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    • 71. 发明授权
    • Doping from a photoresist layer
    • 从光致抗蚀剂层掺杂
    • US4350541A
    • 1982-09-21
    • US174275
    • 1980-07-31
    • Yoshihiko MizushimaAkitsu TakedaAkira YoshikawaOsamu OchiTomoko Hisaki
    • Yoshihiko MizushimaAkitsu TakedaAkira YoshikawaOsamu OchiTomoko Hisaki
    • G03F7/004H01L21/314H01L21/225
    • H01L21/314G03F7/0044Y10S438/93
    • A method for fabricating semiconductor devices comprising the steps of: forming on the main surface of a semiconductor substrate an inorganic photoresist layer having a first amorphous layer, which contains Se as a matrix component and includes an impurity for providing one conductivity type and a second silver, or a silver containing layer, formed on the first layer; exposing the inorganic photoresist layer with an exposure pattern; developing the exposed inorganic photoresist layer to form a patterned impurity containing inorganic photoresist layer as an impurity source layer; forming a heat resistive overcoating layer on the main surface of the semiconductor substrate, while covering the impurity source layer; and forming a doped region by diffusing impurity from the impurity source layer into a region of the substrate underlying the impurity source layer. The heat resistive overcoating layer may be an insulation layer having a window through which a conductive layer is connected to the doped region and is extended over the overcoating layer. The doped region is formed readily and accurately with relatively few process steps and with a pattern corresponding to an exposure pattern for the inorganic photoresist layer. The diffusion of the impurity from the impurity source layer into the substrate is accurately controlled so as to provide the doped region with a desired impurity concentration. Moreover, the evaporation of the impurity into the atmosphere during processing is minimized.
    • 一种制造半导体器件的方法,包括以下步骤:在半导体衬底的主表面上形成具有第一非晶层的无机光致抗蚀剂层,所述第一非晶层包含Se作为基质成分并且包括用于提供一种导电类型的杂质和第二银 或含银层,形成在第一层上; 以曝光图案曝光无机光致抗蚀剂层; 显影曝光的无机光致抗蚀剂层以形成含有无机光致抗蚀剂层作为杂质源层的图案化杂质; 在半导体衬底的主表面上形成耐热性外涂层,同时覆盖杂质源层; 以及通过将杂质从杂质源层扩散到位于杂质源层下面的衬底的区域中而形成掺杂区域。 耐热外涂层可以是具有窗口的绝缘层,导电层通过该窗口连接到掺杂区域并且在外涂层上延伸。 通过相对较少的工艺步骤并且具有对应于无机光致抗蚀剂层的曝光图案的图案容易且准确地形成掺杂区域。 将杂质从杂质源层扩散到衬底中被精确地控制,以便为掺杂区域提供所需的杂质浓度。 此外,在处理期间将杂质蒸发到大气中被最小化。
    • 72. 发明授权
    • Optical disc device
    • 光盘设备
    • US08164998B2
    • 2012-04-24
    • US12302068
    • 2008-02-08
    • Yuuichi KuzeAkira YoshikawaKatsuya Watanabe
    • Yuuichi KuzeAkira YoshikawaKatsuya Watanabe
    • G11B20/18
    • G11B7/00375G11B7/00736G11B7/0948G11B20/1816G11B20/1883G11B2007/0013G11B2020/10925G11B2020/1826G11B2220/20G11B2220/237G11B2220/2537
    • The optical disc apparatus of this invention includes: an optical pickup, which irradiates an optical disc with a light beam and generates a light detection signal based on the beam reflected from the disc; a search section, which controls the pickup before data is written on a storage area of the disc, thereby adjusting the beam spot location and searching a reference one of information layers stacked for a defective area in the storage area of the disc; a defect decision section for detecting an error based on the detection signal and determining a portion of the storage area, where the error has occurred, as the defective area; a defect size measuring section for measuring the size of the defective area in an area of the reference layer and generating a defect information list indicating there is the defective area in the area of the reference layer; and a recording range control section for managing, by reference to the list, the storage area such that no data will be written on a perpendicularly projected area defined by projecting the defective area of the reference layer perpendicularly to another information layer.
    • 本发明的光盘装置包括:光学拾取器,其用光束照射光盘,并且基于从光盘反射的光束产生光检测信号; 搜索部分,其在数据被写入盘的存储区域之前控制拾取,从而调整光束位置并搜索堆叠在盘的存储区域中的缺陷区域的信息层中的参考一个; 缺陷判定部分,用于基于检测信号检测错误,并确定发生错误的存储区域的一部分作为缺陷区域; 缺陷尺寸测量部分,用于测量参考层的区域中的缺陷区域的尺寸,并产生指示在参考层的区域中存在缺陷区域的缺陷信息列表; 以及记录范围控制部分,用于通过参考列表来管理存储区域,使得不会将数据写入垂直于参考层的缺陷区垂直于另一信息层定义的垂直投影区域。
    • 73. 发明授权
    • Optical disk drive and method for driving the optical disk drive in relation to a velocity switching point
    • 光盘驱动器和相对于速度切换点驱动光盘驱动器的方法
    • US08120998B2
    • 2012-02-21
    • US11460713
    • 2006-07-28
    • Akira YoshikawaKenji Kondo
    • Akira YoshikawaKenji Kondo
    • G11B7/00
    • G11B7/08511G11B19/127
    • An optical disk drive includes: an objective lens for converging a light beam onto an optical disk with an information storage layer; an actuator for moving the lens perpendicularly to the storage layer; an actuator driver for moving the lens at a predetermined velocity by controlling the actuator's operation; and a disk position detector for detecting the position of the lens, when the focal point of the beam is located on the storage layer, as a disk position. While the lens is being moved toward the disk to perform a focus finding operation, the moving velocity of the lens is set high until the lens reaches a velocity switching point, determined by reference to the disk position, and is set low once the lens has passed the point. The switching point is set farther away from the disk than the position of the lens is when the focal point of the beam is located on the storage layer of the disk.
    • 光盘驱动器包括:用于将光束会聚到具有信息存储层的光盘上的物镜; 用于使透镜垂直于存储层移动的致动器; 用于通过控制致动器的操作以预定速度移动透镜的致动器驱动器; 以及盘位置检测器,当光束的焦点位于存储层上时,用于检测透镜的位置作为光盘位置。 当透镜朝向盘移动以执行聚焦发现操作​​时,透镜的移动速度被设置为高直到透镜到达参考盘位置确定的速度切换点,并且一旦透镜具有 通过了一点。 当光束的焦点位于盘的存储层上时,切换点被设置得比透镜的位置更远离镜头的位置。
    • 74. 发明授权
    • Optical disc device
    • 光盘设备
    • US08072852B2
    • 2011-12-06
    • US12090540
    • 2006-11-21
    • Junichi MinaminoKatsuya WatanabeAkira Yoshikawa
    • Junichi MinaminoKatsuya WatanabeAkira Yoshikawa
    • G11B7/00
    • G11B19/125G11B7/0045G11B7/0946G11B7/0948G11B19/045G11B2007/0006
    • An optical disc drive according to the present invention can write data on both a write-once disc and a rewritable disc. The drive includes: a disc recognizing section 110 for recognizing the type of a given optical disc as a write-once disc or a rewritable disc; and track skipping detection signal generating section, which outputs track skipping detection signal when a first condition on tracking error is satisfied if the given optical disc, on which data is being written, has turned out to be a write-once disc. On the other hand, if the given optical disc has turned out to be a rewritable disc, the track skipping detection signal generating section outputs track skipping detection signal when a second condition on tracking error, which is different from the first condition, is satisfied. A control section stops writing the data in response to the track skipping detection signal while the data is being written.
    • 根据本发明的光盘驱动器可以在一次写入盘和可重写盘上写入数据。 驱动器包括:用于将给定光盘的类型识别为一次写入盘或可重写盘的盘识别部分110; 以及轨道跳过检测信号生成部,其中当正在写入数据的给定光盘已被证明是一次写入盘时,当满足跟踪误差的第一条件时,其输出轨道跳过检测信号。 另一方面,如果给出的光盘已经被证明是可重写盘,则当满足与第一条件不同的跟踪误差的第二条件时,轨道跳过检测信号产生部分输出轨道跳过检测信号。 当数据被写入时,控制部分响应于轨道跳过检测信号停止写入数据。
    • 75. 发明授权
    • Optical disc device
    • 光盘设备
    • US07969844B2
    • 2011-06-28
    • US12301832
    • 2007-07-09
    • Katsuya WatanabeAkira YoshikawaEiji UedaHiroshige IshibashiYuuichi Kuze
    • Katsuya WatanabeAkira YoshikawaEiji UedaHiroshige IshibashiYuuichi Kuze
    • G11B27/36
    • G11B7/00375G11B7/0948
    • An optical disc apparatus includes: a defect detecting section 124 for detecting, based on a light detection signal and with respect to a preset detection reference level, a fingerprint or a bubble on the disc 102 as a defect to output a defect detection signal; and a waveform shaping section 126 to output a hold signal that holds, in response to the defect detection signal, a signal from a tracking control section 109 at a level just before the defect has occurred. The apparatus is initially operated not to hold the signal from the tracking control section 109 even if there is a defect. But once a tracking failure has occurred during a read operation, settings are changed to hold the signal from the tracking control section 109 against the defect while the read operation is retried.
    • 光盘装置包括:缺陷检测部分124,用于基于光检测信号和相对于预设检测参考电平检测盘102上的指纹或气泡作为缺陷以输出缺陷检测信号; 以及波形整形部分126,用于输出保持信号,该保持信号响应于缺陷检测信号,将来自跟踪控制部分109的信号保持在刚好在缺陷发生之前的水平。 即使存在缺陷,该装置最初也不会保持来自跟踪控制部分109的信号。 但是,一旦在读取操作期间发生跟踪故障,则在读取操作被重试时,改变设置以保持来自跟踪控制部分109的信号抵抗缺陷。
    • 76. 发明授权
    • Optical disk apparatus
    • 光盘装置
    • US07864638B2
    • 2011-01-04
    • US11575312
    • 2005-10-20
    • Katsuya WatanabeAkira YoshikawaShin-ichi YamadaJunichi Minamino
    • Katsuya WatanabeAkira YoshikawaShin-ichi YamadaJunichi Minamino
    • G11B7/00
    • G11B7/0948G11B7/0941G11B2007/0013
    • An optical disk apparatus according to the present invention is capable of reading data from an optical disk 102 which has a plurality of information recording layers, including a first information recording layer whose distance from a disk surface is relatively small and a second information recording layer whose distance from the disk surface is relatively large. This optical disk apparatus includes: a focus control section 117 for causing a converging point of the light beam to be positioned on an arbitrary information recording layer of the optical disk 102; a tracking control section 118 for causing the converging point of the light beam to be positioned on a predetermined track of the information recording layer; and a gain switching section 108 capable of changing gain characteristics of at least one of the focus control section 117 and the tracking control section 118. The gain switching section 108 prescribes a gain crossover frequency when reading data from the first information recording layer to be a value which is lower than a gain crossover frequency when reading data from the second information recording layer.
    • 根据本发明的光盘装置能够从具有多个信息记录层的光盘102读取数据,该多个信息记录层包括与盘表面的距离相对较小的第一信息记录层和第二信息记录层, 距磁盘表面的距离比较大。 该光盘装置包括:聚焦控制部117,用于使光束的会聚点位于光盘102的任意信息记录层上; 跟踪控制部分118,用于使光束的会聚点定位在信息记录层的预定轨道上; 以及能够改变焦点控制部分117和跟踪控制部分118中的至少一个的增益特性的增益切换部分108.增益切换部分108规定从第一信息记录层读取数据时的增益交叉频率为 该值在从第二信息记录层读取数据时低于增益交叉频率。
    • 80. 发明申请
    • Optical disk apparatus
    • US20060002251A1
    • 2006-01-05
    • US11172545
    • 2005-06-30
    • Akira YoshikawaKenji Kondo
    • Akira YoshikawaKenji Kondo
    • G11B7/00
    • G11B7/0946G11B7/08511G11B7/0908G11B2007/0013
    • An optical disk apparatus is provided with an actuator that moves a beam spot that is formed by an optical head on an optical disk to recording surfaces; position control portions that control a position of the beam spot based on the output signal of the optical head; a disturbance estimation observer relating to the actuator; and a summing circuit that takes a sum of the output of the position control portion and the output of the observer, so as to drive the actuator based on the output of the summing circuit. The optical disk apparatus further is provided with a system controller that turns the observer on and off, a LPF that attenuates the high-frequency components of the output of the observer and retains the final value of the observer when the observer is turned off, and a switching circuit that switches between the output of the observer and the output of the LPF according to whether the observer is on or off. When the observer processing is off, the output of the LPF is supplied to the summing circuit. Thereby, instability in the control due to observer processing can be avoided even at the time of mode transition or addition of disturbance from outside.