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    • 76. 发明申请
    • CONVOLUTION METHOD FOR MEASURING LASER BANDWIDTH
    • 用于测量激光带宽的方法
    • WO2003016841A1
    • 2003-02-27
    • PCT/US2002/023821
    • 2002-07-25
    • CYMER, INC.HAAS, StevenSANDSTROM, Richard, L.HOFMANN, ThomasERSHOV, Alexander, I.
    • HAAS, StevenSANDSTROM, Richard, L.HOFMANN, ThomasERSHOV, Alexander, I.
    • G01J3/18
    • G01J3/26G01J1/4257G01J3/02G01J3/027G01J3/12G01J3/1809G01J3/22G01J3/28G01J9/02
    • A simple, reliable, easy to use method for calculating bandwidth data of very narrow band laser beams based on bandwidth data obtained with a spectrometer in circumstances where the laser bandwidths are not large compared to the slit function of the spectrometer. The slit function of the spectrometer is determined (20). Spectral data of the laser beam is measured with the spectrometer to produce a measured laser beam spectrum which represents a convolution of the laser beam spectrum and the spectrometer slit function (76). This measured laser spectrum is then mathematically convolved with the slit function of the spectrometer to produce a doubly convolved spectrum. Bandwidth values representing true laser bandwidths are determined from measured laser spectrum and the doubly convolved spectrum. Preferably the true laser bandwidths are calculated by determining the difference between "twice a measured laser bandwidth" and a corresponding "doubly convolved bandwidth." This method provides an excellent estimate of the true laser bandwidth because "twice the measured laser bandwidth" represents two laser bandwidths and two spectrometer slit function bandwidths and the "doubly convolved bandwidth" represents one laser bandwidth and two spectrometer slit function bandwidths. Thus, the difference is a representation of the true laser bandwidth. In a preferred embodiment the bandwidth parameters measured are the full width half-maximum bandwidth and the 95% integral bandwidth.
    • 基于在与光谱仪的狭缝功能相比激光带宽不大的情况下,利用光谱仪获得的带宽数据,计算非常窄带激光束的带宽数据的简单,可靠,易于使用的方法。 确定光谱仪的狭缝功能(20)。 使用光谱仪测量激光束的光谱数据,以产生测量的激光束光谱,其表示激光束光谱和光谱仪狭缝功能的卷积(76)。 然后将该测量的激光光谱与光谱仪的狭缝函数进行数学卷积以产生双卷积光谱。 表示真实激光带宽的带宽值由测量的激光光谱和双卷积光谱确定。 优选地,通过确定“两次测量的激光带宽”和相应的“双卷积带宽”之间的差异来计算真实的激光器带宽。 该方法提供了真正的激光器带宽的极好估计,因为“两倍测量激光带宽”代表两个激光带宽和两个光谱仪狭缝功能带宽,“双卷积带宽”代表一个激光带宽和两个光谱仪狭缝功能带宽。 因此,不同之处在于真正的激光带宽的表示。 在优选实施例中,测量的带宽参数是全宽度半最大带宽和95%积分带宽。