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    • 71. 发明授权
    • Semiconductor laser diode array and method of fabricating the same
    • 半导体激光二极管阵列及其制造方法
    • US06546035B2
    • 2003-04-08
    • US09794085
    • 2001-02-28
    • Osamu ImafujiMasaaki Yuri
    • Osamu ImafujiMasaaki Yuri
    • H01S500
    • H01S5/4031H01S5/4087
    • A semiconductor laser diode array of this invention contains a first laser diode including a first cladding layer of a first conductivity type formed on a substrate, a first active layer formed on the first cladding layer and a second cladding layer of a second conductivity type formed on the active layer; and a second laser diode including a third cladding layer of the first conductivity type formed on the substrate with a space from the first laser diode, a second active layer formed on the third cladding layer and having a larger energy gap than the first active layer and a fourth cladding layer of the second conductivity type formed on the second active layer. The second laser diode further includes a height adjusting buffer layer of the first conductivity type formed between the substrate and the third cladding layer and having a thickness set for placing the second active layer at substantially the same height from the substrate surface as the height from the substrate surface of the first active layer.
    • 本发明的半导体激光二极管阵列包括:第一激光二极管,包括形成在基板上的第一导电类型的第一包层,形成在第一包层上的第一有源层和形成在第一包层上的第二导电类型的第二包层 活性层; 以及第二激光二极管,其包括形成在所述基板上的第一导电类型的第三包层,其具有来自所述第一激光二极管的空间;第二有源层,形成在所述第三包层上并且具有比所述第一有源层更大的能隙; 形成在第二有源层上的第二导电类型的第四覆层。 第二激光二极管还包括第一导电类型的高度调节缓冲层,其形成在基板和第三包覆层之间,并且具有设置用于将第二有源层与基板表面基本相同的高度设置的厚度, 第一有源层的衬底表面。