专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

71. 发明申请

US20090066941A1 METHOD FOR DETECTING PARTICLES AND DEFECTS AND INSPECTION EQUIPMENT THEREOF 失效
标题翻译：检测颗粒和缺陷的方法及其检测设备
公开(公告)号：US20090066941A1
公开(公告)日：2009-03-12
申请号：US12266079
申请日：2008-11-06
申请人： Takahiro TOGASHI , Shigeru Matsui
发明人： Takahiro TOGASHI , Shigeru Matsui
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/94 , G01N2021/8861 , G01N2021/8874 , G01N2021/95676
摘要： A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.
摘要翻译：一种方法和设备，其包括用于存储所示斑点内的照明分布的示出点照度分布数据表，并且基于检测光强度数据计算颗粒或缺陷的坐标位置和颗粒的直径关于颗粒或缺陷以及所示的点光照度分布数据表。因此，即使在基于实际的照明光学系统的所示光点内的照明分布不是高斯分布的情况下，检测出的粒子或缺陷的粒径的计算以及物体表面上的坐标位置的计算被检查可以提高准确度。

72. 发明申请

US20060262297A1 Apparatus and method for defect inspection 失效
公开(公告)号：US20060262297A1
公开(公告)日：2006-11-23
申请号：US11437643
申请日：2006-05-22
申请人： Shigeru Matsui , Masaaki Ito
发明人： Shigeru Matsui , Masaaki Ito
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/956
摘要： In the conventional methods for enhancing defect detection sensitivity by improving the resolving power, if a microscopic pattern, which is a high spatial-frequency structure as is the case with a microscopic defect, has become the brightest portion, the gray-scale contrast of the microscopic defect will be enhanced. At the same time, however, the gray-scale contrast of the microscopic pattern will also be enhanced simultaneously. Consequently, there has existed a problem that it is impossible to enhance the microscopic-defect detection sensitivity further than that. In the present invention, an aperture stop which is divided into a plurality of small apertures is located on an illumination pupil plane. Then, light-shield/light-transmission for each small aperture is controlled independently of each other. This control allows an inspection-target object to be illuminated at only an incident angle at which the gray-scale contrast of the microscopic defect will be emphasized more sharply.

73. 发明申请

US20060100804A1 Method for inspecting defect and system therefor 有权
公开(公告)号：US20060100804A1
公开(公告)日：2006-05-11
申请号：US11302145
申请日：2005-12-14
申请人： Takanori Ninomiya , Seiji Isogai , Shigeru Matsui , Toshiei Kurosaki
发明人： Takanori Ninomiya , Seiji Isogai , Shigeru Matsui , Toshiei Kurosaki
IPC分类号： G06F19/00
CPC分类号： H01L21/67288 , G01N21/9501 , G01N23/22 , G01N2021/8861 , G06T7/0004 , G06T7/73 , G06T2207/30148 , H01J37/28 , H01J2237/24592
摘要： Based on a plurality of defects' position-coordinates and attribute detected by an inspecting apparatus, defects that are easily detectable by an observing apparatus are selected. With these selected defects employed as the indicator, the observing apparatus detects and observes the defects. Moreover, creating a coordinate transformation formula for representing a correlated relationship in the defects' position-coordinates between both the apparatuses, the observing apparatus transforms the defects' position-coordinates so as to observe the defects.

74. 发明申请

US20060072106A1 Image viewing method for microstructures and defect inspection system using it 审中-公开
标题翻译：使用它的微结构和缺陷检测系统的图像查看方法
公开(公告)号：US20060072106A1
公开(公告)日：2006-04-06
申请号：US11243188
申请日：2005-10-05
申请人： Shigeru Matsui , Kei Shimura
发明人： Shigeru Matsui , Kei Shimura
IPC分类号： G01N21/88
CPC分类号： G01N21/956 , G01N21/21
摘要： A non-polarization beam splitter is used for splitting optical paths of an illumination system and an image formation system. MTF characteristics independent of an orientation of a pattern on a sample is obtained by illumination with a circularly-polarized light by combining a polarizer and a λ/4 plate. A partial polarizer is put in the image formation system immediately after the non-polarization beam splitter, and high-order diffraction lights are taken in with the maximum efficiency and the transmission efficiency of the zero-order light is controlled to improve high frequency part of MTF.
摘要翻译：非偏振分束器用于分离照明系统和图像形成系统的光路。通过组合偏振器和λ/ 4板，通过用圆偏振光进行照明来获得与样品上的图案的取向无关的MTF特性。在非偏振光束分离器之后立即将部分偏振片放入图像形成系统中，并且以最大效率吸收高阶衍射光，并且控制零级光的透射效率以改善高频部分的高频部分 MTF。

75. 发明申请

US20050117796A1 Pattern defect inspection method and apparatus 失效
标题翻译：图案缺陷检查方法和装置
公开(公告)号：US20050117796A1
公开(公告)日：2005-06-02
申请号：US10995512
申请日：2004-11-24
申请人： Shigeru Matsui , Katsuya Suzuki
发明人： Shigeru Matsui , Katsuya Suzuki
IPC分类号： G01N21/956 , G06K9/00 , G06T1/00 , G06T5/50 , G06T7/00 , H01L21/66
CPC分类号： G06T7/001 , G01N21/95607 , G03F7/7065 , G06T2207/30148
摘要： The pattern defect inspection apparatus is operable to detect defects by comparing a detection image, which is obtained through scanning by an image sensor those patterns that have the identical shape and are continuously disposed on the object under tested at equal intervals in row and column directions, with a reference image obtained by scanning neighboring identical shape patterns in the row and column directions. This apparatus has a unit for generating an average reference image by statistical computation processing from the images of identical shape patterns lying next to the detection image including at least eight nearest chips on the up-and-down and right-and-left sides and at diagonal positions with the detection image being intermediately situated. The apparatus also includes a unit that detects a defect by comparing the detection image to the average reference image thus generated.
摘要翻译：图案缺陷检查装置可以通过将通过图像传感器进行扫描而得到的检测图像进行比较来检测缺陷，所述检测图像具有相同形状且连续设置在被检测物体上的行和列方向上等间隔的那些图案，具有通过扫描行和列方向上的相邻相同形状图案而获得的参考图像。该装置具有用于通过统计计算处理从邻近检测图像的相同形状图案的图像生成平均参考图像的单元，该检测图像包括上下左右侧至少八个最近的码片，以及在对角位置，检测图像位于中间位置。该装置还包括通过将检测图像与由此生成的平均参考图像进行比较来检测缺陷的单元。

76. 发明授权

US06421308B1 State detecting device and optical disk device 失效
标题翻译：状态检测装置和光盘装置
公开(公告)号：US06421308B1
公开(公告)日：2002-07-16
申请号：US09241411
申请日：1999-02-02
申请人： Naoki Kizu , Kazuhiro Sugiyama , Shigeru Matsui , Noboru Yashima , Yukari Hiratsuka
发明人： Naoki Kizu , Kazuhiro Sugiyama , Shigeru Matsui , Noboru Yashima , Yukari Hiratsuka
IPC分类号： G11B2010
CPC分类号： G11B27/36 , G11B7/00718 , G11B7/00745 , G11B20/1833 , G11B27/24 , G11B27/3027 , G11B2220/216 , G11B2220/2575
摘要： For recording data on and reproducing data from an optical disk of a single spiral land/groove configuration, a header detector detects header regions on the optical disk, a PID error detector judges whether the address information read from the header regions is erroneous, using error detection codes, and detects the number of errors per sector. An error count comparator compares the number of errors per sector with a predetermined value, and a state judging circuit identifies the state of the optical disk device by causing transition to a higher or lower state according to the output of the error count comparator. The recording and reproduction are controlled according to the state thus identified.
摘要翻译：为了在单个螺旋纹/纹槽配置的光盘上记录数据和再现数据，标题检测器检测光盘上的标题区，PID错误检测器判断从标题区读出的地址信息是否错误，使用错误检测代码，并检测每个扇区的错误数。误差计数比较器将每个扇区的误差数与预定值进行比较，状态判断电路根据误差计数比较器的输出，通过转变到更高或更低的状态来识别光盘装置的状态。根据所识别的状态来控制记录和再现。

77. 发明授权

US06384909B2 Defect inspection method and apparatus for silicon wafer 有权
公开(公告)号：US06384909B2
公开(公告)日：2002-05-07
申请号：US09842929
申请日：2001-04-27
申请人： Koji Tomita , Muneo Maeshima , Shigeru Matsui , Yoshitaka Kodama , Hitoshi Komuro , Kazuo Takeda
发明人： Koji Tomita , Muneo Maeshima , Shigeru Matsui , Yoshitaka Kodama , Hitoshi Komuro , Kazuo Takeda
IPC分类号： G01N2188
CPC分类号： G01N21/9505 , G01N21/9501
摘要： A defect inspection apparatus for detecting defects existing on a surface of a semiconductor sample and/or inside the sample based on light information from the sample obtained by irradiating a light beam onto the sample is provided, which comprises a detecting means for detecting positions in the depth direction where the defects exist and distribution of the defects based on the light information; a setting means for setting a position in the depth direction where defects exist; and a means for displaying the distribution of the defects obtained by the detecting means, the displaying means displaying the distribution of the defects corresponding to the position in the depth direction set by the setting means.

78. 发明授权

US06275878B1 Data recorder and data producing circuit 失效
标题翻译：数据记录器和数据产生电路
公开(公告)号：US06275878B1
公开(公告)日：2001-08-14
申请号：US09239994
申请日：1999-01-29
申请人： Noboru Yashima , Kazuhiro Sugiyama , Shigeru Matsui , Yukari Hiratsuka , Naoki Kizu
发明人： Noboru Yashima , Kazuhiro Sugiyama , Shigeru Matsui , Yukari Hiratsuka , Naoki Kizu
IPC分类号： G06F306
CPC分类号： G11B20/1883 , G11B20/10 , G11B20/1833 , G11B27/3027 , G11B2220/20 , G11B2220/216 , G11B2220/2575
摘要： A data recorder for recording data onto a record medium on which a sync signal is inserted at a given interval, has a sequence controller, wherein, after receiving the command from the system controller which triggers an initiation of a recording operation, the sequence controller activates the first encoder in response to a leading end signal of the encoded block from the sync signal set-up section, activates the first encoder and the second encoder in response to a leading end signal of the next encoded block, and activates the first encoder, the second encoder and the data reader in response to a leading end signal of the next following encoded block, and wherein, during the absence of the command from the system controller which triggers an initiation of a recording operation, the sequence controller deactivates the first encoder in response to a leading end signal of an encoded block from the sync signal set-up section, deactivates the first encoder and the second encoder in response to a leading end signal of the next encoded block, and deactivates the first encoder, the second encoder and the data reader in response to a leading end signal of the next following encoded block.
摘要翻译：用于将数据记录到以给定间隔插入同步信号的记录介质上的数据记录器具有序列控制器，其中在从系统控制器接收到触发记录操作开始的命令之后，序列控制器激活第一编码器响应于来自同步信号建立部分的编码块的前端信号，响应于下一编码块的前端信号激活第一编码器和第二编码器，并激活第一编码器，所述第二编码器和所述数据读取器响应于所述下一个后续编码块的前端信号，并且其中，在不存在触发记录操作开始的系统控制器的命令的情况下，所述序列控制器使所述第一编码器响应于来自同步信号设置部分的编码块的前端信号，在第一编码器和第二编码器的响应中停用 nse到下一个编码块的前导信号，并且响应于下一个后续编码块的前导信号去激活第一编码器，第二编码器和数据读取器。

79. 发明授权

US6118742A Disk-rotation control apparatus 失效
标题翻译：盘旋转控制装置
公开(公告)号：US6118742A
公开(公告)日：2000-09-12
申请号：US058844
申请日：1998-04-13
申请人： Shigeru Matsui , Noboru Yashima , Naoki Kizu , Kazuhiro Sugiyama , Yukari Hiratsuka
发明人： Shigeru Matsui , Noboru Yashima , Naoki Kizu , Kazuhiro Sugiyama , Yukari Hiratsuka
IPC分类号： G11B19/28 , G11B19/247 , G11B27/22
CPC分类号： G11B19/247
摘要： If a determination is made that a signal is not normally detected by the pre-pit-region detection circuit 53, an error signal is obtained from a pulse generator 58 to control the rotations of the disk 50. If a determination is made that a signal is normally detected by the pre-pit-region detection circuit 53 and if the synchronizing signals are not normally detected at predetermined intervals, an error signal is obtained from the wobble signal so that the rotations of the disk 50 are controlled. If a determination is made that synchronizing signals are detected by the pre-pit-region detection circuit 53 at predetermined intervals, an error signal is obtained from clocks synchronized with the reproduced signal generated by the PLL circuit 54 so that rotations of the disk 50 are controlled.
摘要翻译：如果确定信号未被预凹坑区域检测电路53正常检测到，则从脉冲发生器58获得误差信号以控制盘50的旋转。如果确定信号通常由预凹坑区域检测电路53检测到，并且如果以预定间隔不正常地检测到同步信号，则从摆动信号获得误差信号，从而控制盘50的旋转。如果确定了预定间隔检测电路53以预定间隔检测到同步信号，则从与PLL电路54产生的再现信号同步的时钟获得误差信号，使得盘50的旋转为受控。

80. 发明授权

US6108079A Method for measuring crystal defect and equipment using the same 有权
标题翻译：测量晶体缺陷的方法及使用其的设备
公开(公告)号：US6108079A
公开(公告)日：2000-08-22
申请号：US245195
申请日：1999-02-05
申请人： Muneo Maeshima , Kazuo Takeda , Isao Nemoto , Shigeru Matsui , Yoshitaka Kodama
发明人： Muneo Maeshima , Kazuo Takeda , Isao Nemoto , Shigeru Matsui , Yoshitaka Kodama
IPC分类号： G01N21/88 , G01N21/25 , G01N21/47 , G01N21/95 , G01N21/956 , H01L21/66 , G01N21/00 , G01N21/86
CPC分类号： G01N21/9501 , H01L22/12 , H01L2924/0002
摘要： In order to measure an inner defect of a sample with a certain high accuracy even if the sample surface of the moved up and down by flatness irregularity of the sample and problem on accuracy of the sample movement stage, incident light beams having two wavelength and respective different penetration depths for the sample are slantingly irradiated on the surface of the moving sample 15 from irradiation optical systems 4, 8, and the inner defect of the sample is measured by detecting the scattering light occurred from the interior of the sample with a detection optical system 9 arranged over the sample surface. A distance measurement means 14 is located in an upstream of a movement direction of said sample than said irradiation optical system 4, 8 and said detection optical system 9, thereby a surface height of said sample is measured. When a measured point on sample measured by the distance measurement means 14 is arrived at a lower part of the detection optical system 9, height positions of the irradiation optical system and the detection optical system are controlled by piezo electric elements 11,12,13 so that the irradiation optical system and the detection optical system are located at predetermined positions relating to the measured point.
摘要翻译：为了以一定的高精度测量样品的内部缺陷，即使样品的平坦度不均匀性上下移动的样品表面和样品移动台的精度问题，具有两个波长的入射光束和相应的样品的不同穿透深度从照射光学系统4,8倾斜地照射在移动样品15的表面上，并且通过用检测光学检测从样品内部发生的散射光来测量样品的内部缺陷系统9布置在样品表面上。距离测量装置14位于所述样品的移动方向的上游，比所述照射光学系统4,8和所述检测光学系统9，从而测量所述样品的表面高度。当通过距离测量装置14测量的样品上的测量点到达检测光学系统9的下部时，照射光学系统和检测光学系统的高度位置由压电元件11,12,13所控制照射光学系统和检测光学系统位于与测量点相关的预定位置处。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式