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    • 76. 发明专利
    • DE3743880C2
    • 1992-09-03
    • DE3743880
    • 1987-12-23
    • TOSHIBA CERAMICS CO., LTD., TOKIO/TOKYO, JP
    • MATSUO, SHUITSU, ATSUGI, KANAGAWA, JPITO, KAZUOSAITO, MASAYUKI, YAMAGATA, JP
    • C30B15/10C30B29/06
    • PURPOSE:To reduce production-running cost and release of polluting gas, by placing a cylindrical unit covering the outer periphery of a crucible and drum part thereof on a crucible cradle on a rotating shaft inserted from the lower opening of a chamber. CONSTITUTION:A rotating shaft 3 is inserted from the lower opening of a chamber 1 and a crucible cradle 4 consisting of isotropic carbon is fixed to the upper end of the rotating shaft 3. A cylindrical unit 6 covering the crucible 5 made of quartz glass and the outer periphery thereof is placed on the cradle 4. The cylindrical unit 6 consists of a carbon composite material prepared by winding carbon fibers into a cylindrical form, impregnating the carbon fibers with a resin and firing the impregnated fibers. A Si raw material in the crucible 5 is then melted by a carbon heater 7 and a seed crystal 13 is dipped in a Si melt 10 and pulled up to pull up a Si single crystal 14. The production cost of the cylindrical unit 6 is reduced and hardly broken by this device. Even if the cylindrical unit 6 or cradle 5 is broken, only the part may be exchanged. Furthermore, since the isotropic carbon is used only in the part of the cradle 4, a bad influence of occluded gases on the single crystal is reduced.