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71. 发明专利

JP2000332208A FERROELECTRIC ELEMENT AND MANUFACTURE THEREOF 失效
公开(公告)号：JP2000332208A
公开(公告)日：2000-11-30
申请号：JP14205799
申请日：1999-05-21
申请人： HITACHI LTD
发明人： FUJIWARA TETSUO , NAMATAME TOSHIHIDE , SUZUKI TAKAAKI , MURATA YASUHIKO , HIGASHIYAMA KAZUHISA
IPC分类号： H01L27/105 , C04B35/00 , C04B35/495 , H01B3/12 , H01L21/8242 , H01L21/8246 , H01L27/10 , H01L27/108
摘要： PROBLEM TO BE SOLVED: To enable formation of a ferroelectric thin film of a ferroelectric element at a low temperature, and prevent generation of a denatured layer and coarse crystal grains on an electrode interface of the ferroelectric thin film, and deterioration of a circuit formed under a substrate. SOLUTION: In a ferroelectric element having an upper part electrode 40, a ferroelectric thin film 30 and a lower part electrode 20, the thin film 30 is composed of Bi layered perovskite type oxide containing Bi, to which at least one or more kinds of additive element selected from among a group composed of Pb, Sn, In and Tl are added. The thin film 30 is formed in a temperature range from 350 deg.C or higher to 500 deg.C or lower.

72. 发明专利

JP2000174224A DIELECTRIC CAPACITOR, SEMICONDUCTOR DEVICE, AND MIX- INTEGRATED LOGIC 失效
公开(公告)号：JP2000174224A
公开(公告)日：2000-06-23
申请号：JP34133698
申请日：1998-12-01
申请人： HITACHI LTD
发明人： FUJIWARA TETSUO , NAMATAME TOSHIHIDE , SUZUKI TAKAAKI , HIGASHIYAMA KAZUHISA
IPC分类号： H01L21/8247 , H01L21/822 , H01L21/8242 , H01L27/04 , H01L27/10 , H01L27/108 , H01L29/788 , H01L29/792
摘要： PROBLEM TO BE SOLVED: To prevent contact failure due to oxidation of an Si plug and a diffusion barrier layer even after being subjected to a dielectric film formation process, by connecting a lower electrode and a plug electrode via an oxidation barrier layer wherein the oxidation barrier layer is made of an alloy composed of a noble metal and a base metal. SOLUTION: An interlayer insulating film 108 of SiO2 is formed on a substrate 110. A contact hole 114 is formed in the interlayer insulating film 108, and inside of the hole 114 is filled with a polysilicon plug layer 106. Then, a diffusion barrier layer 105 of TiN is formed, and an oxygen barrier alloy layer 104 is formed consecutively. The oxygen barrier alloy layer 104 is made of a Pt-Al alloy composed of Pt for the noble metal and Al for the base metal. After then, Ru film is formed, and is worked to make a stepped shape to form a lower electrode 103. Accordingly, transmission of the intruding oxygen through the lower electrode 103 during a crystallization process for a dielectric thin film is avoided, therefore a contact failure can be prevented.

73. 发明专利

JP2000086239A OXIDE-BASED SUPERCONDUCTIVE MATERIAL, ITS PRODUCTION AND DEVICE USING THAT 失效
公开(公告)号：JP2000086239A
公开(公告)日：2000-03-28
申请号：JP25778898
申请日：1998-09-11
申请人： HITACHI LTD , INT SUPERCONDUCTIVITY TECH , CHUBU ELECTRIC POWER , FURUKAWA ELECTRIC CO LTD
发明人： HIGASHIYAMA KAZUHISA , YOSHIDA TAKASHI , HASEGAWA MASATO , MATSUMOTO KANAME , HIRABAYASHI IZUMI
IPC分类号： C01G1/00 , C01G3/00 , C30B23/00 , C30B29/22 , H01B12/06 , H01B13/00
摘要： PROBLEM TO BE SOLVED: To obtain a superconductive material having high critical temp. and high critical current density in a magnetic field by forming an oxide of Y or rare earth elements as an intermediate layer on a base material consisting of polycrystalline Ag or Al alloy material to produce a composite material with the crystals of the intermediate layer being aligned on the interface with the base material. SOLUTION: The oxide-based superconductive material is obtd. by making a composite body of a base material 3 consisting of polycrystalline Ag or Al alloy material, a Ln2O3 layer 2 having aligned crystals on the base body face (Ln is Y or at least one element selected from rare earth elements), and a superconductive body 1. When >=60% of 100) planes of the metal crystal in the polycrystalline Ag or Al alloy base body are almost parallel within 20 deg. angle to the interfaces of the base metal and the superconducting body, and when >=60% of axes of the metal crystals are aligned within 20 deg. angle, the superconducting characteristics such as critical temp. and critical current density are further improved. The chemical compsn. of the superconductive material is expressed by LnBa2Cu3O7-y wherein Ln is Y or rare earth element; y ranges -0.5

74. 发明专利

JPH09129042A OXIDE SUPERCONDUCTIVE COIL, OXIDE SUPERCONDUCTOR, AND ITS MANUFACTURE 失效
公开(公告)号：JPH09129042A
公开(公告)日：1997-05-16
申请号：JP28481195
申请日：1995-11-01
申请人： HITACHI LTD
发明人： YUASA TOYOTAKA , HIGASHIYAMA KAZUHISA , DOI TOSHIYA , SUGIYAMA NAOMI
IPC分类号： H01F6/06 , H01B12/06 , H01B13/00
摘要： PROBLEM TO BE SOLVED: To provide an oxide superconductive wire rod, conductor and coil crystal-oriented by thermal treatment by providing a notch on the long edge of the oxide superconductive wire rod to impregnate a resin layer through it, and providing an intermediate layer between a superconductor layer and the superconductive wire rod adjacent thereto. SOLUTION: A precursor film 2 of T1 or Hg superconductor 13 formed on a composite base formed of a silver or silver alloy base 1 and a metal or ceramic base 3. The resulting precursor wire rod is laminated together with an insulating layer 4 and worked into a conductor or coil form. A thermal treatment for introducing a volatile element into the precursor film 2 is performed to provide an oxide superconductor or oxide superconductive coil. The volatile element is introduced through a notch part provided on at least one position of the oxide superconductive wire rod to make the precursor film 2 into the oxide superconductive film. Further, an intermediate layer excellent in bending distortion resisting characteristic is present between the superconductive layer and the superconductive wire rod adjacent thereto.

75. 发明专利

JPH08190816A OXIDE SUPER CONDUCTING WIRE AND ITS MANUFACTURE 失效
公开(公告)号：JPH08190816A
公开(公告)日：1996-07-23
申请号：JP23232095
申请日：1995-09-11
申请人： HITACHI LTD
发明人： DOI TOSHIYA , OZAWA TAKESHI , YUASA TOYOTAKA , HIGASHIYAMA KAZUHISA
IPC分类号： C01G1/00 , C01G3/00 , C01G13/00 , C01G15/00 , C01G21/00 , C01G29/00 , H01B12/06 , H01B13/00 , H01L39/20
摘要： PURPOSE: To obtain a high superconducting critical current density at the liquid nitrogen temperature range by compounding a metallic body having a cubic aggregate structure and an oxide superconducting substance. CONSTITUTION: Pure silver is rolled at 220 deg.C so as to obtain 0.05mm thickness, and the same is annealed at 800 deg.C for two hours so as to form a silver tape board 10 in which crystal planes 100} of 80% or more are in parallel with a tape plane and orientation is arranged in parallel with a rolling direction. Solution composed of 11 of water, 0.01mol of thallium nitrate, 0.02mol of barium nitrate, 0.02mol of calcium nitrate, 0.03mol of copper nitrate, 0.05mol of glycine is atomized by ultrasonic so as to deposit on the silver board 10 of 800 deg.C in 3μm thickness. The same is annealed at 850 deg.C for 50 hours in an atmosphere of oxygen and Tl2 O vapour so as to form a superconducting substance 11. The (c) axis orientation of the crystal of 80% or more stay within 1 degree against the normal line of the board 10, the (a) axis thereof coincides with the rolling direction of the silver tape, and critical current density of 80kA/cm is obtained at a temperature of 77K and in a magnetic field of 1T.

76. 发明专利

JPH08106823A MANUFACTURE OF OXIDE SUPERCONDUCTIVE WIRE MATERIAL 失效
公开(公告)号：JPH08106823A
公开(公告)日：1996-04-23
申请号：JP24102194
申请日：1994-10-05
申请人： HITACHI LTD
发明人： DOI TOSHIYA , HIGASHIYAMA KAZUHISA , NAGAMURA MITSUZO
IPC分类号： C01G1/00 , C01G29/00 , H01B12/04 , H01B13/00 , H01F6/06
摘要： PURPOSE: To form a superconductivity applied device of superior performances by having all the triaxiality of crystal orientation of a supercooductive material so as to provided with extremely high superconductive critical current density. CONSTITUTION: Powder of Bi2 O3 , SrO, CaO, and CuO of purity 99% or more are mixed so as to have an atomic rate of Bi:Sr:Cu=2:2:1:2. This mixture is put in an aluminum crucible and calcinated in an air flow of, for example, 20% of oxygen and 80% of nitrogen under 800 deg.C for 24 hours. This is pulverized again in a glove in which 100% of nitrogen gas is flown and the POWDER is filled in a silver pipe of 99.99% purity. This is wire-drawn, for example, to an outer diameter of 1.5mm by a drawing bench under being kept at 160 deg.C, for example, and after that, is rolled into, for example, the thickness of 0.07mm under being kept at 160 deg.C. This is cut into 3cm and heat treated in an air flow of 20% of oxygen and 80% of nitrogen. The superconductive material are thus provided with all the triaxiality of crystal orientation so that extremely high superconductive critical current density can be obtained. This is set to superconductive wire material BSCC 1 and silver 2.

77. 发明专利

JPH07192546A OXIDE SUPERCONDUCTIVE WIRE MATERIAL AND MANUFACTURE THEREOF 失效
公开(公告)号：JPH07192546A
公开(公告)日：1995-07-28
申请号：JP22474594
申请日：1994-09-20
申请人： HITACHI LTD
发明人： DOI TOSHIYA , OZAWA TAKESHI , YUASA TOYOTAKA , HIGASHIYAMA KAZUHISA
IPC分类号： C01G1/00 , C01G3/00 , C01G13/00 , C01G15/00 , C01G29/00 , H01B12/04 , H01B13/00 , H01L39/20
摘要： PURPOSE:To manufacture a superconductive wire material having a high superconductive critical current density in a high magnetic field by forming an oxide superconductive substance onto the metal body of a polycrystalline substance having cube aggregate structure and specifying an angle between the {100} surface and direction of the metal crystal of the metal body. CONSTITUTION:The block of silver having a purity of about 99.99% is kept at about 220 deg.C to be roll-treated about 5 times and then annealed at about 800 deg.C for about 2 hours to manufacture a silver tape 10 having cube aggregate structure. An oxide superconductive substance 11 is formed by turning aqueous solution, wherein thallium nitrate, barium nitrate, calcium nitrate, copper nitrate, and glycine having a purity of about 98% or more are blended at a given rate, into a liquid drop to be sprayed on a silver tape base plate 10 (temperature at about 800 deg.C) to be accumulated at a thickness of about 3mum and successively to be annealed in the atmosphere of oxygen gas and Tl2O vapon. This provides a superconductive wire material wherein the {100 surface} of the metal crystal of the silver tape 10 is parallel within 10 degree to the interface between the silver tape 10 and the oxide superconductive substance 11 and the directions are even each other within 10 degrees.

78. 发明专利

JPH01264930A PRODUCTION OF OXIDE SUPERCONDUCTOR AND APPLIED PRODUCT OF SAID OXIDE SUPERCONDUCTOR 失效
公开(公告)号：JPH01264930A
公开(公告)日：1989-10-23
申请号：JP9150288
申请日：1988-04-15
申请人： HITACHI LTD
发明人： KAMO YUICHI , HIGASHIYAMA KAZUHISA , KUMAGAI TERUO , AIHARA KATSUZO , MATSUDA SHINPEI , OKADA MICHIYA
IPC分类号： H01L39/12 , C01G1/00 , C01G15/00 , C04B35/00 , C04B35/45 , C04B41/89 , C23C14/08 , C23C14/34 , C23C16/30 , H01B12/04 , H01B13/00
摘要： PURPOSE:To produce an oxide superconductor having high critical temp., uniform quality, and sharp transition characteristics of superconductivity by calcining a compsn. contg. Tl and Cu at

79. 发明专利

JPS63319211A SUPERCONDUCTING MATERIAL AND PRODUCTION THEREOF 失效
公开(公告)号：JPS63319211A
公开(公告)日：1988-12-27
申请号：JP15546787
申请日：1987-06-24
申请人： HITACHI LTD
发明人： HIGASHIYAMA KAZUHISA , KAMO YUICHI , KUMAGAI TERUO , YAMASHITA HISAO , OKADA HIDEO , MATSUDA SHINPEI , HISHINUMA TAKAO
IPC分类号： C01G3/00 , C01G1/00 , H01B12/02 , H01B13/00 , H01L39/12 , H01L39/24
摘要： PURPOSE:To produce a superconducting material having superior formability, mechanical strength and high critical current density by impregnating a soln. of a silver compd. into oxide superconductor powder or powder of a starting material mixture for the superconductor, drying the impregnated powder and calcined it at a specified temp. in an oxygen atmosphere. CONSTITUTION:A soln. of a silver compd. such as silver nitrate is impregnated into oxide superconductor powder exhibiting superconductivity obtd. by coprecipitation or other method or powder of a starting material mixture exhibiting superconductivity after calcination. The impregnated powder is dried and calcined at 400-1,100 deg.C in an oxygen atmosphere optionally in the presence of steam to support silver on the surfaces of the fine oxide superconductor particles and to obtain a superconducting material having superior formability, high mechanical strength after forming into a wire or the like and high critical current density.

80. 发明专利

JPS63291313A SUPERCONDUCTOR 失效
公开(公告)号：JPS63291313A
公开(公告)日：1988-11-29
申请号：JP12385187
申请日：1987-05-22
申请人： HITACHI LTD
发明人： KUMAGAI TERUO , HIGASHIYAMA KAZUHISA , OKADA HIDEO , KAMO YUICHI , YAMASHITA HISAO , AIHARA KATSUZO , MATSUDA SHINPEI , HISHINUMA TAKAO
IPC分类号： H01L39/12 , H01B12/06
摘要： PURPOSE:To secure such an oxide superconductor that is excellent in lightweightiness, processability and installability suitable for a magnetic shielding material by forming grainy oxide superconducting material and fibrous material both on a substrate. CONSTITUTION:Grainy oxide superconducting material 2 having superconductivity at more than a boiling point of liquid hydrogen and fibrous material 3 both are formed on the surface of a structural base material 1 for magnetic shielding. When it is cooled by a refrigerant of more than a boiling point of liquid hydrogen, a shielding current is generated in this material 2 whereby an external magnetic field is screenable. The base material 1 may be any of metal, organic matter and inorganic matter unless conductivity of the material 2 is dissipated, and in order to strengthen its adhesion, the surface is roughed to some degree. As for the material 2, such material that shows conductivity of a composite oxide of yttrium-barium-copper having a perovskite structure is used. And, as for the material 3, those of silver fiber, nickel fiber, etc., that are resistible to low temperature and, what is more, less in deterioration against a heat cycle are used.

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