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71. 发明申请

US20190111516A1 METHODS AND DEVICES FOR DETERMINING A REFERENCE FOCUS POSITION OF A BEAM OF BEAM-BASED MACHINE TOOLS BY PERFORMING TEST CUTS ON A WORKPIECE 审中-公开
公开(公告)号：US20190111516A1
公开(公告)日：2019-04-18
申请号：US16229217
申请日：2018-12-21
申请人： TRUMPF Laser- und Systemtechnik GmbH
发明人： Jeremy Meyer
IPC分类号： B23K26/04 , B23K26/03 , B23K26/38 , B23K26/00 , B23K26/08
摘要： Disclosed are methods of determining a reference focus position of a beam of a beam-based machine tool. The methods providing a relative motion trajectory defining a discoid area with respect to a surrounding area, the discoid area being connected to the surrounding area via at least one bridge area, and performing a sequence of test cuts on a workpiece, wherein at each test cut, a cutting structure is cut in the workpiece by guiding the beam along the relative motion trajectory and the cutting is performed along the at least one bridge area of the relative motion trajectory at differently set focus positions.

72. 发明授权

US10207360B2 Determining deviations of an actual position of a laser machining head from a desired position 有权
公开(公告)号：US10207360B2
公开(公告)日：2019-02-19
申请号：US15044270
申请日：2016-02-16
申请人： TRUMPF Laser- und Systemtechnik GmbH
发明人： Wolf Wadehn , Tobias Hagenloche
IPC分类号： B23K26/03 , B23K26/08 , B23K26/042 , G05B19/402
摘要： Implementations of the present disclosure include methods, systems, and computer-readable storage mediums for determining a deviation between an actual position and a desired position of a laser machining head of a laser machining machine. Implementations include actions of selecting at least two different machining positions of the laser machining head, in which a laser beam emitted by the laser machining head is directed onto a desired position of a workpiece, moving the laser machining head into a first selected machining position and forming a through-opening into the workpiece at or around the desired position by operation of the laser beam, moving the laser machining head into a second selected machining position and detecting radiation generated by an interaction between the laser beam and the workpiece, and determining whether there is a deviation between an actual position of the laser machining head and the desired position based on the detected radiation.

73. 发明授权

US10137531B2 Methods and systems for separating an edge portion of a workpiece using a laser 有权
公开(公告)号：US10137531B2
公开(公告)日：2018-11-27
申请号：US13953255
申请日：2013-07-29
申请人： Trumpf Laser- und Systemtechnik GmbH
发明人： Wolf Wadehn , Peter Demel , Markus Grill , Ralf Kohlloeffel , Tobias Hagenlocher , Ralf von Driesch
IPC分类号： B23K26/14 , B23K26/40 , B23K26/03 , B23K26/04 , B23K26/08 , B23K26/38 , B23K26/361 , B23K101/18 , B23K103/00
摘要： A method for cutting off an edge portion of a workpiece includes applying a laser to the workpiece to form multiple individual severing cuts in the edge portion such that the edge portion is cut off from the workpiece, the multiple individual severing cuts being arranged together along the edge portion. Applying the laser to the workpiece to form the multiple individual severing cuts includes, for each individual severing cut, translating a laser cutting head and/or the workpiece relative to one another, and detecting, at an end of each severing cut, an edge of the workpiece, in which the translation of the laser cutting head or the workpiece continues at least until the edge is detected.

74. 发明申请

US20180233876A1 GENERATING PLASMA OR LASER PULSES BY RADIOFREQUENCY EXCITATION PULSES 审中-公开
公开(公告)号：US20180233876A1
公开(公告)日：2018-08-16
申请号：US15950267
申请日：2018-04-11
申请人： TRUMPF Laser- und Systemtechnik GmbH
发明人： Robert Schulz , Torsten Beck
IPC分类号： H01S3/097 , H05H1/46 , H01S3/10 , H01S3/223 , H01S3/0971 , H01S3/134
摘要： Methods, devices, and apparatus for generating plasma or laser pulses by radio frequency (RF) excitation pulses are provided. In one aspect, a method includes specifying radio frequency (RF) excitation pulses at least partially as a function of a preceding RF excitation of a medium and outputting a signal to a RF pulse generator, the signal configured to cause the RF pulse generator to generate the specified RF excitation pulses for exciting the medium to generate plasma or laser pulses. The RF excitation pulses is specified to become more strongly reduced in energy when a remaining excitation of the medium by the preceding RF excitation is higher.

75. 发明申请

US20170361405A1 IRRADIATION SYSTEM FOR AN ADDITIVE MANUFACTURING DEVICE 审中-公开
公开(公告)号：US20170361405A1
公开(公告)日：2017-12-21
申请号：US15690378
申请日：2017-08-30
申请人： TRUMPF Laser- und Systemtechnik GmbH
发明人： Bernd Hermann Renz , Frank Peter Wüst , Johannes Bauer
IPC分类号： B23K26/342 , B33Y30/00 , H01S5/022 , H01S5/00 , H01S3/0941 , B33Y50/02 , H01S3/00 , B28B1/00 , B23K26/06 , B23K26/70 , B23K26/082 , B23K26/0622 , H01S5/40 , H01S3/06
CPC分类号： B23K26/342 , B22F3/1055 , B22F2003/1056 , B23K26/0608 , B23K26/0622 , B23K26/0626 , B23K26/082 , B23K26/705 , B28B1/001 , B29C64/153 , B29C64/20 , B33Y30/00 , B33Y50/02 , B33Y80/00 , H01S3/005 , H01S3/0071 , H01S3/06 , H01S3/067 , H01S3/0941 , H01S3/2391 , H01S5/0071 , H01S5/02284 , H01S5/4012 , H01S5/4025 , Y02P10/295
摘要： An irradiation system includes: a first beam source configured to output a first laser beam and a second beam source configured to output a second laser beam, in which the second laser beam has a higher beam quality higher than that of the first laser beam;optics arranged to focus the first and second laser beams; and a beam guiding system including a first beam path along which the first laser beam is guided, and a second beam path along which the second laser beam is guided, in which the beam guiding system includes a beam combiner to superimpose the first and second laser beams, the first beam source is a pump laser, the second beam source is a laser resonator, and the beam guiding system further includes a beam switch adapted to feed the first laser beam into a pump laser beam path and/or into the first beam path.

76. 发明申请

US20170343079A1 Energy Guiding Chains for Processing Machines 有权
公开(公告)号：US20170343079A1
公开(公告)日：2017-11-30
申请号：US15678693
申请日：2017-08-16
申请人： TRUMPF Laser- und Systemtechnik GmbH
发明人： Martin Blaser , Gunter Fischer , Joerg Mueller
IPC分类号： F16G13/16 , H02G11/00
CPC分类号： F16G13/16 , H02G3/0475 , H02G11/006
摘要： An energy guiding chain has a plurality of articulately interconnected chain links comprising two outermost links and a plurality of inner links, and a bendable cover strip covering at least one of two sides of the articulately interconnected chain links, wherein the cover strip is held by at least some of the inner chain links, and guided displaceably with respect to at least the inner chain links in a chain longitudinal direction, and wherein the cover strip projects in a chain transverse direction at least on one side over the chain links. A processing machine for the machining of workpieces and a method of using an energy guiding chain are also described.

77. 发明申请

US20160353561A1 Protecting a Vacuum Environment from Leakage 有权
标题翻译：保护真空环境免受泄漏
公开(公告)号：US20160353561A1
公开(公告)日：2016-12-01
申请号：US15233438
申请日：2016-08-10
申请人： TRUMPF Laser- und Systemtechnik GmbH
发明人： Andreas Enzmann , Bjoern Volz
IPC分类号： H05G2/00
CPC分类号： H05G2/008 , G02B7/007 , G02B7/008 , H01S3/2232 , H05G2/005
摘要： Methods, devices, and systems for protecting a vacuum environment from leakage are provided. The devices include an optical component for gas-tight closure of the vacuum environment, a retention device configured to retain the optical component and including a cooling region separated from the vacuum environment in a gas-tight manner and configured to receive a cooling medium to cool the optical component, a first part-region of the optical component being arranged in the cooling region, and a reduced-pressure region configured to have a reduced pressure and separated in a gas-tight manner from the vacuum environment and from the cooling region, a second part-region of the optical component being arranged in the reduced-pressure region, and a detector configured to detect a leakage in the optical component when the cooling medium flows from the cooling region into at least one of the reduced-pressure region or the vacuum environment.
摘要翻译：提供了用于保护真空环境免受泄漏的方法，装置和系统。这些装置包括用于真空环境的气密闭合的光学部件，保持装置，其构造成保持光学部件并且包括以气密方式从真空环境分离的冷却区域，并且被配置为接收冷却介质以冷却所述光学部件，所述光学部件的布置在所述冷却区域中的第一部分区域和被配置为具有减压并且以气密方式从所述真空环境和所述冷却区域分离的减压区域，布置在减压区域中的光学部件的第二部分区域，以及检测器，被配置为当冷却介质从冷却区域流入至少一个减压区域时检测光学部件的泄漏，真空环境。

78. 发明授权

US09016881B2 Beam guide and method for adjusting the opening angle of a laser beam 有权
标题翻译：光束引导件和调整激光束打开角度的方法
公开(公告)号：US09016881B2
公开(公告)日：2015-04-28
申请号：US13834172
申请日：2013-03-15
申请人： Trumpf Laser-und Systemtechnik GmbH
发明人： Martin Lambert
IPC分类号： G02B5/10 , G02B7/182 , G02B5/08 , G02B27/09 , H05G2/00
CPC分类号： G02B27/0983 , H05G2/008
摘要： Beam guides for guiding a laser beam from a driver laser device in the direction of a target position for generating extreme ultraviolet (“EUV”) radiation are disclosed. The beam guides include a device for increasing or decreasing the beam diameter of the laser beam. The device includes a first off-axis parabolic mirror having a first convex curved reflecting surface and a second off-axis parabolic mirror having a second concave curved reflecting surface. The beam guides also include a moving device arranged to change a distance between the first and the second reflecting surfaces to change the opening angle (α), e.g., the convergence or divergence angle, of the laser beam. Methods for adjusting an opening angle (α) of a laser beam using such beam guides are also disclosed.
摘要翻译：公开了用于引导来自驱动器激光装置的激光束在用于产生极紫外（“EUV”）辐射的目标位置的方向上的光束引导件。光束引导件包括用于增加或减小激光束的光束直径的装置。该装置包括具有第一凸曲面反射表面的第一离轴抛物面反射镜和具有第二凹曲面反射表面的第二离轴抛物面反射镜。光束引导件还包括移动装置，其布置成改变第一和第二反射表面之间的距离以改变激光束的打开角度（α），例如会聚或发散角度。还公开了使用这种光束引导件来调节激光束的打开角度（α）的方法。

79. 发明授权

US08847182B2 EUV radiation generating apparatus and operating methods 有权
标题翻译： EUV辐射发生装置和操作方法
公开(公告)号：US08847182B2
公开(公告)日：2014-09-30
申请号：US13834108
申请日：2013-03-15
申请人： Trumpf Laser- und Systemtechnik GmbH
发明人： Martin Lambert , Andreas Enzmann
IPC分类号： G01N21/00 , G01N21/33 , H05G2/00
CPC分类号： H05G2/008
摘要： The invention relates to extreme ultraviolet “EUV” radiation generating systems that include a vacuum chamber where a target material can be positioned at a target position for generation of EUV radiation, and a beam guiding chamber for guiding a laser beam from a driver laser device towards the target position. The EUV radiation generating apparatus includes an intermediate chamber which is arranged between the vacuum chamber and the beam guiding chamber, a first window which seals the intermediate chamber in a gas-tight manner for entry of the laser beam from the beam guiding chamber and a second window which seals the intermediate chamber in a gas-tight manner for exit of the laser beam into the vacuum chamber. The invention also relates to a method for operating the EUV radiation generating apparatus.
摘要翻译：本发明涉及包括真空室的极紫外“EUV”辐射发生系统，其中目标材料可以定位在用于产生EUV辐射的目标位置处，以及光束引导室，用于将来自驱动激光装置的激光束引向目标位置。 EUV辐射发生装置包括设置在真空室和光束引导室之间的中间室，第一窗口，其以气密方式密封中间室，以使激光束从光束引导室进入;以及第二窗口窗口，其以气密方式密封中间室，以将激光束退出到真空室中。本发明还涉及一种用于操作EUV辐射发生装置的方法。

80. 发明申请

US20140175071A1 Method for Detecting Defects During a Laser-Machining Process and Laser-Machining Device 有权
标题翻译：用于检测激光加工过程中的缺陷的方法和激光加工装置
公开(公告)号：US20140175071A1
公开(公告)日：2014-06-26
申请号：US14140711
申请日：2013-12-26
申请人： TRUMPF Laser - und Systemtechnik GmbH
发明人： Dieter Pfitzner , Holger Braun , Friedhelm Dorsch
IPC分类号： B23K26/03 , G06T7/00 , B23K26/04
CPC分类号： G06T7/0008 , B23K26/032 , B23K26/034 , B23K26/04 , B23K26/244 , B23K26/32 , B23K26/322 , B23K2101/34 , B23K2103/08 , B23K2103/50
摘要： Detection of defects during a machining process includes: moving a laser beam along a predefined path over multiple workpieces to be machined so as to generate a weld seam or a cutting gap in the workpieces; detecting, in a two-dimensional spatially resolved detector field of a detector, radiation emitted and/or reflected by the multiple workpieces; selecting at least one detection field section in the detection field of the detector based on laser beam control data defining movement of the laser beam along the predefined path or based on a previously determined actual-position data of the laser beam along the predefined path, wherein each detection field section comprises a region encompassing less than the entire detection field; evaluating the radiation detected in in the selected detection field section; and determining whether a defect exists at the weld seam or the cutting gap based on the evaluated radiation.
摘要翻译：在加工过程中检测缺陷包括：将激光束沿预定路径移动到待加工的多个工件上，以便在工件中产生焊缝或切割间隙; 在检测器的二维空间分辨检测器场中检测由多个工件发射和/或反射的辐射; 基于激光束控制数据来选择检测器的检测区域中的至少一个检测场部分，所述激光束控制数据定义激光束沿预定路径的运动，或者基于先前确定的沿预定路径的激光束的实际位置数据，其中每个检测场部分包括一个包含小于整个检测场的区域; 评估在所选择的检测场部分中检测到的辐射; 以及基于所评估的辐射来确定在所述焊缝或所述切割间隙处是否存在缺陷。

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