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    • 73. 发明授权
    • Method of fabricating a semiconductor device
    • 制造半导体器件的方法
    • US06465295B1
    • 2002-10-15
    • US08620928
    • 1996-03-22
    • Kenji Kitamura
    • Kenji Kitamura
    • H01L218238
    • H01L21/76218H01L21/823807H01L21/823842H01L21/823878H01L2924/0002H01L2924/00
    • A semiconductor device fabrication method comprises the steps of forming a gate insulating film on a surface of a semiconductor substrate, forming a polysilicon film on the gate insulating film, and implanting B or BF2 impurity ions into the polysilicon film. The polysilicon film is then heat-treated at a temperature of 700-900° C. to activate and diffuse the implanted B or BF2 impurity ions. Thereafter, a silicide film is formed on the heat-treated polysilicon film. The silicide film and the heat-treated polysilicon film are then etched to form a gate electrode on the gate insulating film. A CVD-grown dielectric film having a thickness of 5 to 1000 Å is then formed over the whole surface of the semiconductor substrate and the gate electrode. B or BF2 impurity ions are then implanted into the surface of the semiconductor substrate, using the gate electrode as a mask, to form source/drain regions. A BPSG interlayer film is then formed on the CVD-grown dielectric film, and the source/drain regions and the BPSG interlayer film are heated at a temperature of 800-1050° C. for a period less than 3 minutes to activate the source/drain regions and to planarize the BPSG interlayer film.
    • 半导体器件制造方法包括以下步骤:在半导体衬底的表面上形成栅极绝缘膜,在栅极绝缘膜上形成多晶硅膜,并将B或BF 2杂质离子注入到多晶硅膜中。 然后将多晶硅膜在700-900℃的温度下热处理,以激活和扩散注入的B或BF 2杂质离子。 此后,在热处理多晶硅膜上形成硅化物膜。 然后对硅化物膜和经热处理的多晶硅膜进行蚀刻,以在栅极绝缘膜上形成栅电极。 然后在半导体衬底和栅电极的整个表面上形成厚度为5至1000埃的CVD生长的电介质膜。 然后使用栅电极作为掩模将B或BF 2杂质离子注入到半导体衬底的表面中,以形成源/漏区。 然后在CVD生长的电介质膜上形成BPSG层间膜,并将源极/漏极区域和BPSG中间膜在800-1050℃的温度下加热少于3分钟的时间,以激活源/ 漏区,并使BPSG中间膜平坦化。
    • 76. 发明授权
    • Method for coloring textile using a color supply drum and a color
suction drum
    • 使用供色鼓和彩色抽吸滚筒着色纺织品的方法
    • US4843670A
    • 1989-07-04
    • US130126
    • 1987-12-08
    • Shuichi NakaharaToru KoideMichinobu KaimoriKenji KitamuraSatoshi Matsumoto
    • Shuichi NakaharaToru KoideMichinobu KaimoriKenji KitamuraSatoshi Matsumoto
    • B05C1/10B05C9/04D06B11/00
    • B05C1/10B05C9/04D06B11/0003
    • This invention provides a method and an apparatus for direct formation of a stripe pattern on a textile substrate such as sliver. The object of the invention is to dispense with a gill which would interfere with a high-speed feed of said textile substrate and thereby improve the efficiency of coloration. In accordance with this invention, a color supply hollow drum (2) and a color suction hollow drum (3) are vetically juxtaposed and a continuous length of fibrous material is continuously fed between said two drums (2), (3) by rotation thereof. As the substrate material is thus fed, a color composition is supplied from color supply grooves (8) of the color supply hollow drum (2) while it is drawn by a suction force acting in color suction grooves (13) of the color suction hollow drum (3) to cause the color composition to strike through the fibrous substrate material to thereby form color stripes of substantially the same configuration as that of the above-mentioned grooves on the fibrous substrate material.
    • 本发明提供了一种用于在诸如条子的织物基底上直接形成条纹图案的方法和装置。 本发明的目的是省去会妨碍所述织物基材的高速进料并因此提高着色效率的鳃。 根据本发明,色彩供应中空鼓(2)和彩色抽吸中空鼓(3)被并列并且连续长度的纤维材料通过其旋转连续地供给在所述两个滚筒(2),(3)之间 。 当由此供给衬底材料时,通过作用在吸色空心鼓(2)的彩色抽吸槽(13)中的抽吸力来抽出颜色组合物,色彩供应凹槽(8) 鼓(3)使颜色组合物穿过纤维基材,从而形成与纤维基材上的上述凹槽基本上相同构型的色条。