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71. 发明授权

US07592035B2 Method of coating microelectronic substrates 失效
标题翻译：涂布微电子基板的方法
公开(公告)号：US07592035B2
公开(公告)日：2009-09-22
申请号：US11261299
申请日：2005-10-28
申请人： James P. DeYoung , James B. McClain , Stephen M. Gross , Doug Taylor , Mark I. Wagner , David Brainard
发明人： James P. DeYoung , James B. McClain , Stephen M. Gross , Doug Taylor , Mark I. Wagner , David Brainard
IPC分类号： B05D5/12
CPC分类号： H01L21/283 , B05D1/18 , B05D2401/90 , H01L21/28556 , H01L21/288 , H01L21/67028 , H01L28/65
摘要： A method of coating a substrate comprises the steps of: (a) providing a substrate in an enclosed vessel, the substrate having a surface portion; (b) at least partially filling the enclosed vessel with a first supercritical fluid so that said first supercritical fluid contacts the surface portion, with the first supercritical fluid carrying or containing a coating component; then (c) adding a separate compressed gas atmosphere to the reaction vessel so that a boundary is formed between the first supercritical fluid and the separate compressed gas atmosphere, said separate compressed gas atmosphere having a density less than said first supercritical fluid; and then (d) displacing said first supercritical fluid from said vessel by continuing adding said separate compressed gas atmosphere to said vessel so that said boundary moves across said surface portion and a thin film of coating component is deposited on said microelectronic substrate.
摘要翻译：涂覆基材的方法包括以下步骤：（a）在封闭容器中提供基材，所述基材具有表面部分; （b）用第一超临界流体至少部分地填充封闭的容器，使得所述第一超临界流体接触表面部分，第一超临界流体携带或包含涂层组分; 然后（c）向所述反应容器中加入单独的压缩气体气氛，使得在所述第一超临界流体和所述单独的压缩气体气氛之间形成边界，所述单独的压缩气体气氛的密度小于所述第一超临界流体; 然后（d）通过将所述单独的压缩气体气氛继续加入到所述容器中，使所述边界移动穿过所述表面部分并且将涂层组分的薄膜沉积在所述微电子衬底上，从而使所述第一超临界流体从所述容器移位。

72. 发明授权

US07114508B2 Cleaning apparatus having multiple wash tanks for carbon dioxide dry cleaning and methods of using same 失效
公开(公告)号：US07114508B2
公开(公告)日：2006-10-03
申请号：US10402526
申请日：2003-03-28
申请人： Steve Lee Worm , James B. McClain
发明人： Steve Lee Worm , James B. McClain
IPC分类号： B08B3/00
CPC分类号： D06F43/007 , B08B7/0021
摘要： Cleaning apparatus having multiple wash tanks for washing articles in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution are provided. Cleaning apparatus having multiple wash tanks of the present invention may provide improved thermodynamic efficiency by allowing carbon dioxide vapor to be transferred between wash tanks rather than condensed. Cleaning apparatus having multiple wash tanks of the present invention may have a lower capital cost than multiple cleaning systems having single wash tanks. Cleaning apparatus having multiple wash tanks of the present invention include a first wash tank for contacting a first article with liquid carbon dioxide cleaning solution, and a second wash tank for contacting a second article with liquid carbon dioxide cleaning solution. The second wash tank is in fluid communication with the first wash tank. Methods of utilizing such cleaning apparatus are also provided. Coating apparatus having multiple coating tanks and methods of utilizing such coating apparatus are also provided.

73. 发明授权

US07044143B2 Detergent injection systems and methods for carbon dioxide microelectronic substrate processing systems 失效
公开(公告)号：US07044143B2
公开(公告)日：2006-05-16
申请号：US10259066
申请日：2002-09-27
申请人： James P. DeYoung , James B. McClain , Stephen M. Gross
发明人： James P. DeYoung , James B. McClain , Stephen M. Gross
IPC分类号： B08B3/10
CPC分类号： D06F43/007 , B08B7/0021 , D06F43/005 , D06F43/08
摘要： Microelectronic substrate processing systems include a microelectronic substrate processing chamber that is configured to contain therein at least one microelectronic substrate. A carbon dioxide supply system is configured to supply densified carbon dioxide to the microelectronic substrate processing chamber. A detergent supply system is configured to supply detergent to the microelectronic substrate processing chamber.

74. 发明授权

US06921420B2 Apparatus and methods for conserving vapor in a carbon dioxide dry cleaning system 失效
标题翻译：用于在二氧化碳干洗系统中保存蒸汽的装置和方法
公开(公告)号：US06921420B2
公开(公告)日：2005-07-26
申请号：US10893817
申请日：2004-07-19
申请人： David E. Brainard , James B. McClain , Michael E. Cole , Steve L. Worm
发明人： David E. Brainard , James B. McClain , Michael E. Cole , Steve L. Worm
IPC分类号： D06F43/00 , D06F43/08 , D06B5/24
CPC分类号： D06F43/08 , D06F43/007
摘要： A method for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the method includes removing carbon dioxide vapor from a wash tank to a vapor tank, storing the carbon dioxide vapor in the vapor tank; and charging the wash tank with carbon dioxide vapor from the vapor tank. The method may be performed as part of a wash cycle that includes filling the wash tank with cleaning solution, washing articles to be cleaned in the wash tank, and emptying the cleaning solution out of the wash tank. An apparatus may also be employed for conserving carbon dioxide vapor in a carbon dioxide dry cleaning system employing a liquid carbon dioxide cleaning solution to clean articles, where the apparatus includes a wash tank for contacting the articles to be cleaned with the liquid carbon dioxide cleaning solution, a working tank for storing liquid carbon dioxide cleaning solution, a vapor tank for storing carbon dioxide vapor, a first piping system providing fluid communication between the wash tank and the vapor tank, where the first piping system includes a first line and a first valve residing in the first line, and a second piping system providing fluid communication between the working tank and the wash tank. Methods and apparatus for collecting liquid carbon dioxide in a collecting tank are also provided.
摘要翻译：一种在二氧化碳干洗系统中保存二氧化碳蒸汽的方法，该系统采用液态二氧化碳清洗液清洁物品，其中该方法包括将二氧化碳蒸气从洗涤槽中除去至蒸气罐，将二氧化碳蒸气储存在蒸气中坦克; 并将来自蒸气罐的二氧化碳蒸汽向洗涤槽充电。该方法可以作为洗涤循环的一部分进行，其包括用洗涤溶液填充洗涤槽，在洗涤槽中清洗要清洗的物品，并将清洗溶液从清洗槽中排出。还可以使用一种装置来保存二氧化碳干洗系统中的二氧化碳蒸气，二氧化碳干洗系统采用液态二氧化碳清洗液来清洁物品，其中该设备包括用于将待清洗的物品与液体二氧化碳清洗液接触的洗涤槽，用于储存液体二氧化碳清洗溶液的工作罐，用于储存二氧化碳蒸气的蒸气罐，提供洗涤槽和蒸汽箱之间流体连通的第一管道系统，其中第一管道系统包括第一管线和第一阀居住在第一行，以及第二管道系统，其在工作罐和洗涤槽之间提供流体连通。还提供了用于在收集罐中收集液体二氧化碳的方法和装置。

75. 发明授权

US06623355B2 Methods, apparatus and slurries for chemical mechanical planarization 失效
公开(公告)号：US06623355B2
公开(公告)日：2003-09-23
申请号：US09816956
申请日：2001-03-23
申请人： James B. McClain , Joseph M. DeSimone
发明人： James B. McClain , Joseph M. DeSimone
IPC分类号： B24B100
CPC分类号： B24B57/02 , B24B37/042
摘要： Methods and apparatus for chemical mechanical planarization of an article such as a semiconductor wafer use polishing slurries including a carbon dioxide solvent or a carbon dioxide-philic composition. A carbon dioxide cleaning solvent step and apparatus may also be employed.

76. 发明授权

US06332342B2 Methods for carbon dioxide dry cleaning with integrated distribution 有权
标题翻译：二氧化碳干洗方法与综合分布
公开(公告)号：US06332342B2
公开(公告)日：2001-12-25
申请号：US09842603
申请日：2001-04-26
申请人： James B. McClain , Timothy J. Romack , James P. DeYoung , R. Bradley Lienhart , Joseph M. DeSimone , Kenneth L. Huggins
发明人： James B. McClain , Timothy J. Romack , James P. DeYoung , R. Bradley Lienhart , Joseph M. DeSimone , Kenneth L. Huggins
IPC分类号： D06B906
CPC分类号： D06L1/02
摘要： The present invention provides a dry cleaning process that facilitates distribution of detergent and solvent and (optionally) facilitates recovery of cleaning by-products in conjunction with the cleaning of articles at a dry cleaning facility. The process comprises the steps of: (a) receiving from a source a dry cleaning solvent at the dry cleaning facility, the solvent consisting essentially of carbon dioxide; (b) receiving a concentrated detergent formulation (preferably a liquid formulation) at the cleaning facility; (c) accepting from customers soiled articles to be cleaned at the cleaning facility; (d) mixing the dry cleaning solvent and the concentrated detergent formulation to provide a dry cleaning formulation comprised of from 30 or 40 to 99 percent by weight of carbon dioxide solvent; (e) cleaning the articles in a cleaning apparatus to produce cleaned articles; (f) at least periodically distilling the dry cleaning formulation to produce a still residue comprising surfactant and soil; and then (g) returning the cleaned articles to the customers. Optionally but preferably, the process further comprises the step of: (h) returning the still residue to a waste collector or reprocessor for suitable disposal.
摘要翻译：本发明提供了一种便于洗涤剂和溶剂的分配的干洗方法，并且（任选地）便于在干洗设施处清洁物品的同时回收清洁副产物。该方法包括以下步骤：（a）在干洗设备处从源头接收干洗溶剂，所述溶剂基本上由二氧化碳组成; （b）在清洁设施处接收浓缩洗涤剂配制剂（优选液体制剂）; （c）客户接受在清洁设施上清洁的污物; （d）混合干洗溶剂和浓缩洗涤剂配方以提供由30或40至99重量％的二氧化碳溶剂组成的干洗制剂; （e）清洁清洁设备中的物品以产生清洁物品; （f）至少定期蒸馏干洗制剂以产生包含表面活性剂和土壤的残余物; 然后（g）将清洁的物品送回顾客。可选地，但优选地，该方法还包括以下步骤：（h）将残余物返回到废物收集器或再处理器以进行适当处置。

77. 发明授权

US06287640B1 Surface treatment of substrates with compounds that bind thereto 有权
标题翻译：用与其结合的化合物对底物进行表面处理
公开(公告)号：US06287640B1
公开(公告)日：2001-09-11
申请号：US09561413
申请日：2000-04-28
申请人： James B. McClain , James P. DeYoung , Timothy J. Romack
发明人： James B. McClain , James P. DeYoung , Timothy J. Romack
IPC分类号： B05D100
CPC分类号： B05D1/18 , B05D2401/90 , C23C26/00 , C23C30/00 , D06M15/277 , D06M15/643 , D06M23/10 , D06M23/105 , D06M2101/06 , D06M2101/08 , D06M2101/12 , D06M2101/32 , D06M2101/34 , D06M2200/12
摘要： A method of treating a substrate comprises contacting a surface of said substrate with a pressurized fluid comprising carbon dioxide and a surface treatment component, the surface treatment component being one which binds to the substrate. The contacting step is preferably carried out by immersion, the fluid is preferably a liquid or supercritical fluid, the substrate is preferably a metal or fabric substrate, and the surface treatment component is preferably a fluoroacrylate polymer.
摘要翻译：处理基材的方法包括使所述基材的表面与包含二氧化碳和表面处理组分的加压流体接触，所述表面处理组分是与基材结合的组分。接触步骤优选通过浸渍进行，流体优选为液体或超临界流体，基底优选为金属或织物基底，并且表面处理组分优选为氟代丙烯酸酯聚合物。

78. 发明授权

US06248136B1 Methods for carbon dioxide dry cleaning with integrated distribution 有权
标题翻译：二氧化碳干洗方法与综合分布
公开(公告)号：US06248136B1
公开(公告)日：2001-06-19
申请号：US09497823
申请日：2000-02-03
申请人： James B. McClain , Timothy J. Romack , James P. DeYoung , R. Bradley Lienhart , Joseph M. DeSimone , Kenneth L. Huggins
发明人： James B. McClain , Timothy J. Romack , James P. DeYoung , R. Bradley Lienhart , Joseph M. DeSimone , Kenneth L. Huggins
IPC分类号： D06L100
CPC分类号： D06L1/02
摘要： The present invention provides a dry cleaning process that facilitates distribution of detergent and solvent and (optionally) facilitates recovery of cleaning by-products in conjunction with the cleaning of articles at a dry cleaning facility. The proces comprises the steps of: (a) receiving from a source a dry cleaning solvent at the dry cleaning facility, the solvent consisting essentially of carbon dioxide; (b) receiving a concentrated detergent formulation (preferably a liquid formulation) at the cleaning facility; (c) accepting from customers soiled articles to be cleaned at the cleaning facility; (d) mixing the dry cleaning solvent and the concentrated detergent formulation to provide a dry cleaning formulation comprised of from 30 or 40 to 99 percent by weight of carbon dioxide solvent; (e) cleaning the articles in a cleaning apparatus to produce cleaned articles; (f) at least periodically distilling the dry cleaning formulation to produce a still residue comprising surfactant and soil; and then (g) returning the cleaned articles to the customers. Optionally but preferably, the process further comprises the step of: (h) returning the still residue to a waste collector or reprocessor for suitable disposal.
摘要翻译：本发明提供了一种便于洗涤剂和溶剂的分配的干洗方法，并且（任选地）便于在干洗设施处清洁物品的同时回收清洁副产物。方法包括以下步骤：（a）在干洗设备处从干燥清洁设备处获得干洗溶剂，所述溶剂基本上由二氧化碳组成; （b）在清洁设施处接收浓缩洗涤剂配制剂（优选液体制剂）; （c）客户接受在清洁设施上清洁的污物; （d）混合干洗溶剂和浓缩洗涤剂配方以提供由30或40至99重量％的二氧化碳溶剂组成的干洗制剂; （e）清洁清洁设备中的物品以产生清洁物品; （f）至少定期蒸馏干洗制剂以产生包含表面活性剂和土壤的残余物; 然后（g）将清洁的物品送回顾客。可选地，但优选地，该方法还包括以下步骤：（h）将残余物返回到废物收集器或再处理器以进行适当处置。

79. 发明授权

US06200637B1 Method of coating a substrate in carbon dioxide with a carbon-dioxide insoluble material 有权
标题翻译：在二氧化碳中用二氧化碳不溶物质涂覆底物的方法
公开(公告)号：US06200637B1
公开(公告)日：2001-03-13
申请号：US09566408
申请日：2000-05-08
申请人： James B. McClain , Timothy J. Romack , James P. DeYoung
发明人： James B. McClain , Timothy J. Romack , James P. DeYoung
IPC分类号： B05D310
CPC分类号： D06M15/643 , B05D1/18 , B05D2401/90 , C23C26/00 , C23C30/00 , D06M15/277 , D06M23/10 , D06M23/105 , D06M2101/06 , D06M2101/08 , D06M2101/12 , D06M2101/32 , D06M2101/34 , D06M2200/12
摘要： A method of treating a substrate comprises contacting a surface of said substrate, with a pressurized fluid comprising carbon dioxide and a surface treatment component, the surface treatment component being entrained in the pressurized fluid and contacting the surface so that the surface treatment component lowers the surface tension of the surface of the substrate and treats the substrate. The contacting step is preferably carried out by immersion, the fluid is preferably a liquid or supercritical fluid, the substrate is preferably a metal or fabric substrate, and the surface treatment component is preferably a fluoroacrylate polymer.
摘要翻译：处理基材的方法包括使所述基材的表面与包含二氧化碳和表面处理组分的加压流体接触，所述表面处理组分被夹带在加压流体中并与表面接触，使得表面处理组分降低表面衬底表面的张力并处理衬底。接触步骤优选通过浸渍进行，流体优选为液体或超临界流体，基底优选为金属或织物基底，并且表面处理组分优选为氟代丙烯酸酯聚合物。

80. 发明授权

US06200393B1 Carbon dioxide cleaning and separation systems 失效
标题翻译：二氧化碳清洗和分离系统
公开(公告)号：US06200393B1
公开(公告)日：2001-03-13
申请号：US09632686
申请日：2000-08-07
申请人： Timothy J. Romack , James B. McClain , Gina M. Stewart , Ramone D. Givens
发明人： Timothy J. Romack , James B. McClain , Gina M. Stewart , Ramone D. Givens
IPC分类号： B08B704
CPC分类号： B08B7/0021 , C11D7/44 , C11D7/50
摘要： A separation method includes (a) providing a heterogeneous separation system, the heterogeneous cleaning system comprising CO2 in a first phase and an oil in a separate second phase; (b) entraining a material to be separated in the second phase; (c) wholly or partially solubilizing the second phase in the first phase to produce a separation system in which said material to be separated is insoluble; and then (d) separating the material from the system. The separating step is preferably followed by the step of (e) recovering at least a portion of the oil. The system is useful in a variety of applications, including cleaning (particularly metal cleaning), polymerization, extraction, coating, and particle formation and treatment.
摘要翻译：分离方法包括（a）提供非均相分离系统，所述非均相清洁系统包括第一阶段的CO 2和在独立的第二阶段中的油; （b）在第二阶段夹带分离材料; （c）在第一相中完全或部分地增溶第二相以产生分离系统，其中待分离的材料是不溶的; 然后（d）从系统中分离材料。优选分离步骤之后是（e）回收至少一部分油的步骤。该系统可用于各种应用，包括清洗（特别是金属清洗），聚合，萃取，涂覆和颗粒形成和处理。

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