamber is provided which includes a chamber lid assembly coupled with a chamber body having a substrate support therein. In one embodiment, the chamber lid assembly has an inlet manifold assembly containing an annular channel encompassing a centralized channel, wherein the centralized channel extends through the inlet manifold assembly, and the inlet manifold assembly further contains injection holes extending from the annular channel, through a sidewall of the centralized channel, and to the centralized channel. The chamber lid assembly further contains a showerhead assembly disposed below the inlet manifold assembly, a water box disposed between the inlet manifold assembly and the showerhead assembly, and a remote plasma system (RPS) disposed above and coupled with the inlet manifold assembly, and in fluid communication with the centralized channel.
摘要翻译：本发明的实施例提供了诸如等离子体增强型ALD（PE-ALD）的原子层沉积（ALD）的装置和方法。在一些实施例中，提供了一种PE-ALD室，其包括与其中具有基板支撑件的室主体耦合的室盖组件。在一个实施例中，室盖组件具有入口歧管组件，其包含围绕集中通道的环形通道，其中集中通道延伸穿过入口歧管组件，并且入口歧管组件还包含从环形通道延伸的注入孔，集中通道侧壁，集中通道。腔室盖组件还包括设置在入口歧管组件下方的喷头组件，设置在入口歧管组件和喷头组件之间的水箱，以及设置在入口歧管组件上方并与入口歧管组件耦合的远程等离子体系统（RPS）与集中通道的流体通信。

79. 发明申请

US20110177609A1 DEVICE AND METHOD FOR PRESSURE-DRIVEN PLUG TRANSPORT 有权
公开(公告)号：US20110177609A1
公开(公告)日：2011-07-21
申请号：US13024155
申请日：2011-02-09
申请人： Rustem F. Ismagilov , Joshua David Tice , Cory John Gerdts , Bo Zheng
发明人： Rustem F. Ismagilov , Joshua David Tice , Cory John Gerdts , Bo Zheng
IPC分类号： G01N21/75 , C12P19/34 , G01N1/28
CPC分类号： B01L3/502784 , B01D9/0072 , B01D2009/0086 , B01F5/0646 , B01F5/0647 , B01F13/0071 , B01J14/00 , B01J19/0046 , B01J19/0093 , B01J2219/00286 , B01J2219/00576 , B01J2219/00585 , B01J2219/00599 , B01J2219/00722 , B01J2219/00725 , B01J2219/00736 , B01J2219/00756 , B01J2219/00783 , B01J2219/00837 , B01J2219/0086 , B01J2219/00869 , B01J2219/00889 , B01J2219/00891 , B01J2219/00894 , B01J2219/00903 , B01J2219/00975 , B01J2219/00977 , B01L3/502715 , B01L3/50273 , B01L2200/0673 , B01L2200/12 , B01L2300/0867 , B01L2400/0487 , B82Y30/00 , C07K14/43 , C12N9/2462 , C12Q1/6806 , C12Y302/01017 , C30B7/14 , C30B29/54 , C30B29/58 , G01N1/28 , G01N35/08 , Y10T117/10 , Y10T137/0318 , Y10T436/117497 , Y10T436/143333 , Y10T436/25
摘要： The present invention provides microfabricated substrates and methods of conducting reactions within these substrates. The reactions occur in plugs transported in the flow of a carrier-fluid.

80. 发明申请

US20110177586A1 DEVICE AND METHOD FOR PRESSURE-DRIVEN PLUG TRANSPORT 有权
公开(公告)号：US20110177586A1
公开(公告)日：2011-07-21
申请号：US13024165
申请日：2011-02-09
申请人： Rustem F. Ismagilov , Joshua David Tice , Cory John Gerdts , Bo Zheng
发明人： Rustem F. Ismagilov , Joshua David Tice , Cory John Gerdts , Bo Zheng
IPC分类号： C12M1/34 , G01N33/48 , G01N21/00 , G01N21/64
CPC分类号： B01L3/502784 , B01D9/0072 , B01D2009/0086 , B01F5/0646 , B01F5/0647 , B01F13/0071 , B01J14/00 , B01J19/0046 , B01J19/0093 , B01J2219/00286 , B01J2219/00576 , B01J2219/00585 , B01J2219/00599 , B01J2219/00722 , B01J2219/00725 , B01J2219/00736 , B01J2219/00756 , B01J2219/00783 , B01J2219/00837 , B01J2219/0086 , B01J2219/00869 , B01J2219/00889 , B01J2219/00891 , B01J2219/00894 , B01J2219/00903 , B01J2219/00975 , B01J2219/00977 , B01L3/502715 , B01L3/50273 , B01L2200/0673 , B01L2200/12 , B01L2300/0867 , B01L2400/0487 , B82Y30/00 , C07K14/43 , C12N9/2462 , C12Q1/6806 , C12Y302/01017 , C30B7/14 , C30B29/54 , C30B29/58 , G01N1/28 , G01N35/08 , Y10T117/10 , Y10T137/0318 , Y10T436/117497 , Y10T436/143333 , Y10T436/25
摘要： The present invention provides microfabricated substrates and methods of conducting reactions within these substrates. The reactions occur in plugs transported in the flow of a carrier-fluid.

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