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    • 72. 发明授权
    • Method of forming a resistor and integrated circuitry having a resistor
construction
    • 形成电阻器的方法和具有电阻器结构的集成电路
    • US5668037A
    • 1997-09-16
    • US679705
    • 1996-07-11
    • Kirk PrallPierre C. FazanAftab AhmadHoward E. RhodesWerner JuenglingPai-Hung PanTyler Lowrey
    • Kirk PrallPierre C. FazanAftab AhmadHoward E. RhodesWerner JuenglingPai-Hung PanTyler Lowrey
    • H01L21/02H01L27/06H01L27/08H01L21/70
    • H01L28/20H01L27/0629H01L27/0802Y10S148/136
    • A method of forming a resistor from semiconductive material includes, a) providing a substrate; b) providing a layer of semiconductive material over the substrate; c) providing a pair of openings into the semiconductive material layer; d) plugging the pair of openings with an electrically conductive material to define a pair of electrically conductive pillars within the semiconductive material, the pair of pillars having semiconductive material extending therebetween to provide a resistor construction; and e) providing a conductive node to each of the electrically conductive pillars. An integrated circuit incorporating a resistor construction includes, i) a layer of semiconductive material; ii) a pair of electrically conductive pillars provided within the semiconductive material layer, the pair of pillars being separated from one another and thereby having a mass of the semiconductive material extending therebetween; and iii) an electrically conductive node in electrical connection with each of the respective conductive pillars. Alternately, a resistor is provided within a semiconductive substrate using different concentration diffusion regions.
    • 从半导体材料形成电阻器的方法包括:a)提供衬底; b)在衬底上提供半导体材料层; c)在半导体材料层中提供一对开口; d)用导电材料堵塞所述一对开口,以在所述半导体材料内限定一对导电柱,所述一对支柱具有在其间延伸的半导体材料以提供电阻器结构; 以及e)为每个导电柱提供导电节点。 结合电阻器结构的集成电路包括:i)半导体材料层; ii)设置在半导体材料层内的一对导电柱,所述一对柱彼此分离,从而具有在其间延伸的半导体材料的质量; 以及iii)与每个相应的导电柱电连接的导电节点。 或者,使用不同的浓度扩散区域在半导体衬底内提供电阻器。
    • 74. 发明授权
    • Method of fabricating phase shifting reticles using ion implantation
    • 使用离子注入制造相移标线的方法
    • US5217830A
    • 1993-06-08
    • US676939
    • 1991-03-26
    • Tyler Lowrey
    • Tyler Lowrey
    • G03F1/30
    • G03F1/30
    • A method of fabricating a phase shifting reticle that can be used as a mask in photolithographic processes such as semiconductor wafer patterning. A transparent quartz substrate is first coated with a patterned resist. The quartz substrate is then subjected to high voltage ion bombardment to produce a pattern of ion implant areas on the substrate. The ion implantation is closely controlled to produce areas on the substrate having an index of refraction different than the quartz substrate and selected to achieve a 180.degree. phase shift. An opaque film is then deposited over the substrate and patterned with openings. This produces a repetitive pattern of alternating light transmission openings and phase shifters having opaque light blockers on either side.
    • 一种制造可用作诸如半导体晶片图案化的光刻工艺中的掩模的相移掩模版的方法。 首先用图案化的抗蚀剂涂覆透明石英基板。 然后对石英衬底进行高压离子轰击,以在衬底上产生离子注入区域的图案。 密切地控制离子注入以产生具有不同于石英衬底的折射率的衬底上的区域,并且被选择以实现180°的相移。 然后将不透明膜沉积在基底上并用开口图案化。 这产生交替的光传输开口的重复图案和在任一侧上具有不透明光阻挡器的移相器。
    • 76. 发明授权
    • Multilevel variable resistance memory cell utilizing crystalline programming states
    • 利用晶体编程状态的多电平可变电阻存储单元
    • US08363446B2
    • 2013-01-29
    • US12578638
    • 2009-10-14
    • Wolodymyr CzubatyjTyler LowreyCharles DennisonCarl Schell
    • Wolodymyr CzubatyjTyler LowreyCharles DennisonCarl Schell
    • G11C11/00
    • G11C11/56G11C11/5678G11C13/0004G11C13/0069G11C2013/0092
    • A method of programming an electrical variable resistance memory device. When applied to variable resistance memory devices that incorporate a phase-change material as the active material, the method utilizes a plurality of crystalline programming states. The crystalline programming states are distinguishable on the basis of resistance, where the resistance values of the different states are stable with time and exhibit little or no drift. As a result, the programming scheme is particularly suited to multilevel memory applications. The crystalline programming states may be achieved by stabilizing crystalline phases that adopt different crystallographic structures or by stabilizing crystalline phases that include mixtures of two or more distinct crystallographic structures that vary in the relative proportions of the different crystallographic structures. The programming scheme incorporates at least two crystalline programming states and further includes at least a third programming state that may be a crystalline, amorphous or mixed crystalline-amorphous state.
    • 一种编程电可变电阻存储器件的方法。 当应用于包含相变材料作为活性材料的可变电阻存储器件时,该方法利用多个晶体编程状态。 结晶编程状态可以根据电阻进行区分,其中不同状态的电阻值随时间稳定并且表现出很小的或没有漂移。 因此,编程方案特别适用于多层存储器应用。 晶体编程状态可以通过稳定采用不同晶体结构的结晶相或通过稳定结晶相来实现,所述结晶相包括两种或更多种不同结晶学结构的混合物,其在不同结晶学结构的相对比例中变化。 编程方案包含至少两个晶体编程状态,并且还包括至少第三编程状态,其可以是晶体,无定形或混合晶体 - 非晶状态。