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71. 发明授权

US06262418B1 Thermal type infrared sensing device, fabrication method for thermal type infrared sensing device, and infrared imaging system and infrared imaging apparatus 有权
标题翻译：热式红外感测装置，热式红外感测装置的制造方法，红外成像系统和红外成像装置
公开(公告)号：US06262418B1
公开(公告)日：2001-07-17
申请号：US09177148
申请日：1998-10-22
申请人： Kazuhiko Hashimoto , Masanori Okuyama , Ryuichi Kubo , Tomonori Mukaigawa
发明人： Kazuhiko Hashimoto , Masanori Okuyama , Ryuichi Kubo , Tomonori Mukaigawa
IPC分类号： G01J510
CPC分类号： G01J5/34
摘要： A thermal type infrared sensing device has; a plurality of light-receiving electrodes for outputting a change of surface charge associated with a polarization that occurs in a dielectric when subjected to infrared radiation; and a plurality of compensation electrodes, corresponding one for one to plurality of light-receiving electrodes, for compensating the outputs of corresponding light-receiving electrodes, and wherein plurality of compensation electrodes are formed on a different substrate from a substrate on which plurality of light-receiving electrodes are formed.
摘要翻译：一种热式红外传感器具有：多个光接收电极，用于输出当经受红外辐射时在电介质中发生的与偏振有关的表面电荷的变化; 以及多个补偿电极，对应一个用于一个到多个光接收电极，用于补偿相应的光接收电极的输出，并且其中多个补偿电极形成在不同的衬底上，所述衬底上具有多个光形成接收电极。

72. 发明授权

US5939132A Alignment chips positioned in the peripheral part of the semiconductor substrate and method of manufacturing thereof 失效
标题翻译：定位在半导体衬底的周边部分的对准芯片及其制造方法
公开(公告)号：US5939132A
公开(公告)日：1999-08-17
申请号：US833193
申请日：1997-04-14
申请人： Toyokazu Fujii , Mikio Nishio , Mitsuru Sekiguchi , Kazuhiko Hashimoto
发明人： Toyokazu Fujii , Mikio Nishio , Mitsuru Sekiguchi , Kazuhiko Hashimoto
IPC分类号： C23C14/04 , C23C16/04 , H01L21/00 , H01L21/677 , B05D5/12 , H07L21/301
CPC分类号： H01L21/67167 , C23C14/042 , C23C16/042 , H01L21/67207 , H01L21/67225 , H01L21/67796 , H01L2223/54473 , H01L2223/5448 , Y10S438/975
摘要： On a semiconductor substrate, chips to be products and alignment chips located at a portion a part thereof is left out from a peripheral part of the semiconductor substrate are formed. Contact holes and alignment marks are formed at the chips to be products and the alignment chips. Covering the alignment chips with alignment mark cover parts of a substrate holder, a material for metal wiring is deposited on the semiconductor substrate to form a metal film on the substrate. A mask pattern is formed on the metal film using the alignment marks of the alignment chips on which the metal film is not formed.
摘要翻译：在半导体基板上，形成从半导体基板的周边部分留出的成为产品的芯片和位于其一部分的对准芯片。在作为产品的芯片和对准芯片上形成接触孔和对准标记。用衬底保持器的对准标记覆盖部分覆盖对准芯片，在半导体衬底上沉积用于金属布线的材料，以在衬底上形成金属膜。使用未形成金属膜的取向芯片的对准标记，在金属膜上形成掩模图案。

73. 发明授权

US5877688A Thermal object measuring apparatus 失效
标题翻译：热物体测量仪
公开(公告)号：US5877688A
公开(公告)日：1999-03-02
申请号：US629937
申请日：1996-04-12
申请人： Katsuya Morinaka , Nobuyuki Yoshiike , Kazuhiko Hashimoto , Tetsuya Kawai
发明人： Katsuya Morinaka , Nobuyuki Yoshiike , Kazuhiko Hashimoto , Tetsuya Kawai
IPC分类号： G01S7/481 , G01S7/483 , G01S7/497 , G01S15/42 , G01S15/88 , G01S17/02 , G01S17/10 , G01S17/88 , G06K9/00 , G08B13/19 , G08B13/191 , G08B29/26 , H04N5/33 , G08B17/00
CPC分类号： G01S7/497 , G01S17/023 , G01S17/10 , G01S7/4813 , G01S7/483 , G06K9/00362 , G08B13/19 , G08B13/191 , G08B29/26 , G01S15/42 , G01S15/88 , G01S17/88 , H04N5/33
摘要： A thermal object detecting method and apparatus. According to the method and apparatus, a thermal image of a measuring space is obtained by a two-dimensional thermal image detecting device. Then, position information of an object in the measuring space is obtained by an object distance detecting device, which determines a distance between the apparatus and the object. The output of the two-dimensional thermal image detecting device can be corrected using the distance data from the object distance detecting device.
摘要翻译：一种热物体检测方法和装置。根据该方法和装置，通过二维热图像检测装置获得测量空间的热像。然后，通过确定设备和对象之间的距离的物体距离检测装置获得测量空间中的对象的位置信息。可以使用来自物体距离检测装置的距离数据来校正二维热图像检测装置的输出。

74. 发明授权

US5866887A Apparatus for detecting the number of passers 失效
标题翻译：用于检测路人数的装置
公开(公告)号：US5866887A
公开(公告)日：1999-02-02
申请号：US922600
申请日：1997-09-03
申请人： Kazuhiko Hashimoto , Nobuyuki Yoshiike , Katsuya Morinaka
发明人： Kazuhiko Hashimoto , Nobuyuki Yoshiike , Katsuya Morinaka
IPC分类号： G06M7/00 , G01J1/02 , G01P13/04 , G01V8/12 , G06K9/20 , G06M11/00 , G07C9/00 , B61L1/16
CPC分类号： G06K9/00778 , G06K9/2018 , G07C9/00
摘要： A plurality of rows are provided on a calling of sensors and each have a plurality of distance variation measuring sensors. The distance variation measuring sensors each include a light emitter and a light receiver arranged in the orthogonal direction to the direction in which human bodies pass. The number of passers is detected on the basis of the number of the distance variation measuring sensors which have detected a human body. The traveling direction of human bodies is detected on the basis of the change in the distance to the distance variation measuring human bodies measured by the sensors.
摘要翻译：在传感器的呼叫上提供多行，并且每行具有多个距离变化测量传感器。距离变化测量传感器各自包括在与人体通过的方向正交的方向上布置的光发射器和光接收器。基于已经检测到人体的距离变化测量传感器的数量来检测路人的数量。基于与由传感器测量的测量人体的距离变化的距离的变化来检测人体的行进方向。

75. 发明授权

US5476753A Fine pattern forming method 失效
标题翻译：精细图案形成方法
公开(公告)号：US5476753A
公开(公告)日：1995-12-19
申请号：US238793
申请日：1994-05-06
申请人： Kazuhiko Hashimoto , Masayuki Endo
发明人： Kazuhiko Hashimoto , Masayuki Endo
IPC分类号： G03F7/004 , G03F7/075 , G03C5/00
CPC分类号： G03F7/0754 , G03F7/0045 , Y10S430/143
摘要： A high polymer organic film is applied as a bottom layer to a semiconductor silicon substrate. Then, a material including an acid generator and a polysilane resin insoluble in an alkaline solution is applied to the bottom layer as an electron beam resist layer. The polysilane resin includes a Si--Si bond or Si--O bond in a principle chain and a substituted hydroxy group expressed as --OR in a side chain wherein R denotes a substitution group of hydrocarbon. The acid generator generates an acid when irradiated with an electron beam. Then, a pattern is formed with an electron beam in the photosensitive layer, and it is developed with an alkaline solution. Then, by using the resist pattern as a mask, the bottom layer is etched. Thus, a fine resist pattern of correct high aspect ratio can be formed easily.
摘要翻译：将高分子有机膜作为底层施加到半导体硅衬底。然后，作为电子束抗蚀剂层，将作为酸性发生剂和不溶于碱性溶液的聚硅烷树脂的材料涂布在底层。聚硅烷树脂在原料链中包含Si-Si键或Si-O键，在侧链中表示为-OR的取代羟基，其中R表示烃的取代基。当用电子束照射时酸产生器产生酸。然后，在感光层中形成有电子束的图案，并用碱性溶液显影。然后，通过使用抗蚀剂图案作为掩模，蚀刻底层。因此，可以容易地形成具有正确高纵横比的精细抗蚀剂图案。

76. 发明授权

US5382544A Manufacturing method of a semiconductor device utilizing thin metal film 失效
标题翻译：利用薄金属薄膜的半导体器件的制造方法
公开(公告)号：US5382544A
公开(公告)日：1995-01-17
申请号：US66882
申请日：1993-05-25
申请人： Michikazu Matsumoto , Kazuhiko Hashimoto
发明人： Michikazu Matsumoto , Kazuhiko Hashimoto
IPC分类号： H01L21/027 , H01L21/768 , H01L21/283 , H01L21/3205
CPC分类号： H01L21/76838 , H01L21/76802 , Y10S148/017 , Y10S148/105 , Y10S438/91 , Y10S438/945 , Y10S438/949 , Y10S438/95
摘要： A semiconductor device is manufactured using the electron beam exposure method. A resist is applied on an interlayer dielectric film through a thin metal film, and a contact hole is formed in the interlayer dielectric film. The thin metal film is utilized as a part of a second metal wiring pattern after removing its surface oxides.
摘要翻译：使用电子束曝光方法制造半导体器件。通过薄金属膜将抗蚀剂施加在层间电介质膜上，并且在层间绝缘膜中形成接触孔。在去除其表面氧化物之后，将金属薄膜用作第二金属布线图案的一部分。

77. 发明授权

US08431325B2 Compound, resin, resist composition and method for producing resist pattern 失效
标题翻译：化合物，树脂，抗蚀剂组合物和抗蚀剂图案的制造方法
公开(公告)号：US08431325B2
公开(公告)日：2013-04-30
申请号：US12873919
申请日：2010-09-01
申请人： Kazuhiko Hashimoto , Koji Ichikawa
发明人： Kazuhiko Hashimoto , Koji Ichikawa
IPC分类号： G03F7/039 , G03F7/40 , C07C69/54 , C07C69/74 , C08F216/38 , C08F22/14
CPC分类号： C07C69/84 , C07C69/54 , C07C69/96 , C07C2603/74 , C08F20/30 , G03F7/0045 , G03F7/0046 , G03F7/0397
摘要： A compound of the present invention is represented by the formula (A); wherein R1 represents a hydrogen atom or a C1 to C6 alkyl group; Z1 represents a single bond, —CO—O—* or —CO—O—(CH2)k—CO—O—*; Z2 represents a single bond, *—O—CO—, *—CO—O—, *—O—(CH2)k—CO—, *—CO—(CH2)k—O—, *—O—(CH2)k—CO—O—, *—O—CO—(CH2)k—O— or *—O—CO—(CH2)k—O—CO—; k represents an integer of 1 to 6; * represents a binding position to W; W represents a C4 to C36 (n+1) valent alicyclic hydrocarbon group or a C6 to C18 (n+1) valent aromatic hydrocarbon group, one or more hydrogen atoms contained in the alicyclic hydrocarbon group and the aromatic hydrocarbon group may be replaced by a halogen atom, a C1 to C12 alkyl group, a C1 to C12 alkoxy group, a C2 to C4 acyl group or —OR10; R10 represents a hydrogen atom or a group represented by the formula (R2-2); R2 represents a hydrogen atom, a group represented by the formula (R2-1) or (R2-2); n represents an integer of 1 to 3; R4, R5 and R6 independently represent a C1 to C12 hydrocarbon group; R7 and R8 independently represent a hydrogen atom or a C1 to C12 hydrocarbon group; R9 represents a C1 to C14 hydrocarbon group.
摘要翻译：本发明的化合物由式（A）表示; 其中R1表示氢原子或C1-C6烷基; Z1表示单键，-CO-O- *或-CO-O-（CH2）k-CO-O- *; Z2表示单键，* -O-CO-，* -CO-O-，* -O-（CH2）k-CO-，* -CO-（CH2）kO-，* -O-（CH2）k -CO-O-，* -O-CO-（CH2）kO-或* -O-CO-（CH2）kO-CO-; k表示1〜6的整数， *表示与W的绑定位置; W表示C 4〜C 36（n + 1）价的脂环式烃基或C 6〜C 18（n + 1）价芳香族烃基，脂环式烃基和芳香族烃基所含有的1个以上氢原子可以被卤素原子，C1〜C12烷基，C1〜C12烷氧基，C2〜C4酰基或-OR10; R 10表示氢原子或式（R2-2）表示的基团。 R2表示氢原子，式（R2-1）或（R2-2）表示的基团; n表示1〜3的整数， R4，R5和R6独立地表示C1〜C12烃基; R7和R8独立地表示氢原子或C1〜C12烃基; R9表示C1〜C14烃基。

78. 发明授权

US08232039B2 Polymer and resist composition comprising the same 有权
标题翻译：包含其的聚合物和抗蚀剂组合物
公开(公告)号：US08232039B2
公开(公告)日：2012-07-31
申请号：US12612557
申请日：2009-11-04
申请人： Nobuo Ando , Kazuhiko Hashimoto
发明人： Nobuo Ando , Kazuhiko Hashimoto
IPC分类号： G03F7/004 , C08F232/08 , C08F224/00
CPC分类号： C08F220/08 , C08F24/00 , C08F220/12 , C08F220/26 , C08F220/28 , C08F222/14 , G03F7/0045 , G03F7/0046 , G03F7/0397 , G03F7/2059 , Y10S430/106 , Y10S430/111
摘要： A polymer comprising a structural unit represented by the formula (I): wherein R1 represents a hydrogen atom or a methyl group, X represents a linear or branched chain C1-C6 alkylene group, Z represents a group represented by the formula (Ia): wherein R2 is independently in each occurrence a linear or branched chain C1-C6 alkyl group and m represents an integer of 0 to 15, and a structural unit represented by the formula (II): wherein R3 represents a hydrogen atom or a methyl group, R4 is independently in each occurrence a linear or branched chain C1-C6 alkyl group and n represents an integer of 0 to 4.
摘要翻译：一种包含由式（I）表示的结构单元的聚合物：其中R1表示氢原子或甲基，X表示直链或支链C1-C6亚烷基，Z表示由式（Ia）表示的基团：其中R2各自独立地为直链或支链C 1 -C 6烷基，m表示0〜15的整数，和由式（II）表示的结构单元：其中，R3表示氢原子或甲基， R4各自独立地为直链或支链C1-C6烷基，n表示0〜4的整数。

79. 发明申请

US20110148477A1 SIGNAL TRANSMISSION DEVICE 审中-公开
标题翻译：信号传输设备
公开(公告)号：US20110148477A1
公开(公告)日：2011-06-23
申请号：US13062269
申请日：2009-09-30
申请人： Kohei Teramoto , Tsuyoshi Nakada , Kazuhiko Hashimoto , Hajime Koyama , Koji Tsukamoto , Yoshihiko Mori
发明人： Kohei Teramoto , Tsuyoshi Nakada , Kazuhiko Hashimoto , Hajime Koyama , Koji Tsukamoto , Yoshihiko Mori
IPC分类号： H03K19/0175
CPC分类号： H04B3/50 , H04B3/30 , H04B15/02
摘要： A signal transmission device includes a transmitting circuit 11 and a receiving circuit 12 provided with shunt regulator power supplies 110 and 120 for causing fixed currents to flow thereinto respectively, and a signal transmission path 13 connecting between the transmitting circuit 11 and the receiving circuit 12 and having a function of preventing an alternating current component, in which a ground GNDA of the transmitting circuit 11 and a ground GNDB of the receiving circuit 12 are disposed independently of each other, and are connected to a ground GNDC of the shunt regulator power supplies 110 and 120 at a single point.
摘要翻译：信号传输装置包括发射电路11和接收电路12，该电路具有分别用于使固定电流流入其中的并联稳压器电源110和120;以及连接在发射电路11和接收电路12之间的信号传输路径13，以及具有防止交流分量的功能，其中发送电路11的接地GNDA和接收电路12的接地GNDB彼此独立地设置，并且连接到并联稳压器电源110的接地GNDC 和120点在单点。

80. 发明申请

US20100035180A1 CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION 有权
标题翻译：化学放大正电阻组合物
公开(公告)号：US20100035180A1
公开(公告)日：2010-02-11
申请号：US12536239
申请日：2009-08-05
申请人： Masahiko Shimada , Kazuhiko Hashimoto , Satoshi Yamaguchi , Soon Shin Kim , Yoshiyuki Takata , Takashi Hiraoka
发明人： Masahiko Shimada , Kazuhiko Hashimoto , Satoshi Yamaguchi , Soon Shin Kim , Yoshiyuki Takata , Takashi Hiraoka
IPC分类号： G03F7/004
CPC分类号： G03F7/0397 , G03F7/0045 , G03F7/0046 , Y10S430/108 , Y10S430/111
摘要： The present invention provides a chemically amplified positive composition comprising: a resin comprising a structural unit represented by the formula (I): wherein R1 represents a hydrogen atom, a halogen atom, a C1-C4 alkyl group or a C1-C4 perfluoroalkyl group, Z represents a single bond or —(CH2)k—CO—X4—, k represents an integer of 1 to 4, X1, X2, X3 and X4 each independently represents an oxygen atom or a sulfur atom, m represents an integer of 1 to 3 and n represents an integer of 0 to 3, and an acid generator.
摘要翻译：本发明提供一种化学放大阳性组合物，其包含：包含由式（I）表示的结构单元的树脂：其中R1表示氢原子，卤素原子，C1-C4烷基或C1-C4全氟烷基， Z表示单键或 - （CH 2）k -CO-X 4 - ，k表示1〜4的整数，X 1，X 2，X 3，X 4各自独立地表示氧原子或硫原子，m表示1的整数 3，n表示0〜3的整数，酸产生剂。

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